[Scan]
initial_time=2016-01-28T15:49:04
final_time=2016-01-28T15:49:24
ip_count=19
run=1026
dataset=1
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.87603E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.5052E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=1.25599E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.47291E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.43089E-8
mult1=-9.45141E-9
mult2=-2.67869E-9
rf_tmon=-4.96905E-3
rf_agc=3.26907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=6.09052E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=3.08058E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09243E0
lens1_imon=1.34451E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64758E1
os_ef1alow_imon=2.96156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.42466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.99936E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.01882E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11423E1
os_restr1_imon=4.30739E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.41134E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.07197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93236E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01934E1
cs_anode1_imon=2.05099E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.43898E-9
tplens_vset=0.0E0
tplens_vmon=-1.62641E0
tplens_imon=-2.95741E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98909E1
iondef3_imon=8.78514E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98573E1
iondef2_imon=9.36193E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=7.58541E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=9.43042E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74732E1
cs_ef2b_imon=3.11688E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23768E0
os_ea2_imon=-8.14854E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70971E1
cs_ef2a_imon=3.18724E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09448E0
os_ef2alow_imon=-2.77641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53345E-1
os_ef2bup_imon=-5.42242E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11011E1
os_restr2_imon=3.36875E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.0873E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57602E1
iondef1_imon=4.96389E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50064E1
iondef4_imon=5.07552E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67632E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.22693E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14885E0
cs_ionaccel_imon=-9.4255E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56031E1
einzel_imon=7.65416E-6
window_vset=0.0E0
window_vmon=1.61458E-1
window_imon=-9.98689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-6.58114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.2314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.27969E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.39582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06512E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60505E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30542E1
cs_fil1_imon=9.22198E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33129E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62397E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12246E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35837E-1
cs_fil2_imon=-2.50656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63751E-1
res40_imon=-2.45081E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.25E2	0.0E0	1.47E2	4.1E1	-7.44831E-2	-8.8003E1	-1.04904E-3	-8.80002E1	1.90735E-4	5.45979E-3	9.34839E-2	1.5779E1	-1.98871E1	-1.99071E1	1.49987E1	2.15791E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.16569E-2
2.0E0	1.68E2	0.0E0	3.16E2	1.6E2	-7.45602E-2	-8.80028E1	-1.14441E-3	-8.80003E1	1.90735E-4	5.26905E-3	9.36031E-2	1.58222E1	-1.9889E1	-1.98129E1	1.50309E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.80027E1	-1.4782E-3	-8.80003E1	-2.86102E-4	5.07832E-3	9.3627E-2	1.58035E1	-1.98759E1	-1.99112E1	1.50074E1	2.15696E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80025E1	-1.19209E-3	-8.80005E1	-4.76837E-5	5.24521E-3	9.36508E-2	1.57778E1	-1.98782E1	-2.01101E1	1.50232E1	2.15997E-9	2.51498E-3	2.51498E-3	6.31798E-3	2.17646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.45602E-2	-8.80026E1	-1.33514E-3	-8.80003E1	-2.38419E-4	5.24521E-3	9.35793E-2	1.57897E1	-1.98673E1	-1.99041E1	1.49974E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80025E1	-9.77516E-4	-8.80003E1	2.38419E-4	5.17368E-3	9.34839E-2	1.57885E1	-1.98411E1	-1.98358E1	1.49998E1	2.15894E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.1575E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80026E1	-9.53674E-4	-8.80004E1	4.29153E-4	5.24521E-3	9.36747E-2	1.57789E1	-1.98561E1	-2.00579E1	1.50143E1	2.15624E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.15148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80024E1	-8.34465E-4	-8.79999E1	1.19209E-4	4.91142E-3	9.35316E-2	1.57945E1	-1.98116E1	-1.993E1	1.50172E1	2.158E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.1575E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80025E1	-1.28746E-3	-8.80004E1	4.52995E-4	5.34058E-3	9.35316E-2	1.58305E1	-1.98495E1	-1.98128E1	1.50094E1	2.15314E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.16569E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.43285E-2	-8.80024E1	-1.62125E-3	-8.80001E1	5.24521E-4	4.74453E-3	9.34601E-2	1.58002E1	-1.98411E1	-1.98912E1	1.49976E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.16806E-2
1.4E1	1.7E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80026E1	-1.00136E-3	-8.8E1	2.86102E-4	5.07832E-3	9.34124E-2	1.57554E1	-1.98579E1	-1.99846E1	1.4998E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.15002E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80026E1	-1.16825E-3	-8.8E1	4.76837E-5	5.17368E-3	9.34839E-2	1.58335E1	-1.98428E1	-2.00507E1	1.50154E1	2.15716E-9	2.52169E-3	2.52169E-3	6.34518E-3	2.15699E-2
1.6E1	1.9E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80022E1	-1.26362E-3	-8.80002E1	9.53674E-5	5.17368E-3	9.34124E-2	1.58239E1	-1.98476E1	-2.01096E1	1.50184E1	2.158E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.18201E-2
1.7E1	3.8E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80026E1	-1.00136E-3	-8.80003E1	3.8147E-4	5.43594E-3	9.3174E-2	1.57879E1	-1.98771E1	-1.99685E1	1.50172E1	2.15425E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17066E-2
1.8E1	1.74E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80025E1	-9.53674E-4	-8.80002E1	4.29153E-4	5.38826E-3	9.3317E-2	1.58017E1	-1.98747E1	-1.99732E1	1.50016E1	2.159E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16991E-2
1.9E1	3.45E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80028E1	-1.00136E-3	-8.8E1	3.57628E-4	5.4121E-3	9.3174E-2	1.58185E1	-1.98531E1	-1.982E1	1.50148E1	2.15696E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.15803E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80028E1	-1.0252E-3	-8.8E1	-2.38419E-5	5.36442E-3	9.34839E-2	1.58179E1	-1.98621E1	-1.97473E1	1.50172E1	2.15145E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80027E1	-9.77516E-4	-8.79999E1	7.15256E-5	5.126E-3	9.30309E-2	1.57383E1	-1.98552E1	-1.99066E1	1.49932E1	2.15716E-9	2.52492E-3	2.52492E-3	6.34518E-3	2.17361E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80028E1	-1.21593E-3	-8.80002E1	-1.90735E-4	5.26905E-3	9.33886E-2	1.58323E1	-1.98795E1	-2.00225E1	1.49992E1	2.15425E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80025E1	-1.07288E-3	-8.8E1	-4.76837E-5	5.17368E-3	9.33886E-2	1.57602E1	-1.98573E1	-1.98909E1	1.50064E1	2.15613E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.18201E-2