[Scan]
initial_time=2016-01-28T15:51:17
final_time=2016-01-28T15:51:37
ip_count=19
run=1026
dataset=1
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82876E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.2942E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.24545E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.4325E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.42683E-8
mult1=-1.29225E-8
mult2=-3.11647E-9
rf_tmon=3.77931E-3
rf_agc=4.28169E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.934E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=1.25102E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03832E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.647E1
os_ef1alow_imon=2.97111E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.41171E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84303E1
cs_ef1a_imon=3.00685E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.02739E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11088E1
os_restr1_imon=4.30439E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.41195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08009E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.64331E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0175E1
cs_anode1_imon=2.05607E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.38215E-9
tplens_vset=0.0E0
tplens_vmon=-1.62138E0
tplens_imon=-2.52875E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01722E1
iondef3_imon=8.59565E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98918E1
iondef2_imon=9.27521E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.06224E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=9.42033E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33516E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74737E1
cs_ef2b_imon=3.12149E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24207E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.1866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0289E0
os_ef2alow_imon=-2.66917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58108E-1
os_ef2bup_imon=-5.42562E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11088E1
os_restr2_imon=3.35574E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01874E1
cs_anode2_imon=2.08473E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56997E1
iondef1_imon=5.07747E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50128E1
iondef4_imon=5.2357E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.68213E-8
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=1.23171E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1496E0
cs_ionaccel_imon=-1.04857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47081E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56022E1
einzel_imon=7.80461E-6
window_vset=0.0E0
window_vmon=1.57069E-1
window_imon=-1.02026E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86273E1
mask2_imon=-8.99953E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.15865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.40829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.91089E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=5.96587E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33222E1
os_fil1_imon=9.41488E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60673E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30505E1
cs_fil1_imon=9.23578E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38668E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63416E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.64991E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93237E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.86557E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35309E-1
cs_fil2_imon=-2.34325E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53134E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21535E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45979E-1
res40_imon=-2.5984E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80023E1	-1.00136E-3	-8.80004E1	1.19209E-4	4.95911E-3	9.35078E-2	1.57642E1	-1.98632E1	-1.99132E1	1.49859E1	2.15716E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.1829E-2
2.0E0	1.47E2	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80027E1	-1.0252E-3	-8.80002E1	-2.38419E-5	5.24521E-3	9.34839E-2	1.58407E1	-1.98124E1	-1.98976E1	1.50107E1	2.15325E-9	2.51823E-3	2.51823E-3	6.30239E-3	2.1706E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80025E1	-1.19209E-3	-8.80003E1	2.6226E-4	5.14984E-3	9.33886E-2	1.57977E1	-1.98585E1	-1.99338E1	1.49932E1	2.15847E-9	2.5199E-3	2.5199E-3	6.31974E-3	2.16525E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80023E1	-1.04904E-3	-8.80005E1	0.0E0	5.14984E-3	9.34839E-2	1.57584E1	-1.98623E1	-2.01567E1	1.50004E1	2.15817E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.16555E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80021E1	-1.19209E-3	-8.80003E1	2.38419E-5	5.45979E-3	9.34601E-2	1.57855E1	-1.98741E1	-2.00501E1	1.50118E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.15938E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80021E1	-1.00136E-3	-8.80002E1	2.38419E-5	5.43594E-3	9.33647E-2	1.58287E1	-1.98807E1	-1.98777E1	1.49992E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17176E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80021E1	-8.58307E-4	-8.80001E1	2.38419E-5	5.19753E-3	9.35316E-2	1.57674E1	-1.98675E1	-1.97683E1	1.49956E1	2.158E-9	2.52318E-3	2.52318E-3	6.28006E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80025E1	-1.09673E-3	-8.80003E1	-1.66893E-4	4.98295E-3	9.32932E-2	1.57805E1	-1.98477E1	-1.97443E1	1.50241E1	2.15706E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.17255E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80024E1	-1.09673E-3	-8.80001E1	7.15256E-5	5.03063E-3	9.3317E-2	1.57548E1	-1.98567E1	-1.98525E1	1.50143E1	2.15791E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.16377E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80023E1	-1.07288E-3	-8.80001E1	-4.76837E-5	5.14984E-3	9.34124E-2	1.57831E1	-1.98458E1	-1.98645E1	1.50088E1	2.158E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.16125E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80025E1	-9.53674E-4	-8.80003E1	-4.76837E-5	5.19753E-3	9.33409E-2	1.57719E1	-1.9857E1	-2.00051E1	1.5019E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16878E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80028E1	-1.28746E-3	-8.80002E1	4.76837E-5	5.50747E-3	9.34839E-2	1.5768E1	-1.98813E1	-2.00976E1	1.49914E1	2.15073E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.17918E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80029E1	-1.14441E-3	-8.80005E1	-3.57628E-4	5.29289E-3	9.3174E-2	1.57814E1	-1.98664E1	-2.0126E1	1.50148E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17822E-2
1.7E1	4.5E1	1.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80027E1	-1.14441E-3	-8.80002E1	-1.43051E-4	5.43594E-3	9.30548E-2	1.58377E1	-1.99005E1	-2.00537E1	1.50118E1	2.15716E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.15699E-2
1.8E1	2.32E2	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80027E1	-1.45435E-3	-8.79999E1	-1.43051E-4	4.98295E-3	9.33886E-2	1.57993E1	-1.99017E1	-2.00682E1	1.50082E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16501E-2
1.9E1	3.56E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80024E1	-1.40667E-3	-8.80002E1	2.38419E-5	4.91142E-3	9.33886E-2	1.58179E1	-1.98543E1	-1.98284E1	1.49883E1	2.158E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16501E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80028E1	-1.3113E-3	-8.8E1	1.43051E-4	4.86374E-3	9.29356E-2	1.57795E1	-1.98753E1	-1.98434E1	1.50899E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80028E1	-1.45435E-3	-8.8E1	-2.38419E-5	5.05447E-3	9.29832E-2	1.58244E1	-1.98614E1	-1.99309E1	1.50154E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.1575E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80026E1	-1.35899E-3	-8.80002E1	0.0E0	5.17368E-3	9.34124E-2	1.58321E1	-1.98948E1	-1.98983E1	1.50184E1	2.15907E-9	2.51182E-3	2.51182E-3	6.31269E-3	2.16555E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80027E1	-1.21593E-3	-8.80002E1	9.53674E-5	5.126E-3	9.31978E-2	1.56997E1	-1.98918E1	-2.01722E1	1.50128E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16806E-2