[Scan]
initial_time=2016-01-28T15:48:38
final_time=2016-01-28T15:48:57
ip_count=19
run=1026
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.85537E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.53715E-10
ql2_vset=
ql2_vmon=-1.38283E-3
ql2_imon=1.25926E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.4666E-9
ql4_vset=
ql4_vmon=-2.38419E-4
ql4_imon=1.43199E-8
mult1=-9.68851E-9
mult2=-2.68014E-9
rf_tmon=-4.9873E-3
rf_agc=3.30613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.10042E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=2.00614E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53285E1
cs_ef1b_imon=3.08782E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0738E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96619E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.41205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8411E1
cs_ef1a_imon=3.00546E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.01918E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.31319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.44378E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=9.7044E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.04107E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99974E1
olens4_imon=4.45831E-9
tplens_vset=0.0E0
tplens_vmon=-1.58375E0
tplens_imon=-1.62358E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00239E1
iondef3_imon=8.65536E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98753E1
iondef2_imon=9.32588E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.14831E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=9.28622E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.11701E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23287E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7102E1
cs_ef2a_imon=3.18304E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0951E0
os_ef2alow_imon=-2.72054E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38731E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.36619E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.09355E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58445E1
iondef1_imon=4.96028E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50148E1
iondef4_imon=5.20651E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.67698E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.23041E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15447E0
cs_ionaccel_imon=-1.0976E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.97414E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.54646E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24517E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.40932E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60452E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30477E1
cs_fil1_imon=9.22802E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.17852E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62309E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.06058E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21385E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.16952E-2
chamber_ion_pmon=2.15791E-9
chamber_cvt_pmon=2.52473E-3
foreline_cvt_pmon=2.52473E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30449E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80026E1	-1.16825E-3	-8.80002E1	9.53674E-5	5.6982E-3	9.36747E-2	1.58244E1	-1.98299E1	-2.00363E1	1.50118E1	2.15613E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.17255E-2
2.0E0	1.69E2	1.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80024E1	-1.07288E-3	-8.80003E1	4.52995E-4	5.36442E-3	9.34124E-2	1.58413E1	-1.98519E1	-2.01072E1	1.49944E1	2.15992E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.16806E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80026E1	-1.0252E-3	-8.80002E1	2.6226E-4	5.10216E-3	9.3317E-2	1.57932E1	-1.98694E1	-1.9903E1	1.49884E1	2.15519E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.16878E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.42513E-2	-8.80024E1	-1.26362E-3	-8.8E1	0.0E0	5.36442E-3	9.31501E-2	1.58073E1	-1.9867E1	-1.97886E1	1.49715E1	2.15349E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80026E1	-1.33514E-3	-8.80001E1	-4.05312E-4	5.43594E-3	9.34601E-2	1.58389E1	-1.98561E1	-1.99173E1	1.50136E1	2.159E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80027E1	-1.21593E-3	-8.80003E1	-3.33786E-4	5.24521E-3	9.35078E-2	1.57595E1	-1.98552E1	-1.98417E1	1.50142E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80029E1	-1.23978E-3	-8.80001E1	-4.05312E-4	5.26905E-3	9.34124E-2	1.58233E1	-1.98567E1	-1.9924E1	1.49728E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17255E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80026E1	-1.45435E-3	-8.80003E1	-9.53674E-5	5.43594E-3	9.3627E-2	1.57723E1	-1.9838E1	-1.98615E1	1.50166E1	2.15716E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.16991E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80027E1	-1.54972E-3	-8.80004E1	-1.19209E-4	5.53131E-3	9.36031E-2	1.58155E1	-1.98627E1	-1.98939E1	1.50213E1	2.15791E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.16569E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80027E1	-1.33514E-3	-8.80002E1	-2.6226E-4	5.07832E-3	9.40323E-2	1.5807E1	-1.98678E1	-2.0081E1	1.49836E1	2.15624E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.18104E-2
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80025E1	-1.23978E-3	-8.80002E1	-1.19209E-4	5.26905E-3	9.35555E-2	1.5753E1	-1.9882E1	-2.01042E1	1.5016E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16806E-2
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80024E1	-1.26362E-3	-8.80001E1	9.53674E-5	5.22137E-3	9.37223E-2	1.57755E1	-1.9831E1	-1.98706E1	1.50076E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15376E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80023E1	-9.53674E-4	-8.80001E1	-9.53674E-5	4.88758E-3	9.3317E-2	1.58383E1	-1.98519E1	-1.9993E1	1.49872E1	2.15238E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.1575E-2
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80023E1	-1.00136E-3	-8.8E1	-2.38419E-4	5.00679E-3	9.33886E-2	1.58533E1	-1.98672E1	-2.0023E1	1.5005E1	2.15613E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.16878E-2
1.8E1	1.73E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80025E1	-1.07288E-3	-8.80004E1	0.0E0	5.22137E-3	9.35793E-2	1.57498E1	-1.98803E1	-1.98628E1	1.49912E1	2.15613E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16972E-2
1.9E1	3.76E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80027E1	-1.00136E-3	-8.80003E1	0.0E0	5.05447E-3	9.34839E-2	1.58656E1	-1.98526E1	-1.99763E1	1.50112E1					
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80025E1	-1.04904E-3	-8.80003E1	-3.33786E-4	5.4121E-3	9.36031E-2	1.57795E1	-1.98711E1	-1.99065E1	1.50016E1	2.158E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80025E1	-1.26362E-3	-8.8E1	-3.57628E-4	5.36442E-3	9.34124E-2	1.58238E1	-1.98625E1	-1.995E1	1.5012E1	2.15613E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.15938E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80024E1	-1.23978E-3	-8.79999E1	-6.67572E-4	5.26905E-3	9.32693E-2	1.57622E1	-1.98826E1	-2.01355E1	1.50076E1	2.15726E-9	2.52553E-3	2.52553E-3	6.29684E-3	2.16374E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80024E1	-1.38283E-3	-8.80001E1	-2.38419E-4	5.26905E-3	9.35078E-2	1.58445E1	-1.98753E1	-2.00239E1	1.50148E1	2.15791E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.16952E-2