[Scan]
initial_time=2016-01-28T15:45:58
final_time=2016-01-28T15:46:17
ip_count=19
run=1026
dataset=1
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.84482E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.73301E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.24923E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.42347E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.43925E-8
mult1=-6.76855E-9
mult2=-2.41361E-9
rf_tmon=-9.08121E-3
rf_agc=2.83067E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.13916E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52511E1
cs_ef1b_imon=3.12109E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.24658E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05758E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65551E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04171E1
cs_ea2_imon=1.3933E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=2.98703E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.01312E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.44523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=9.76208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93153E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.03233E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.38815E-9
tplens_vset=0.0E0
tplens_vmon=-1.62521E0
tplens_imon=-3.39E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99136E1
iondef3_imon=8.64815E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98635E1
iondef2_imon=9.38356E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=7.38001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=9.37274E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23227E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13745E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.33048E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02169E1
cs_anode2_imon=2.08387E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58716E1
iondef1_imon=5.13332E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49872E1
iondef4_imon=5.28039E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.66793E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.21764E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.42299E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02034E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.22653E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-3.02383E-9
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.64958E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33239E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.41051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30511E1
cs_fil1_imon=9.22388E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30343E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61503E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.92425E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19593E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.20877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.16918E-2
chamber_ion_pmon=2.15455E-9
chamber_cvt_pmon=2.52448E-3
foreline_cvt_pmon=2.52448E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20559E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.47E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80026E1	-8.58307E-4	-8.80003E1	2.14577E-4	4.76837E-3	9.34362E-2	1.57716E1	-1.98573E1	-1.99002E1	1.49987E1	2.158E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17255E-2
2.0E0	1.67E2	0.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80028E1	-6.67572E-4	-8.80006E1	7.15256E-5	4.88758E-3	9.35793E-2	1.57885E1	-1.98728E1	-1.99249E1	1.50629E1	2.15817E-9	2.52342E-3	2.52342E-3	6.31798E-3	2.1565E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80029E1	-1.0252E-3	-8.80002E1	1.19209E-4	4.8399E-3	9.3174E-2	1.57999E1	-1.98579E1	-2.00015E1	1.49794E1	2.156E-9	2.5147E-3	2.5147E-3	6.33538E-3	2.16186E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80029E1	-9.29832E-4	-8.80003E1	3.09944E-4	4.93526E-3	9.34601E-2	1.58533E1	-1.9844E1	-2.00469E1	1.50004E1	2.15441E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.16252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80026E1	-1.04904E-3	-8.80004E1	2.86102E-4	4.60148E-3	9.35555E-2	1.57554E1	-1.98374E1	-1.98849E1	1.501E1	2.15219E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.16569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80026E1	-9.05991E-4	-8.80003E1	4.52995E-4	4.62532E-3	9.33647E-2	1.58143E1	-1.98609E1	-1.98837E1	1.50226E1	2.15165E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16436E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80028E1	-1.00136E-3	-8.80003E1	1.66893E-4	5.10216E-3	9.3627E-2	1.57837E1	-1.98706E1	-2.00652E1	1.50045E1	2.16081E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80027E1	-1.12057E-3	-8.80004E1	2.38419E-5	4.673E-3	9.34124E-2	1.58008E1	-1.98871E1	-1.99644E1	1.4998E1	2.15533E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.15883E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80028E1	-1.23978E-3	-8.79999E1	2.14577E-4	4.57764E-3	9.3317E-2	1.58011E1	-1.98573E1	-1.9921E1	1.501E1	2.15533E-9	2.53354E-3	2.53354E-3	6.31278E-3	2.16806E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80027E1	-1.0252E-3	-8.80003E1	9.53674E-5	5.05447E-3	9.34362E-2	1.57767E1	-1.9883E1	-1.99585E1	1.50097E1	2.15332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16689E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80026E1	-1.23978E-3	-8.8E1	4.05312E-4	4.88758E-3	9.3317E-2	1.57879E1	-1.98906E1	-2.0002E1	1.50247E1	2.15624E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.17547E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80027E1	-1.09673E-3	-8.80002E1	3.8147E-4	4.673E-3	9.35078E-2	1.58149E1	-1.98663E1	-1.99654E1	1.50226E1	2.156E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.17337E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80027E1	-1.23978E-3	-8.80001E1	3.09944E-4	4.64916E-3	9.36031E-2	1.57921E1	-1.98969E1	-1.99762E1	1.5019E1	2.16081E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16125E-2
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80026E1	-1.43051E-3	-8.79998E1	2.38419E-5	5.26905E-3	9.32217E-2	1.58413E1	-1.98765E1	-1.99949E1	1.50076E1	2.15706E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.16689E-2
1.8E1	1.91E2	0.0E0	7.27E2	5.0E2	-7.44831E-2	-8.80028E1	-1.23978E-3	-8.79997E1	3.09944E-4	4.8399E-3	9.33647E-2	1.58017E1	-1.98182E1	-1.99366E1	1.50265E1	2.15519E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.15002E-2
1.9E1	3.29E2	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80026E1	-1.16825E-3	-8.79997E1	4.05312E-4	5.126E-3	9.30786E-2	1.57428E1	-1.98747E1	-1.99083E1	1.49954E1	2.15716E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.16067E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80026E1	-1.40667E-3	-8.80002E1	2.6226E-4	4.93526E-3	9.27448E-2	1.58356E1	-1.98647E1	-2.00823E1	1.49657E1	2.156E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.17529E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80026E1	-1.0252E-3	-8.80002E1	-4.76837E-5	4.86374E-3	9.31025E-2	1.57628E1	-1.98539E1	-1.99132E1	1.50136E1	2.159E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.17361E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80025E1	-1.23978E-3	-8.80004E1	4.05312E-4	4.86374E-3	9.31501E-2	1.58126E1	-1.9857E1	-1.99691E1	1.50244E1	2.15791E-9	2.52585E-3	2.52585E-3	6.28511E-3	2.17915E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80026E1	-1.19209E-3	-8.80001E1	7.15256E-5	5.07832E-3	9.32693E-2	1.58716E1	-1.98635E1	-1.99136E1	1.49872E1	2.15455E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.16918E-2