[Scan]
initial_time=2016-01-28T15:46:24
final_time=2016-01-28T15:46:44
ip_count=19
run=1026
dataset=1
scan=10
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.87771E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.63407E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.22408E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.39222E-9
ql4_vset=
ql4_vmon=-3.57628E-4
ql4_imon=1.4396E-8
mult1=-1.00053E-8
mult2=-2.85435E-9
rf_tmon=-4.88494E-3
rf_agc=3.2883E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.95868E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1943E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04772E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.01991E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=1.25163E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.39859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.00396E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.01271E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.59625E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.03954E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.36871E-9
tplens_vset=0.0E0
tplens_vmon=-1.62281E0
tplens_imon=-2.52482E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99522E1
iondef3_imon=8.71304E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98723E1
iondef2_imon=9.39437E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=7.91311E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=9.27541E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23227E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00313E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11643E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.35895E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.09648E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57584E1
iondef1_imon=5.10448E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50072E1
iondef4_imon=5.15425E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.67195E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.21918E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16318E0
cs_ionaccel_imon=-1.14909E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47096E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=1.58478E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.39145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=5.87233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.39026E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60405E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30471E1
cs_fil1_imon=9.23055E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29502E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6176E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.17176E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.26856E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.51E2	2.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80026E1	-1.43051E-3	-8.80004E1	-1.19209E-4	5.43594E-3	9.33409E-2	1.58101E1	-1.98741E1	-1.9954E1	1.50118E1	2.15613E-9	2.52428E-3	2.52428E-3	6.28006E-3	2.16878E-2
2.0E0	1.48E2	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80027E1	-1.19209E-3	-8.80002E1	4.76837E-5	5.00679E-3	9.34839E-2	1.58332E1	-1.98422E1	-1.99298E1	1.49972E1	2.15519E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16878E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80024E1	-1.19209E-3	-8.80002E1	-4.76837E-5	5.07832E-3	9.3317E-2	1.57578E1	-1.987E1	-1.99614E1	1.49906E1	2.15982E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80028E1	-6.91414E-4	-8.8E1	-7.15256E-5	5.36442E-3	9.33409E-2	1.57873E1	-1.98633E1	-2.00327E1	1.5001E1	2.15533E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80025E1	-1.09673E-3	-8.80003E1	-3.33786E-4	5.31673E-3	9.32693E-2	1.58073E1	-1.98759E1	-1.99313E1	1.50115E1	2.15992E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80026E1	-9.77516E-4	-8.80003E1	7.15256E-5	5.05447E-3	9.3317E-2	1.58085E1	-1.98747E1	-1.98706E1	1.50088E1	2.159E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80026E1	-1.00136E-3	-8.80002E1	-9.53674E-5	4.95911E-3	9.33409E-2	1.57928E1	-1.98618E1	-1.99738E1	1.49997E1	2.15332E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80024E1	-8.82149E-4	-8.80003E1	-1.43051E-4	4.86374E-3	9.32455E-2	1.58245E1	-1.98164E1	-1.99858E1	1.49974E1	2.15696E-9	2.51693E-3	2.51693E-3	6.28511E-3	2.15994E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-1.14441E-3	-8.79999E1	-1.66893E-4	5.29289E-3	9.30786E-2	1.58256E1	-1.98794E1	-1.99838E1	1.50033E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80024E1	-9.29832E-4	-8.80005E1	-4.76837E-5	5.26905E-3	9.32693E-2	1.57687E1	-1.98736E1	-1.99802E1	1.50086E1	2.15257E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16991E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80025E1	-8.82149E-4	-8.80002E1	-3.33786E-4	4.76837E-3	9.30548E-2	1.58528E1	-1.98853E1	-1.99589E1	1.50116E1	2.15659E-9	2.51935E-3	2.51935E-3	6.3074E-3	2.16032E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80023E1	-8.58307E-4	-8.80001E1	-1.43051E-4	5.10216E-3	9.35078E-2	1.58401E1	-1.98609E1	-1.99234E1	1.50713E1					
1.6E1	1.9E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80023E1	-9.53674E-4	-8.8E1	-9.53674E-5	4.98295E-3	9.30548E-2	1.58077E1	-1.98392E1	-1.99943E1	1.50154E1	2.15519E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.16125E-2
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80023E1	-8.58307E-4	-8.8E1	-9.53674E-5	5.31673E-3	9.3174E-2	1.57638E1	-1.98591E1	-1.99678E1	1.50034E1	2.15894E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.16313E-2
1.8E1	1.75E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80024E1	-5.96046E-4	-8.80002E1	-7.15256E-5	5.05447E-3	9.3174E-2	1.58287E1	-1.98446E1	-1.99486E1	1.501E1	2.15753E-9	2.52538E-3	2.52538E-3	6.31563E-3	2.17066E-2
1.9E1	3.53E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	-9.29832E-4	-8.80003E1	-4.29153E-4	5.38826E-3	9.31978E-2	1.58101E1	-1.98897E1	-1.99678E1	1.49896E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80023E1	-8.82149E-4	-8.80003E1	-2.38419E-4	5.19753E-3	9.32693E-2	1.57795E1	-1.98813E1	-1.99396E1	1.50376E1	2.15624E-9	2.52276E-3	2.52276E-3	6.26985E-3	2.16252E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80024E1	-1.45435E-3	-8.80002E1	-2.38419E-4	5.07832E-3	9.32693E-2	1.58185E1	-1.98263E1	-1.99844E1	1.50064E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.15938E-2
2.2E1	0.0E0	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80022E1	-1.35899E-3	-8.80003E1	-1.43051E-4	5.03063E-3	9.29594E-2	1.58191E1	-1.98507E1	-1.99654E1	1.49738E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80025E1	-1.12057E-3	-8.80005E1	-3.57628E-4	4.86374E-3	9.29832E-2	1.57584E1	-1.98723E1	-1.99522E1	1.50072E1	2.15716E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.17176E-2