[Scan]
initial_time=2016-01-28T15:52:11
final_time=2016-01-28T15:52:30
ip_count=19
run=1026
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.8082E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.64611E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.22651E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-1.43664E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.42274E-8
mult1=-1.00519E-8
mult2=-2.74633E-9
rf_tmon=-4.35632E-3
rf_agc=3.35059E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.17337E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53304E1
cs_ef1b_imon=3.09767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.0193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=1.26569E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0756E0
lens1_imon=1.33009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.0018E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.03287E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.31869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.41783E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=9.86302E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.04855E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.38079E-9
tplens_vset=0.0E0
tplens_vmon=-1.58676E0
tplens_imon=-3.24581E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99188E1
iondef3_imon=8.72025E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98551E1
iondef2_imon=9.1925E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=7.96628E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=9.45205E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20884E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64988E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.36292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.28594E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.09108E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57995E1
iondef1_imon=5.03238E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50154E1
iondef4_imon=5.1038E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.67946E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23472E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.0734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.91777E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41651E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30443E1
cs_fil1_imon=9.21529E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24637E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.59655E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.37E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80028E1	-1.0252E-3	-8.80002E1	1.66893E-4	4.95911E-3	9.33647E-2	1.57625E1	-1.98653E1	-1.99437E1	1.50052E1	2.158E-9	2.52867E-3	2.52867E-3	6.33486E-3	2.17255E-2
2.0E0	1.48E2	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80029E1	-1.0252E-3	-8.80002E1	-4.76837E-5	4.88758E-3	9.33409E-2	1.57897E1	-1.9841E1	-1.99555E1	1.4989E1	2.15624E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80024E1	-1.40667E-3	-8.80002E1	7.15256E-5	5.31673E-3	9.31025E-2	1.57831E1	-1.98835E1	-2.00145E1	1.50178E1	2.15505E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80024E1	-1.71661E-3	-8.8E1	-2.38419E-5	5.126E-3	9.31263E-2	1.57666E1	-1.98611E1	-1.9821E1	1.50161E1	2.15716E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.1829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80021E1	-1.5974E-3	-8.80004E1	-4.76837E-5	5.126E-3	9.32693E-2	1.58143E1	-1.98555E1	-2.00357E1	1.49884E1	2.16085E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80023E1	-1.33514E-3	-8.80005E1	2.6226E-4	5.26905E-3	9.34124E-2	1.58065E1	-1.98452E1	-1.98705E1	1.50178E1	2.15894E-9	2.52099E-3	2.52099E-3	6.34588E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80025E1	-1.26362E-3	-8.80005E1	2.38419E-5	5.126E-3	9.34839E-2	1.57698E1	-1.98717E1	-1.9948E1	1.50064E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80026E1	-1.19209E-3	-8.80003E1	-9.53674E-5	5.03063E-3	9.37223E-2	1.58035E1	-1.98561E1	-2.00057E1	1.50376E1	2.158E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16313E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80025E1	-1.16825E-3	-8.8E1	-9.53674E-5	5.24521E-3	9.35793E-2	1.57921E1	-1.98609E1	-1.99678E1	1.5007E1	2.14865E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80023E1	-9.05991E-4	-8.80001E1	2.38419E-5	4.79221E-3	9.32693E-2	1.57926E1	-1.98594E1	-1.99148E1	1.50142E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16125E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80023E1	-1.04904E-3	-8.80003E1	1.66893E-4	5.29289E-3	9.32932E-2	1.58786E1	-1.98927E1	-2.01012E1	1.50058E1	2.15533E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.18104E-2
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80023E1	-1.07288E-3	-8.80006E1	-4.76837E-5	5.36442E-3	9.33886E-2	1.57902E1	-1.98482E1	-1.99266E1	1.50097E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16501E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80023E1	-1.28746E-3	-8.80003E1	9.53674E-5	5.43594E-3	9.35078E-2	1.57946E1	-1.98563E1	-1.97761E1	1.50076E1	2.15992E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.15331E-2
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80021E1	-1.23978E-3	-8.80005E1	1.90735E-4	5.19753E-3	9.33409E-2	1.58486E1	-1.98835E1	-1.97921E1	1.4983E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17066E-2
1.8E1	2.1E2	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80025E1	-7.39098E-4	-8.80004E1	-7.15256E-5	5.45979E-3	9.31978E-2	1.57542E1	-1.98735E1	-1.993E1	1.4995E1	2.15987E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.1575E-2
1.9E1	3.38E2	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80022E1	-9.53674E-4	-8.80006E1	-2.6226E-4	5.38826E-3	9.30786E-2	1.57738E1	-1.98263E1	-2.00522E1	1.49908E1	2.15566E-9	2.52264E-3	2.52264E-3	6.29919E-3	2.17161E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80026E1	-7.86781E-4	-8.80007E1	7.15256E-5	5.34058E-3	9.32693E-2	1.58421E1	-1.99077E1	-2.00788E1	1.50208E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80024E1	-9.53674E-4	-8.80004E1	1.43051E-4	5.38826E-3	9.32217E-2	1.57495E1	-1.987E1	-2.01024E1	1.4977E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.17822E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80022E1	-9.29832E-4	-8.80005E1	4.05312E-4	5.62668E-3	9.32455E-2	1.57271E1	-1.98369E1	-2.00464E1	1.50132E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80023E1	-9.77516E-4	-8.8001E1	7.15256E-5	5.24521E-3	9.32693E-2	1.57995E1	-1.98551E1	-1.99188E1	1.50154E1	2.15716E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.17547E-2