[Scan]
initial_time=2016-01-28T15:45:31
final_time=2016-01-28T15:45:51
ip_count=19
run=1026
dataset=1
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44059E-2
qbias_imon=-3.75075E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.4059E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.24747E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.47599E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.43487E-8
mult1=-9.36932E-9
mult2=-2.77617E-9
rf_tmon=-5.09938E-3
rf_agc=3.33268E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=6.29902E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65042E0
bslens_imon=2.41367E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54698E1
cs_ef1b_imon=3.12779E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01923E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=1.26252E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08095E0
lens1_imon=1.38227E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.929E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04134E1
cs_ea2_imon=1.41825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83688E1
cs_ef1a_imon=2.9992E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.01492E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11488E1
os_restr1_imon=4.3542E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1522E1
os_ea1_imon=2.45921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23559E0
cs_ionrep_imon=9.42511E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01369E1
cs_anode1_imon=2.02161E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.41489E-9
tplens_vset=0.0E0
tplens_vmon=-1.59191E0
tplens_imon=-3.04848E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.009E1
iondef3_imon=8.60887E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98676E1
iondef2_imon=9.38754E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98421E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.16214E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27942E0
ionrepsh_imon=9.42169E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33657E1
lens5b_imon=2.17745E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.14342E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23901E0
os_ea2_imon=-7.07844E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00503E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.16532E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05398E0
os_ef2alow_imon=-3.04374E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36038E-1
os_ef2bup_imon=-5.65366E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.37557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.08556E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57943E1
iondef1_imon=5.03655E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49608E1
iondef4_imon=5.60616E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.6792E-8
olens1_vset=0.0E0
olens1_vmon=1.5974E-3
olens1_imon=1.21815E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.30959E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47612E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56961E1
einzel_imon=7.50713E-6
window_vset=0.0E0
window_vmon=1.62661E-1
window_imon=-1.4208E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82565E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86471E1
mask2_imon=-3.53896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.17448E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.32751E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.26669E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28205E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07682E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60123E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30485E1
cs_fil1_imon=9.22907E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29436E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61796E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58893E-2
os_fil2_imon=-3.0225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.64013E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.12473E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2126E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31879E-3
inlet_lpb_pmon=2.16639E-2
chamber_ion_pmon=2.1549E-9
chamber_cvt_pmon=2.52407E-3
foreline_cvt_pmon=2.52407E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.48607E-1
res40_imon=-2.89778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.52E2	0.0E0	1.47E2	4.1E1	-7.09279E-2	-8.80026E1	-1.35899E-3	-8.80003E1	5.24521E-4	5.05447E-3	9.31978E-2	1.57584E1	-1.98609E1	-1.99943E1	1.5019E1	2.15381E-9	2.52197E-3	2.52197E-3	6.33863E-3	2.16135E-2
2.0E0	1.61E2	0.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80028E1	-9.53674E-4	-8.80002E1	3.09944E-4	4.91142E-3	9.34601E-2	1.58239E1	-1.98633E1	-1.99888E1	1.50053E1	2.15808E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.19036E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80028E1	-1.14441E-3	-8.80004E1	4.76837E-5	5.36442E-3	9.32693E-2	1.5782E1	-1.98664E1	-1.99626E1	1.4986E1	2.15791E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-1.14441E-3	-8.80003E1	1.90735E-4	4.8399E-3	9.32217E-2	1.584E1	-1.98736E1	-1.99263E1	1.50126E1	2.15455E-9	2.51393E-3	2.51393E-3	6.31269E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80027E1	-1.14441E-3	-8.80003E1	-7.15256E-5	5.126E-3	9.30071E-2	1.58323E1	-1.98711E1	-2.00429E1	1.5007E1	2.15808E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.15699E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80026E1	-1.45435E-3	-8.80004E1	-4.76837E-5	4.72069E-3	9.30071E-2	1.57777E1	-1.98452E1	-1.99167E1	1.50022E1	2.15987E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80026E1	-1.0252E-3	-8.80003E1	-9.53674E-5	4.86374E-3	9.30548E-2	1.57765E1	-1.98723E1	-2.00405E1	1.49866E1	2.16081E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80026E1	-9.29832E-4	-8.80003E1	-9.53674E-5	4.79221E-3	9.32932E-2	1.58038E1	-1.98393E1	-1.98151E1	1.50178E1	2.15257E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16621E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80028E1	-1.00136E-3	-8.80003E1	1.66893E-4	4.95911E-3	9.32932E-2	1.57783E1	-1.98362E1	-1.99768E1	1.50202E1	2.158E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.16125E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80026E1	-1.0252E-3	-8.80001E1	-4.76837E-5	5.62668E-3	9.35078E-2	1.57801E1	-1.98591E1	-2.00579E1	1.49914E1	2.158E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.1575E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80025E1	-8.10623E-4	-8.80004E1	2.38419E-5	5.29289E-3	9.34362E-2	1.57158E1	-1.97936E1	-1.98495E1	1.50412E1	2.15332E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.17066E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80023E1	-1.21593E-3	-8.8E1	-2.38419E-5	5.45979E-3	9.36985E-2	1.58307E1	-1.98637E1	-1.99181E1	1.50166E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17633E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80024E1	-1.12057E-3	-8.80003E1	1.90735E-4	5.45979E-3	9.35316E-2	1.58557E1	-1.98682E1	-2.00605E1	1.50286E1	2.156E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.17915E-2
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80024E1	-8.82149E-4	-8.79999E1	4.76837E-5	5.14984E-3	9.34124E-2	1.5768E1	-1.98549E1	-1.99636E1	1.4992E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17732E-2
1.8E1	1.79E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80023E1	-8.10623E-4	-8.80003E1	2.14577E-4	5.14984E-3	9.37223E-2	1.57867E1	-1.98526E1	-1.99402E1	1.50767E1	2.15894E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.17255E-2
1.9E1	3.22E2	1.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80025E1	-7.15256E-4	-8.80003E1	-2.38419E-5	5.24521E-3	9.3627E-2	1.58209E1	-1.98591E1	-1.99324E1	1.49794E1	2.15696E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.15803E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80026E1	-9.53674E-4	-8.80003E1	2.86102E-4	5.126E-3	9.33647E-2	1.57672E1	-1.98841E1	-2.00228E1	1.49992E1	2.158E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.16125E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80025E1	-9.77516E-4	-8.80003E1	4.05312E-4	5.17368E-3	9.37939E-2	1.5784E1	-1.98511E1	-1.98478E1	1.50103E1	2.15808E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.16252E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80026E1	-9.77516E-4	-8.80005E1	3.09944E-4	5.48363E-3	9.32693E-2	1.57955E1	-1.98721E1	-1.99879E1	1.49816E1	2.15832E-9	2.52262E-3	2.52262E-3	6.33297E-3	2.15731E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.44059E-2	-8.80025E1	-9.53674E-4	-8.80004E1	3.33786E-4	5.17368E-3	9.3174E-2	1.57943E1	-1.98676E1	-2.009E1	1.49608E1	2.1549E-9	2.52407E-3	2.52407E-3	6.31879E-3	2.16639E-2