[Scan]
initial_time=2016-01-28T15:47:18
final_time=2016-01-28T15:47:37
ip_count=19
run=1026
dataset=1
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.86657E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.57041E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.26349E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.44514E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.43837E-8
mult1=-9.4755E-9
mult2=-2.68667E-9
rf_tmon=-4.50041E-3
rf_agc=3.2937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.31404E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.21055E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18969E1
lens5a_imon=1.94829E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.09911E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04192E1
cs_ea1_imon=1.22129E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05838E0
lens1_imon=1.90616E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04811E1
cs_ea2_imon=1.42481E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.00072E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.01339E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.31292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.3847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17482E0
cs_ionrep_imon=9.71056E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.04999E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.42334E-9
tplens_vset=0.0E0
tplens_vmon=-1.63553E0
tplens_imon=-3.87372E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.0073E1
iondef3_imon=8.61334E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98777E1
iondef2_imon=9.87337E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.31294E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20786E0
ionrepsh_imon=9.06639E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33268E1
lens5b_imon=2.22047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29103E0
os_ea2_imon=-4.72318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06043E2
lens4b_imon=2.00064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10081E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.36148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.32229E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.09432E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57548E1
iondef1_imon=5.33231E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50022E1
iondef4_imon=5.1975E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68398E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.21795E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-1.12746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.89838E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.10744E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=6.8578E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.51801E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.43712E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60322E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30489E1
cs_fil1_imon=9.23127E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29923E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62063E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16677E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85721E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.36E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80025E1	-1.45435E-3	-8.8E1	1.19209E-4	5.05447E-3	9.33886E-2	1.57802E1	-1.98812E1	-1.99596E1	1.49952E1	2.15907E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.16555E-2
2.0E0	1.66E2	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80025E1	-1.09673E-3	-8.79999E1	-1.43051E-4	5.34058E-3	9.35078E-2	1.57951E1	-1.98519E1	-1.99973E1	1.50046E1	2.15808E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.16067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80024E1	-1.09673E-3	-8.80001E1	9.53674E-5	5.00679E-3	9.37462E-2	1.58225E1	-1.98428E1	-1.99458E1	1.50257E1	2.15696E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80023E1	-1.19209E-3	-8.80005E1	1.43051E-4	4.74453E-3	9.34839E-2	1.57686E1	-1.98633E1	-1.99113E1	1.49974E1	2.15745E-9	2.52364E-3	2.52364E-3	6.29721E-3	2.17835E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80026E1	-1.07288E-3	-8.80005E1	2.14577E-4	5.14984E-3	9.33886E-2	1.57649E1	-1.98623E1	-2.00293E1	1.49752E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80024E1	-1.14441E-3	-8.80008E1	9.53674E-5	4.98295E-3	9.3174E-2	1.57867E1	-1.98483E1	-1.9969E1	1.50022E1	2.16081E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80024E1	-1.09673E-3	-8.80004E1	7.15256E-5	4.88758E-3	9.31978E-2	1.58299E1	-1.98579E1	-1.98807E1	1.50052E1	2.158E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80025E1	-1.21593E-3	-8.80002E1	2.14577E-4	4.98295E-3	9.32455E-2	1.57242E1	-1.98609E1	-1.99492E1	1.50094E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16501E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80025E1	-9.05991E-4	-8.80002E1	-1.19209E-4	4.98295E-3	9.29356E-2	1.58078E1	-1.98611E1	-1.99721E1	1.50117E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.15938E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80025E1	-1.12057E-3	-8.80005E1	3.33786E-4	5.05447E-3	9.34362E-2	1.57945E1	-1.98464E1	-2.00225E1	1.5004E1	2.15736E-9	2.5199E-3	2.5199E-3	6.3282E-3	2.15425E-2
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80026E1	-1.35899E-3	-8.80004E1	0.0E0	5.05447E-3	9.33886E-2	1.58257E1	-1.98639E1	-1.98555E1	1.50022E1	2.15716E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.15883E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80027E1	-1.64509E-3	-8.80002E1	-3.09944E-4	5.10216E-3	9.30786E-2	1.5756E1	-1.98446E1	-2.0034E1	1.50064E1	2.15706E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.17633E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80024E1	-1.26362E-3	-8.80004E1	-2.14577E-4	5.19753E-3	9.34124E-2	1.57567E1	-1.98759E1	-1.99634E1	1.5007E1	2.15894E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.18011E-2
1.7E1	4.2E1	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80024E1	-1.12057E-3	-8.80003E1	-2.14577E-4	4.95911E-3	9.3627E-2	1.58038E1	-1.98782E1	-1.99437E1	1.49866E1	2.15613E-9	2.52977E-3	2.52977E-3	6.32936E-3	2.16313E-2
1.8E1	2.06E2	2.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80023E1	-9.77516E-4	-8.80005E1	-2.38419E-5	5.29289E-3	9.36031E-2	1.5768E1	-1.98398E1	-2.00778E1	1.50352E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16125E-2
1.9E1	3.9E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80025E1	-1.21593E-3	-8.80004E1	7.15256E-5	4.91142E-3	9.32693E-2	1.57979E1	-1.98794E1	-1.9988E1	1.50207E1	2.15706E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.16501E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.8003E1	-1.00136E-3	-8.80002E1	-1.19209E-4	5.126E-3	9.33409E-2	1.58173E1	-1.98513E1	-1.99498E1	1.50124E1	2.15441E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.16621E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80026E1	-9.05991E-4	-8.80001E1	7.15256E-5	5.07832E-3	9.37462E-2	1.58041E1	-1.98813E1	-1.99444E1	1.50028E1	2.15441E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.17547E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80026E1	-6.4373E-4	-8.80004E1	1.19209E-4	5.53131E-3	9.38416E-2	1.58085E1	-1.98558E1	-1.98776E1	1.49968E1	2.15706E-9	2.52373E-3	2.52373E-3	6.31837E-3	2.17349E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80025E1	-8.82149E-4	-8.80007E1	2.38419E-5	5.126E-3	9.35078E-2	1.57548E1	-1.98777E1	-2.0073E1	1.50022E1