[Scan]
initial_time=2016-01-28T15:49:31
final_time=2016-01-28T15:49:50
ip_count=19
run=1026
dataset=1
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83088E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.62143E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.24143E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.45569E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.43202E-8
mult1=-9.83671E-9
mult2=-2.70065E-9
rf_tmon=-4.63259E-3
rf_agc=3.38984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=6.0333E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53082E1
cs_ef1b_imon=3.07676E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.2535E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06428E0
lens1_imon=1.35756E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.41348E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.98883E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=1.02041E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.32229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15795E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93172E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.06189E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99975E1
olens4_imon=4.43921E-9
tplens_vset=0.0E0
tplens_vmon=-1.62905E0
tplens_imon=-3.69675E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99804E1
iondef3_imon=8.52132E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98597E1
iondef2_imon=9.54775E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=8.67176E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=9.39555E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.10451E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2462E0
os_ea2_imon=-7.73168E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19642E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28348E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.10189E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57524E1
iondef1_imon=5.07394E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49926E1
iondef4_imon=5.16867E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.67084E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.22377E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-1.03736E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02025E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.65063E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=7.07724E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50187E3
multb_neg_imon=7.14449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25791E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33168E1
os_fil1_imon=9.40444E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07395E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30455E1
cs_fil1_imon=9.22418E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30884E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62305E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28826E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.72486E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21333E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.1567E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19648E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.22E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80024E1	-1.26362E-3	-8.80002E1	5.72205E-4	5.17368E-3	9.33647E-2	1.58032E1	-1.98446E1	-1.98476E1	1.49848E1	2.159E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16806E-2
2.0E0	1.58E2	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80022E1	-1.38283E-3	-8.80003E1	2.6226E-4	4.91142E-3	9.35793E-2	1.57267E1	-1.98881E1	-1.99016E1	1.50266E1	2.15624E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16436E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80021E1	-1.12057E-3	-8.80002E1	4.76837E-5	5.05447E-3	9.32932E-2	1.57513E1	-1.9857E1	-1.99189E1	1.50091E1	2.15685E-9	2.51384E-3	2.51384E-3	6.3131E-3	2.1703E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80021E1	-1.04904E-3	-8.80003E1	-1.43051E-4	5.19753E-3	9.34124E-2	1.58132E1	-1.9844E1	-1.99679E1	1.50082E1	2.15455E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.17464E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8002E1	-9.77516E-4	-8.80004E1	1.43051E-4	4.86374E-3	9.34839E-2	1.58125E1	-1.98819E1	-2.01168E1	1.50274E1	2.15894E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16878E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8002E1	-9.53674E-4	-8.80005E1	1.19209E-4	4.98295E-3	9.35078E-2	1.58283E1	-1.98471E1	-2.00816E1	1.50034E1	2.15624E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80021E1	-6.91414E-4	-8.80004E1	1.43051E-4	4.81606E-3	9.36747E-2	1.58227E1	-1.98687E1	-2.01006E1	1.49944E1	2.156E-9	2.51693E-3	2.51693E-3	6.34099E-3	2.16377E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80023E1	-9.29832E-4	-8.80002E1	1.90735E-4	4.86374E-3	9.34601E-2	1.58006E1	-1.98475E1	-1.9888E1	1.4997E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.1575E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80018E1	-1.04904E-3	-8.80006E1	4.76837E-5	5.10216E-3	9.35078E-2	1.57941E1	-1.98707E1	-1.99504E1	1.4997E1	2.15636E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.16736E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80021E1	-9.05991E-4	-8.80003E1	3.33786E-4	5.03063E-3	9.35078E-2	1.58159E1	-1.98619E1	-2.01037E1	1.49879E1	2.15546E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.171E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80019E1	-1.23978E-3	-8.80004E1	1.19209E-4	5.19753E-3	9.34124E-2	1.57939E1	-1.98579E1	-1.98981E1	1.49878E1	2.15376E-9	2.51527E-3	2.51527E-3	6.31902E-3	2.16512E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80024E1	-8.10623E-4	-8.80001E1	-7.15256E-5	4.93526E-3	9.35555E-2	1.57783E1	-1.98723E1	-1.99288E1	1.50124E1	2.15897E-9	2.51918E-3	2.51918E-3	6.33188E-3	2.16468E-2
1.6E1	1.6E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80024E1	-9.05991E-4	-8.8E1	4.76837E-5	5.07832E-3	9.35555E-2	1.58221E1	-1.98416E1	-2.01096E1	1.5007E1					
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80025E1	-1.0252E-3	-8.80003E1	6.19888E-4	5.34058E-3	9.36747E-2	1.57771E1	-1.98819E1	-2.01427E1	1.50214E1	2.158E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17444E-2
1.8E1	1.7E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80024E1	-1.04904E-3	-8.80005E1	3.09944E-4	5.19753E-3	9.3317E-2	1.57801E1	-1.98615E1	-2.01318E1	1.50118E1	2.15238E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16313E-2
1.9E1	3.26E2	2.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80022E1	-1.21593E-3	-8.80003E1	4.76837E-4	5.10216E-3	9.34601E-2	1.58293E1	-1.98909E1	-2.00351E1	1.50184E1	2.15987E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.16689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80022E1	-9.77516E-4	-8.80002E1	3.09944E-4	4.79221E-3	9.35078E-2	1.58032E1	-1.98581E1	-2.0084E1	1.49914E1	2.15696E-9	2.5147E-3	2.5147E-3	6.31299E-3	2.16569E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80021E1	-6.91414E-4	-8.80003E1	9.53674E-5	5.05447E-3	9.32932E-2	1.58191E1	-1.98243E1	-1.97878E1	1.50034E1	2.15613E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.15938E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-9.77516E-4	-8.80004E1	2.38419E-5	5.14984E-3	9.33647E-2	1.58321E1	-1.98588E1	-1.98328E1	1.4986E1	2.159E-9	2.52492E-3	2.52492E-3	6.28056E-3	2.16252E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80023E1	-1.04904E-3	-8.80003E1	7.15256E-5	5.67436E-3	9.32455E-2	1.57524E1	-1.98597E1	-1.99804E1	1.49926E1	2.1567E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.17361E-2