[Scan]
initial_time=2016-01-28T15:51:44
final_time=2016-01-28T15:52:04
ip_count=19
run=1026
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.81971E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.65624E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.21078E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.41838E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.42477E-8
mult1=-9.18084E-9
mult2=-2.9314E-9
rf_tmon=-3.8972E-3
rf_agc=3.3965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=6.00147E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66126E0
bslens_imon=2.43955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2022E1
lens5a_imon=1.96871E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04968E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53788E1
cs_ef1b_imon=3.10104E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04897E1
cs_ea1_imon=1.23364E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03071E0
lens1_imon=1.43507E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6492E1
os_ef1alow_imon=2.97104E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03781E1
cs_ea2_imon=1.40729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.00101E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.03419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=4.32127E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15079E1
os_ea1_imon=2.42501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.07379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23133E0
cs_ionrep_imon=9.64225E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93085E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.04117E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.40124E-9
tplens_vset=0.0E0
tplens_vmon=-1.61483E0
tplens_imon=-4.72672E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98998E1
iondef3_imon=8.96091E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99212E1
iondef2_imon=9.15947E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98085E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31244E0
ionrepsh_imon=9.12833E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.15754E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74547E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25924E0
os_ea2_imon=-8.03607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00265E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71271E1
cs_ef2a_imon=3.1746E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06169E0
os_ef2alow_imon=-2.69288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79044E-1
os_ef2bup_imon=-5.38245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11091E1
os_restr2_imon=3.37116E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.28682E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01964E1
cs_anode2_imon=2.09138E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58258E1
iondef1_imon=5.11818E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50034E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.67952E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.24016E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15998E0
cs_ionaccel_imon=-1.08537E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47094E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.55939E-6
window_vset=0.0E0
window_vmon=1.73759E-1
window_imon=-1.07369E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86169E1
mask2_imon=-6.06616E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=6.77285E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9376E3
defgrida_imon=7.32571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.99147E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2898E0
defgridb_imon=6.18106E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.4349E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06434E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60755E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30464E1
cs_fil1_imon=9.23614E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29067E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62833E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4142E-2
os_fil2_imon=-2.82094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83034E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73117E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35525E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.18477E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22409E-1
res40_imon=-2.51773E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.12E2	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80025E1	-9.53674E-4	-8.80003E1	0.0E0	4.79221E-3	9.3174E-2	1.57647E1	-1.98585E1	-1.98846E1	1.50033E1	2.15358E-9	2.51793E-3	2.51793E-3	6.34301E-3	2.16787E-2
2.0E0	1.48E2	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80027E1	-1.07288E-3	-8.8E1	0.0E0	5.07832E-3	9.34362E-2	1.58044E1	-1.9857E1	-2.00081E1	1.5002E1	2.15546E-9	2.52659E-3	2.52659E-3	6.29684E-3	2.171E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80027E1	-1.26362E-3	-8.80004E1	1.43051E-4	4.8399E-3	9.34839E-2	1.58197E1	-1.98594E1	-2.01284E1	1.50103E1	2.15495E-9	2.51967E-3	2.51967E-3	6.32134E-3	2.17831E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80026E1	-1.14441E-3	-8.80002E1	-2.38419E-5	5.05447E-3	9.34124E-2	1.57981E1	-1.98939E1	-2.00423E1	1.49968E1	2.15533E-9	2.52707E-3	2.52707E-3	6.33436E-3	2.17732E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80026E1	-1.26362E-3	-8.8E1	7.15256E-5	4.93526E-3	9.33647E-2	1.57981E1	-1.98591E1	-2.00892E1	1.504E1	2.15706E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80024E1	-1.3113E-3	-8.80001E1	4.76837E-5	5.03063E-3	9.34124E-2	1.57855E1	-1.98458E1	-2.01219E1	1.49944E1	2.15425E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.15563E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80027E1	-1.23978E-3	-8.80001E1	-9.53674E-5	5.10216E-3	9.35555E-2	1.58089E1	-1.98849E1	-2.00429E1	1.49836E1	2.15441E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.16806E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80027E1	-1.3113E-3	-8.80002E1	2.38419E-5	4.95911E-3	9.32693E-2	1.58558E1	-1.98579E1	-1.98158E1	1.50286E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15563E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80025E1	-8.10623E-4	-8.80004E1	2.14577E-4	5.17368E-3	9.32217E-2	1.57554E1	-1.98521E1	-1.97525E1	1.50219E1	2.15894E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.15938E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80023E1	-8.82149E-4	-8.80004E1	0.0E0	4.62532E-3	9.35555E-2	1.58558E1	-1.98765E1	-1.98489E1	1.5001E1	2.15365E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.16736E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80021E1	-6.67572E-4	-8.80004E1	-4.76837E-5	5.38826E-3	9.35316E-2	1.58107E1	-1.98717E1	-1.9796E1	1.50262E1	2.158E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17255E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.44831E-2	-8.80022E1	-8.34465E-4	-8.8E1	-4.76837E-5	5.43594E-3	9.34362E-2	1.58215E1	-1.9844E1	-1.98045E1	1.50106E1	2.15441E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.16436E-2
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80025E1	-6.4373E-4	-8.80002E1	-9.53674E-5	5.50747E-3	9.30786E-2	1.57934E1	-1.98722E1	-2.00345E1	1.50004E1	2.15706E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.17444E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80024E1	-7.15256E-4	-8.80003E1	0.0E0	5.67436E-3	9.33886E-2	1.58017E1	-1.98531E1	-2.01126E1	1.50016E1	2.15332E-9	2.52867E-3	2.52867E-3	6.32936E-3	2.17255E-2
1.8E1	1.92E2	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80024E1	-7.62939E-4	-8.80005E1	-9.53674E-5	5.29289E-3	9.35316E-2	1.58321E1	-1.98647E1	-2.00222E1	1.50166E1	2.15706E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.16501E-2
1.9E1	3.7E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.8002E1	-1.07288E-3	-8.80005E1	-1.66893E-4	5.43594E-3	9.36747E-2	1.57765E1	-1.98615E1	-2.02382E1	1.49941E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16501E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80021E1	-9.77516E-4	-8.80002E1	-4.76837E-5	5.34058E-3	9.32693E-2	1.57698E1	-1.98392E1	-2.00027E1	1.50085E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80022E1	-1.14441E-3	-8.80007E1	7.15256E-5	4.86374E-3	9.32932E-2	1.57584E1	-1.98198E1	-1.99537E1	1.5001E1	2.15425E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.16313E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.80023E1	-1.0252E-3	-8.80006E1	1.43051E-4	5.14984E-3	9.34601E-2	1.57737E1	-1.98393E1	-1.99956E1	1.50016E1	2.15624E-9	2.52707E-3	2.52707E-3	6.2752E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80025E1	-1.12057E-3	-8.80003E1	3.57628E-4	5.10216E-3	9.35793E-2	1.58258E1	-1.99212E1	-1.98998E1	1.50034E1	2.15808E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.18477E-2