[Scan]
initial_time=2016-01-28T15:46:51
final_time=2016-01-28T15:47:11
ip_count=19
run=1026
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.86111E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.70869E-10
ql2_vset=
ql2_vmon=-1.14441E-3
ql2_imon=1.23119E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.44272E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=1.43411E-8
mult1=-9.21564E-9
mult2=-2.57627E-9
rf_tmon=-5.90754E-3
rf_agc=3.27133E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.84567E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69394E0
bslens_imon=2.27072E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04672E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=3.1056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.01958E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05407E1
cs_ea1_imon=1.24041E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0277E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04522E1
cs_ea2_imon=1.39897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.99964E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.018E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.41974E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=9.67517E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.03846E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.43819E-9
tplens_vset=0.0E0
tplens_vmon=-1.62197E0
tplens_imon=-2.67032E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98818E1
iondef3_imon=8.68767E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98523E1
iondef2_imon=9.25752E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.06177E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26331E0
ionrepsh_imon=9.28583E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.20029E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21257E0
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00931E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.27132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.10838E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58486E1
iondef1_imon=5.17304E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50232E1
iondef4_imon=5.16506E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.67393E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.22352E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.86653E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18409E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.38816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07149E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30476E1
cs_fil1_imon=9.21871E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25778E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62085E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.93391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2129E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7551E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.12E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80025E1	-1.23978E-3	-8.80005E1	-2.38419E-5	5.53131E-3	9.33409E-2	1.57903E1	-1.98603E1	-1.99366E1	1.49872E1	2.16081E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.16501E-2
2.0E0	1.56E2	0.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80024E1	-1.04904E-3	-8.8E1	-2.6226E-4	4.95911E-3	9.35078E-2	1.57638E1	-1.98338E1	-1.99366E1	1.50214E1	2.15716E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.16621E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80026E1	-1.35899E-3	-8.80002E1	-1.90735E-4	5.17368E-3	9.32932E-2	1.58726E1	-1.98392E1	-1.99918E1	1.49944E1	2.15982E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80026E1	-1.52588E-3	-8.80003E1	1.19209E-4	5.45979E-3	9.33647E-2	1.57921E1	-1.9841E1	-2.00796E1	1.50051E1	2.15992E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.15331E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80023E1	-1.38283E-3	-8.80002E1	7.15256E-5	5.50747E-3	9.32455E-2	1.58032E1	-1.98653E1	-1.99372E1	1.50148E1	2.15706E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80024E1	-1.28746E-3	-8.8E1	9.53674E-5	5.34058E-3	9.32455E-2	1.58239E1	-1.98633E1	-2.00664E1	1.5001E1	2.15894E-9	2.52977E-3	2.52977E-3	6.31837E-3	2.1575E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8003E1	-1.09673E-3	-8.80001E1	5.96046E-4	5.07832E-3	9.29832E-2	1.57554E1	-1.98717E1	-1.99089E1	1.49986E1	2.15808E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.15515E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80029E1	-1.16825E-3	-8.79998E1	9.53674E-5	5.50747E-3	9.30071E-2	1.57784E1	-1.98275E1	-1.98782E1	1.50097E1	2.16081E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16125E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80028E1	-1.14441E-3	-8.79999E1	1.66893E-4	5.34058E-3	9.32455E-2	1.57885E1	-1.98855E1	-2.00021E1	1.50076E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.17176E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80025E1	-1.19209E-3	-8.80002E1	-2.14577E-4	5.34058E-3	9.34124E-2	1.57401E1	-1.98423E1	-1.99012E1	1.50034E1	2.16085E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.17918E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80025E1	-9.53674E-4	-8.8E1	2.38419E-5	5.126E-3	9.31978E-2	1.58284E1	-1.98469E1	-2.00485E1	1.50107E1	2.15894E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.18201E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.8002E1	-9.53674E-4	-8.80001E1	2.38419E-4	5.03063E-3	9.3174E-2	1.57743E1	-1.98776E1	-1.9847E1	1.50152E1	2.15817E-9	2.52236E-3	2.52236E-3	6.33919E-3	2.18194E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80022E1	-8.82149E-4	-8.80004E1	2.38419E-4	4.88758E-3	9.33647E-2	1.58522E1	-1.98399E1	-1.99355E1	1.50161E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16436E-2
1.7E1	3.3E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80024E1	-9.29832E-4	-8.80001E1	1.43051E-4	5.43594E-3	9.31025E-2	1.57601E1	-1.98717E1	-2.00829E1	1.50028E1	2.15736E-9	2.51886E-3	2.51886E-3	6.3126E-3	2.16491E-2
1.8E1	1.94E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80024E1	-1.0252E-3	-8.80005E1	-4.29153E-4	5.29289E-3	9.30786E-2	1.57525E1	-1.9844E1	-1.98175E1	1.49877E1	2.15519E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17066E-2
1.9E1	3.73E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80023E1	-1.21593E-3	-8.8E1	-1.43051E-4	5.48363E-3	9.34601E-2	1.58133E1	-1.98649E1	-1.99964E1	1.49923E1	2.15716E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17176E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80023E1	-1.19209E-3	-8.80002E1	-3.09944E-4	5.29289E-3	9.32932E-2	1.57704E1	-1.98428E1	-1.99366E1	1.50142E1	2.15907E-9	2.52025E-3	2.52025E-3	6.29684E-3	2.16374E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80023E1	-1.04904E-3	-8.80002E1	-3.09944E-4	4.86374E-3	9.35316E-2	1.58115E1	-1.98641E1	-1.99018E1	1.49998E1	2.15808E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.17361E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80025E1	-8.82149E-4	-8.80003E1	-1.90735E-4	5.10216E-3	9.34839E-2	1.57784E1	-1.98322E1	-2.00782E1	1.50242E1	2.158E-9	2.52209E-3	2.52209E-3	6.28006E-3	2.16689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80026E1	-1.14441E-3	-8.80002E1	-2.14577E-4	5.29289E-3	9.34601E-2	1.58486E1	-1.98523E1	-1.98818E1	1.50232E1	2.159E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.16806E-2