[Scan]
initial_time=2016-01-28T15:49:58
final_time=2016-01-28T15:50:17
ip_count=19
run=1026
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.84842E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.70619E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.21617E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.42934E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.43494E-8
mult1=-8.94374E-9
mult2=-2.62135E-9
rf_tmon=-4.79853E-3
rf_agc=3.34802E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.81205E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53689E1
cs_ef1b_imon=3.09495E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=1.22979E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07548E0
lens1_imon=1.29031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64653E1
os_ef1alow_imon=2.96191E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.4064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84138E1
cs_ef1a_imon=3.0026E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.02433E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11306E1
os_restr1_imon=4.31359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.41301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6388E1
os_ef1bup_imon=3.07231E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21493E0
cs_ionrep_imon=9.71056E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01768E1
cs_anode1_imon=2.05324E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.40434E-9
tplens_vset=0.0E0
tplens_vmon=-1.63848E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00847E1
iondef3_imon=8.63812E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98458E1
iondef2_imon=9.15487E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=7.87556E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=9.26106E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.11902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23676E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00318E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71293E1
cs_ef2a_imon=3.18342E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07019E0
os_ef2alow_imon=-2.61256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58108E-1
os_ef2bup_imon=-5.415E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.36317E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01756E1
cs_anode2_imon=2.09711E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58191E1
iondef1_imon=5.00669E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49902E1
iondef4_imon=5.30647E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.6719E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.22664E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16612E0
cs_ionaccel_imon=-1.00257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.64184E-6
window_vset=0.0E0
window_vmon=1.60018E-1
window_imon=-1.09457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38974E-4
mask2_vset=0.0E0
mask2_vmon=-1.8612E1
mask2_imon=-6.558E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=8.35497E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=6.83302E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.42226E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06964E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60382E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30434E1
cs_fil1_imon=9.23313E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29351E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6292E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55983E-2
os_fil2_imon=-2.76196E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89108E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04781E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.48479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.16501E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.33005E-1
res40_imon=-2.63379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.42E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80026E1	-9.53674E-4	-8.79999E1	-1.19209E-4	4.88758E-3	9.32455E-2	1.57914E1	-1.98877E1	-2.00009E1	1.49916E1	2.15624E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16067E-2
2.0E0	1.56E2	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80026E1	-1.04904E-3	-8.80003E1	1.19209E-4	4.93526E-3	9.2864E-2	1.58083E1	-1.98813E1	-1.99053E1	1.50022E1	2.15613E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.16125E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80022E1	-1.0252E-3	-8.80003E1	2.38419E-5	5.05447E-3	9.28402E-2	1.58327E1	-1.9857E1	-1.99467E1	1.50028E1	2.15238E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80023E1	-7.86781E-4	-8.80005E1	0.0E0	4.57764E-3	9.29117E-2	1.58297E1	-1.98499E1	-2.00576E1	1.50045E1	2.15455E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80023E1	-9.29832E-4	-8.80006E1	2.38419E-4	4.76837E-3	9.29117E-2	1.57656E1	-1.98434E1	-1.99053E1	1.5013E1	2.15706E-9	2.52428E-3	2.52428E-3	6.28552E-3	2.15563E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80025E1	-1.28746E-3	-8.80003E1	-9.53674E-5	4.95911E-3	9.30786E-2	1.57825E1	-1.98657E1	-2.00399E1	1.50154E1	2.15349E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17176E-2
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80027E1	-1.19209E-3	-8.80002E1	1.43051E-4	4.79221E-3	9.27925E-2	1.58173E1	-1.98909E1	-1.99768E1	1.50064E1	2.15425E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80027E1	-1.12057E-3	-8.79998E1	-2.38419E-5	5.03063E-3	9.29117E-2	1.57501E1	-1.98594E1	-1.99313E1	1.4989E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.15938E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80027E1	-1.33514E-3	-8.79997E1	7.15256E-5	5.14984E-3	9.29594E-2	1.57783E1	-1.98044E1	-2.007E1	1.5019E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17176E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80028E1	-1.21593E-3	-8.8E1	2.14577E-4	5.05447E-3	9.29832E-2	1.57634E1	-1.98118E1	-1.99462E1	1.50097E1	2.15531E-9	2.52154E-3	2.52154E-3	6.31151E-3	2.17019E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80028E1	-1.19209E-3	-8.80001E1	-2.6226E-4	5.29289E-3	9.29832E-2	1.57531E1	-1.98765E1	-2.01272E1	1.49878E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17444E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80023E1	-9.53674E-4	-8.80003E1	-4.76837E-5	5.29289E-3	9.31978E-2	1.5847E1	-1.98258E1	-2.00853E1	1.50097E1					
1.6E1	1.9E1	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80024E1	-8.34465E-4	-8.80002E1	-4.76837E-5	4.8399E-3	9.31978E-2	1.575E1	-1.98416E1	-1.98567E1	1.50028E1	2.15786E-9	2.52271E-3	2.52271E-3	6.33565E-3	2.18255E-2
1.7E1	4.4E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80026E1	-9.05991E-4	-8.80003E1	1.90735E-4	5.126E-3	9.31025E-2	1.58966E1	-1.98759E1	-2.0085E1	1.50262E1	2.15238E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.18201E-2
1.8E1	1.9E2	1.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80023E1	-7.15256E-4	-8.80005E1	-1.43051E-4	5.17368E-3	9.30309E-2	1.58029E1	-1.98531E1	-2.00105E1	1.50082E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.18106E-2
1.9E1	3.2E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80022E1	-7.15256E-4	-8.80001E1	-1.66893E-4	5.126E-3	9.32455E-2	1.57664E1	-1.98492E1	-1.98596E1	1.50311E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80022E1	-7.15256E-4	-8.80004E1	-2.38419E-5	5.4121E-3	9.30786E-2	1.58624E1	-1.98338E1	-2.01018E1	1.50094E1	2.15636E-9	2.52448E-3	2.52448E-3	6.31798E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80023E1	-9.29832E-4	-8.80001E1	-1.19209E-4	5.34058E-3	9.34839E-2	1.57643E1	-1.98393E1	-2.00818E1	1.50052E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17444E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-8.82149E-4	-8.80001E1	0.0E0	4.95911E-3	9.30071E-2	1.58161E1	-1.98573E1	-2.00459E1	1.49923E1	2.15441E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.17176E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80019E1	-9.05991E-4	-8.80001E1	-9.53674E-5	4.93526E-3	9.33886E-2	1.58191E1	-1.98458E1	-2.00847E1	1.49902E1	2.158E-9	2.52647E-3	2.52647E-3	6.29098E-3	2.16501E-2