[Scan]
initial_time=2016-01-28T15:47:44
final_time=2016-01-28T15:48:04
ip_count=19
run=1026
dataset=1
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.81518E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.04165E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.20069E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.43483E-9
ql4_vset=
ql4_vmon=-5.24521E-4
ql4_imon=1.43966E-8
mult1=-9.65008E-9
mult2=-2.65459E-9
rf_tmon=-4.67465E-3
rf_agc=3.34883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.94509E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53112E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=1.26695E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10498E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.95747E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.41844E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.00865E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.01676E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.42363E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26685E0
cs_ionrep_imon=9.52651E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.04243E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=4.44708E-9
tplens_vset=0.0E0
tplens_vmon=-1.65972E0
tplens_imon=-4.05069E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98104E1
iondef3_imon=8.81155E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98695E1
iondef2_imon=9.30707E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.68285E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26331E0
ionrepsh_imon=9.27167E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21788E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.34958E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.08964E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58435E1
iondef1_imon=4.88635E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50016E1
iondef4_imon=5.13984E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.66533E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.21837E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.21396E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55967E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.38517E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=5.8703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33144E1
os_fil1_imon=9.37819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07017E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.21992E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31785E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12754E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21434E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81226E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80027E1	-1.35899E-3	-8.80004E1	-2.38419E-5	5.26905E-3	9.34839E-2	1.57548E1	-1.9826E1	-2.00519E1	1.50016E1	2.15546E-9	2.52659E-3	2.52659E-3	6.29157E-3	2.16918E-2
2.0E0	1.85E2	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80027E1	-1.12057E-3	-8.80002E1	2.38419E-5	5.07832E-3	9.3627E-2	1.57771E1	-1.98609E1	-1.98284E1	1.49926E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.16878E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80028E1	-8.10623E-4	-8.80002E1	-2.14577E-4	4.74453E-3	9.32455E-2	1.58286E1	-1.98546E1	-2.00936E1	1.50091E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16878E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80027E1	-9.77516E-4	-8.80001E1	-2.86102E-4	4.86374E-3	9.32932E-2	1.58017E1	-1.98591E1	-1.98663E1	1.50202E1	2.15349E-9	2.53031E-3	2.53031E-3	6.33436E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80028E1	-9.29832E-4	-8.8E1	-1.66893E-4	4.55379E-3	9.32455E-2	1.57743E1	-1.98682E1	-1.99508E1	1.501E1	2.16081E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16878E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80024E1	-1.23978E-3	-8.80002E1	-1.90735E-4	4.76837E-3	9.33647E-2	1.57963E1	-1.98693E1	-2.00766E1	1.4995E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1575E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80025E1	-1.40667E-3	-8.80003E1	-1.19209E-4	4.43459E-3	9.35078E-2	1.58275E1	-1.98519E1	-2.01613E1	1.50226E1	2.15425E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.1575E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80025E1	-9.29832E-4	-8.80002E1	-1.19209E-4	4.72069E-3	9.36031E-2	1.57973E1	-1.98676E1	-2.00481E1	1.50086E1	2.15533E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.16252E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80027E1	-9.77516E-4	-8.79999E1	-2.14577E-4	4.79221E-3	9.36031E-2	1.57637E1	-1.98499E1	-1.9916E1	1.50166E1	2.15716E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.16067E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80028E1	-8.10623E-4	-8.8E1	0.0E0	4.673E-3	9.35793E-2	1.5765E1	-1.98537E1	-1.98032E1	1.49782E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16878E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80027E1	-1.04904E-3	-8.80001E1	-9.53674E-5	4.79221E-3	9.33409E-2	1.58077E1	-1.98681E1	-1.98368E1	1.49674E1	2.15238E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17066E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80029E1	-1.23978E-3	-8.80004E1	9.53674E-5	5.05447E-3	9.34601E-2	1.58251E1	-1.98543E1	-1.98879E1	1.50047E1	2.15758E-9	2.52243E-3	2.52243E-3	6.31555E-3	2.16375E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80026E1	-1.4782E-3	-8.80002E1	-9.53674E-5	5.24521E-3	9.37462E-2	1.58035E1	-1.98687E1	-2.00261E1	1.50226E1					
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80025E1	-1.35899E-3	-8.80002E1	9.53674E-5	4.79221E-3	9.34124E-2	1.56829E1	-1.98033E1	-2.00859E1	1.50103E1	2.15887E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.16952E-2
1.8E1	1.72E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80025E1	-1.21593E-3	-8.80001E1	-2.38419E-5	4.86374E-3	9.38177E-2	1.58399E1	-1.98545E1	-1.98043E1	1.49492E1	2.15624E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.16436E-2
1.9E1	3.59E2	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80024E1	-1.3113E-3	-8.80004E1	-1.19209E-4	4.79221E-3	9.38416E-2	1.57867E1	-1.98897E1	-1.98933E1	1.50051E1	2.15791E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.16186E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80026E1	-1.33514E-3	-8.80001E1	-2.38419E-5	5.19753E-3	9.35078E-2	1.58311E1	-1.98044E1	-2.00964E1	1.49773E1	2.16085E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.15331E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80027E1	-1.12057E-3	-8.80003E1	-4.76837E-5	5.24521E-3	9.36985E-2	1.58091E1	-1.98605E1	-1.99467E1	1.50479E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16125E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80023E1	-1.12057E-3	-8.80003E1	-2.38419E-5	5.00679E-3	9.33886E-2	1.57771E1	-1.98627E1	-1.98549E1	1.49644E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16313E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80026E1	-9.05991E-4	-8.80001E1	-5.24521E-4	4.95911E-3	9.31501E-2	1.58435E1	-1.98695E1	-1.98104E1	1.50016E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17066E-2