[Scan]
initial_time=2016-01-28T15:45:05
final_time=2016-01-28T15:45:24
ip_count=19
run=1026
dataset=1
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.73981E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.72121E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=1.25217E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.45967E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.43868E-8
mult1=-8.96002E-9
mult2=-2.69752E-9
rf_tmon=-6.03365E-3
rf_agc=3.18041E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.04618E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.51353E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19675E1
lens5a_imon=1.96209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54177E1
cs_ef1b_imon=3.10882E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=1.24571E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08587E0
lens1_imon=1.49736E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64803E1
os_ef1alow_imon=2.96014E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03878E1
cs_ea2_imon=1.37614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.99789E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.01195E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11337E1
os_restr1_imon=4.32361E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15994E1
os_ea1_imon=2.41294E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63441E1
os_ef1bup_imon=3.06796E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.64614E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01854E1
cs_anode1_imon=2.03845E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.42274E-9
tplens_vset=0.0E0
tplens_vmon=-1.64403E0
tplens_imon=-3.59765E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99726E1
iondef3_imon=8.62609E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98698E1
iondef2_imon=9.26849E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=7.36845E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=9.35025E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33691E1
lens5b_imon=2.17584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7456E1
cs_ef2b_imon=3.13062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23652E0
os_ea2_imon=-5.23286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00592E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71446E1
cs_ef2a_imon=3.17538E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11294E0
os_ef2alow_imon=-2.59168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48554E-1
os_ef2bup_imon=-5.37466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1089E1
os_restr2_imon=3.35404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29227E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.09294E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57873E1
iondef1_imon=5.1649E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49854E1
iondef4_imon=5.25516E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.6667E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.21755E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-1.26052E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47211E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56269E1
einzel_imon=7.60999E-6
window_vset=0.0E0
window_vmon=1.75705E-1
window_imon=-9.49137E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-5.75478E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.58267E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.41466E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.05707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38075E0
defgridb_imon=6.18106E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.39527E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07271E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60069E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30439E1
cs_fil1_imon=9.22673E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36268E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61711E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42813E-2
os_fil2_imon=-2.54848E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46759E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34826E-1
cs_fil2_imon=-2.60038E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80525E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21155E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.84784E-1
res40_imon=-2.56833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.23E2	0.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80025E1	-8.82149E-4	-8.79998E1	3.57628E-4	5.36442E-3	9.33647E-2	1.58209E1	-1.98659E1	-1.99113E1	1.49923E1	2.15459E-9	2.52266E-3	2.52266E-3	6.32518E-3	2.15773E-2
2.0E0	1.56E2	1.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80023E1	-1.0252E-3	-8.8E1	7.15256E-5	5.36442E-3	9.35793E-2	1.57014E1	-1.98392E1	-1.99071E1	1.50088E1	2.15624E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17176E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80022E1	-1.04904E-3	-8.80004E1	7.15256E-5	5.36442E-3	9.32932E-2	1.58339E1	-1.98594E1	-2.00735E1	1.4986E1	2.158E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.1858E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80023E1	-1.00136E-3	-8.80001E1	2.14577E-4	5.55515E-3	9.34362E-2	1.57312E1	-1.98647E1	-1.98423E1	1.49981E1	2.15624E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.08504E-2	-8.8002E1	-1.12057E-3	-8.80003E1	4.05312E-4	5.65052E-3	9.34124E-2	1.58828E1	-1.98723E1	-2.00345E1	1.49932E1	2.15533E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80022E1	-1.12057E-3	-8.80005E1	7.15256E-5	5.48363E-3	9.3174E-2	1.59044E1	-1.98495E1	-1.98963E1	1.49944E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80023E1	-1.19209E-3	-8.80005E1	2.38419E-4	5.19753E-3	9.34839E-2	1.57777E1	-1.98495E1	-2.00219E1	1.50118E1	2.15987E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.17822E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80023E1	-1.26362E-3	-8.80005E1	4.76837E-4	5.38826E-3	9.30548E-2	1.5802E1	-1.98704E1	-1.98386E1	1.49932E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16878E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.05415E-2	-8.80024E1	-1.0252E-3	-8.80007E1	7.15256E-5	5.22137E-3	9.35078E-2	1.58321E1	-1.98375E1	-2.00534E1	1.49914E1	2.15314E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.17529E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.06958E-2	-8.80023E1	-1.09673E-3	-8.80004E1	-7.15256E-5	4.98295E-3	9.31025E-2	1.57921E1	-1.98723E1	-1.99155E1	1.50274E1	2.15441E-9	2.52276E-3	2.52276E-3	6.35601E-3	2.16806E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80024E1	-9.53674E-4	-8.80008E1	-7.15256E-5	5.43594E-3	9.29832E-2	1.5828E1	-1.98906E1	-1.9985E1	1.49752E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17066E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.09279E-2	-8.80023E1	-7.62939E-4	-8.8001E1	9.53674E-5	5.17368E-3	9.3317E-2	1.58431E1	-1.98705E1	-1.99648E1	1.50045E1	2.15624E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.15699E-2
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.06187E-2	-8.80026E1	-6.67572E-4	-8.80006E1	2.14577E-4	5.126E-3	9.31501E-2	1.57879E1	-1.98688E1	-1.99242E1	1.4995E1	2.15659E-9	2.51826E-3	2.51826E-3	6.3074E-3	2.16784E-2
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80023E1	-9.29832E-4	-8.80004E1	3.8147E-4	5.31673E-3	9.35078E-2	1.58089E1	-1.98657E1	-2.00459E1	1.50088E1					
1.8E1	1.42E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80026E1	-1.12057E-3	-8.80007E1	1.90735E-4	5.19753E-3	9.32693E-2	1.57464E1	-1.98218E1	-1.99786E1	1.50028E1	2.15533E-9	2.52707E-3	2.52707E-3	6.33436E-3	2.16806E-2
1.9E1	3.08E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80026E1	-8.10623E-4	-8.80003E1	3.09944E-4	4.98295E-3	9.33409E-2	1.57926E1	-1.99242E1	-1.99178E1	1.4995E1	2.15519E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16313E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80027E1	-1.64509E-3	-8.80003E1	1.43051E-4	5.29289E-3	9.31025E-2	1.58534E1	-1.98501E1	-1.99336E1	1.50028E1	2.15624E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16436E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80026E1	-1.57356E-3	-8.80004E1	1.90735E-4	5.10216E-3	9.31978E-2	1.57513E1	-1.98381E1	-1.99738E1	1.49992E1	2.15613E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.16501E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80027E1	-1.38283E-3	-8.80001E1	-1.19209E-4	5.50747E-3	9.34601E-2	1.57643E1	-1.98546E1	-1.99219E1	1.50118E1	2.15441E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80028E1	-1.26362E-3	-8.80003E1	-1.19209E-4	5.19753E-3	9.34362E-2	1.57873E1	-1.98698E1	-1.99726E1	1.49854E1	2.15808E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.16806E-2