[Scan]
initial_time=2016-01-28T15:44:38
final_time=2016-01-28T15:44:57
ip_count=19
run=1026
dataset=1
scan=6
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.81155E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.25463E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.23614E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.4194E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.44154E-8
mult1=-1.00414E-8
mult2=-2.64076E-9
rf_tmon=-3.60518E-3
rf_agc=3.47756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=6.33097E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.40797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.96757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.22928E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09543E0
lens1_imon=1.32288E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.01261E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.0121E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=2.45135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93215E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.0345E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.39367E-9
tplens_vset=0.0E0
tplens_vmon=-1.59457E0
tplens_imon=-3.42605E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99276E1
iondef3_imon=8.78153E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98416E1
iondef2_imon=9.42321E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.05867E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=9.47729E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19862E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00352E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10742E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.35247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.08279E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5768E1
iondef1_imon=5.03238E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50178E1
iondef4_imon=5.11821E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.67033E-8
olens1_vset=0.0E0
olens1_vmon=1.66893E-3
olens1_imon=1.21804E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.54008E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.78078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.40084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06933E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59823E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3043E1
cs_fil1_imon=9.22244E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32686E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.84016E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3506E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.79211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2108E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.99246E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80024E1	-1.04904E-3	-8.80003E1	1.43051E-4	5.29289E-3	9.31263E-2	1.59778E1	-1.98847E1	-2.00287E1	1.49974E1	2.15613E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1575E-2
2.0E0	1.55E2	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80026E1	-1.00136E-3	-8.80002E1	1.66893E-4	5.19753E-3	9.3317E-2	1.57224E1	-1.98428E1	-1.99146E1	1.50028E1	2.15808E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80021E1	-8.82149E-4	-8.80001E1	2.6226E-4	5.19753E-3	9.31025E-2	1.58875E1	-1.98817E1	-1.99813E1	1.49812E1	2.1549E-9	2.53091E-3	2.53091E-3	6.3074E-3	2.15858E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80023E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.31673E-3	9.33409E-2	1.57801E1	-1.98615E1	-1.98771E1	1.5031E1	2.15095E-9	2.52131E-3	2.52131E-3	6.33919E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80021E1	-9.29832E-4	-8.8E1	-4.76837E-5	4.98295E-3	9.3317E-2	1.59176E1	-1.98576E1	-2.00871E1	1.49721E1	2.1594E-9	2.51935E-3	2.51935E-3	6.3074E-3	2.17727E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80023E1	-8.34465E-4	-8.79998E1	2.38419E-5	5.10216E-3	9.3317E-2	1.58258E1	-1.98465E1	-1.98649E1	1.50103E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80025E1	-7.15256E-4	-8.80002E1	1.66893E-4	5.07832E-3	9.36031E-2	1.57554E1	-1.9844E1	-1.99588E1	1.50046E1	2.15894E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80024E1	-1.0252E-3	-8.80003E1	2.86102E-4	5.14984E-3	9.32217E-2	1.57354E1	-1.98611E1	-2.008E1	1.50033E1	2.15145E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15938E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80023E1	-1.04904E-3	-8.8E1	-9.53674E-5	5.19753E-3	9.33647E-2	1.58017E1	-1.98434E1	-1.99185E1	1.50118E1	2.15624E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.17176E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80024E1	-1.23978E-3	-8.79999E1	-1.90735E-4	5.14984E-3	9.32455E-2	1.58089E1	-1.98669E1	-2.00615E1	1.50052E1	2.15332E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16125E-2
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80023E1	-9.29832E-4	-8.79995E1	4.29153E-4	4.8399E-3	9.34839E-2	1.58293E1	-1.98495E1	-1.9847E1	1.49944E1	2.15894E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17066E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80023E1	-8.34465E-4	-8.79994E1	7.15256E-5	5.17368E-3	9.32217E-2	1.58174E1	-1.98493E1	-2.00192E1	1.4995E1	2.15519E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16878E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80024E1	-1.04904E-3	-8.79997E1	-3.57628E-4	5.34058E-3	9.31025E-2	1.58179E1	-1.98942E1	-1.99785E1	1.50103E1	2.15716E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.16436E-2
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80024E1	-9.53674E-4	-8.79997E1	7.15256E-5	5.34058E-3	9.32932E-2	1.57861E1	-1.98723E1	-1.98458E1	1.498E1	2.15716E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.15883E-2
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80026E1	-1.28746E-3	-8.79997E1	0.0E0	5.26905E-3	9.34839E-2	1.58167E1	-1.98649E1	-2.00712E1	1.50004E1	2.15519E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.16125E-2
1.9E1	3.36E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80023E1	-1.43051E-3	-8.8E1	1.19209E-4	5.45979E-3	9.32455E-2	1.58612E1	-1.98434E1	-1.98464E1	1.50443E1	2.15409E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.16186E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80024E1	-1.26362E-3	-8.80001E1	0.0E0	5.45979E-3	9.32932E-2	1.57702E1	-1.98234E1	-1.99036E1	1.49976E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80025E1	-1.09673E-3	-8.79999E1	1.90735E-4	5.50747E-3	9.34601E-2	1.57825E1	-1.98531E1	-2.00898E1	1.50034E1	2.15624E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80025E1	-1.09673E-3	-8.79999E1	1.66893E-4	5.03063E-3	9.3317E-2	1.58618E1	-1.98699E1	-1.99762E1	1.49902E1	2.15894E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.17066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80024E1	-9.05991E-4	-8.80001E1	3.33786E-4	4.91142E-3	9.33409E-2	1.5768E1	-1.98416E1	-1.99276E1	1.50178E1	2.158E-9	2.52647E-3	2.52647E-3	6.3514E-3	2.15938E-2