[Scan]
initial_time=2016-01-28T15:52:37
final_time=2016-01-28T15:52:57
ip_count=19
run=1026
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.79912E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.66793E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.21366E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.43567E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.42028E-8
mult1=-8.99989E-9
mult2=-2.83316E-9
rf_tmon=-5.92876E-3
rf_agc=3.26865E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.01315E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.09731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04566E2
lens23_imon=1.01923E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=1.2592E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09843E0
lens1_imon=1.41301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.37708E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.00288E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.03086E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.42576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.65033E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.02945E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.40623E-9
tplens_vset=0.0E0
tplens_vmon=-1.60058E0
tplens_imon=-2.81321E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00338E1
iondef3_imon=8.53639E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98728E1
iondef2_imon=9.36193E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.44347E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=9.5566E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24729E0
os_ea2_imon=-8.04039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.35751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.0882E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58122E1
iondef1_imon=4.85934E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49935E1
iondef4_imon=5.26237E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.67999E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.23664E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-1.13107E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.85996E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.85649E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33162E1
os_fil1_imon=9.39164E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60509E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30476E1
cs_fil1_imon=9.2258E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31485E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6348E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.88821E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91235E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2147E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=2.15425E-2
chamber_ion_pmon=2.15647E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.79424E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.21E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80026E1	-9.53674E-4	-8.80002E1	3.33786E-4	4.95911E-3	9.37462E-2	1.58032E1	-1.98511E1	-2.00334E1	1.50086E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.18011E-2
2.0E0	1.71E2	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80026E1	-8.58307E-4	-8.80004E1	9.53674E-5	5.43594E-3	9.36747E-2	1.57934E1	-1.98759E1	-1.99561E1	1.49935E1	2.15546E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80026E1	-8.82149E-4	-8.80005E1	9.53674E-5	5.19753E-3	9.36747E-2	1.58516E1	-1.987E1	-1.99821E1	1.5013E1	2.15782E-9	2.51952E-3	2.51952E-3	6.3131E-3	2.15469E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80026E1	-6.67572E-4	-8.80004E1	5.24521E-4	5.34058E-3	9.38177E-2	1.57625E1	-1.9824E1	-1.98794E1	1.49952E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.15699E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80023E1	-9.05991E-4	-8.80004E1	5.24521E-4	5.45979E-3	9.40084E-2	1.58317E1	-1.98428E1	-2.00531E1	1.50208E1	2.15441E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80024E1	-9.53674E-4	-8.80004E1	4.52995E-4	5.55515E-3	9.35078E-2	1.58287E1	-1.98567E1	-1.98669E1	1.50028E1	2.15992E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.16991E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80024E1	-6.91414E-4	-8.80002E1	2.6226E-4	5.29289E-3	9.36985E-2	1.57554E1	-1.98452E1	-1.98086E1	1.50461E1	2.156E-9	2.52362E-3	2.52362E-3	6.34099E-3	2.16952E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80023E1	-8.10623E-4	-8.80005E1	-2.38419E-5	5.05447E-3	9.3627E-2	1.58073E1	-1.98717E1	-1.98458E1	1.49923E1	2.15624E-9	2.50989E-3	2.50989E-3	6.30202E-3	2.16067E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80024E1	-1.04904E-3	-8.80006E1	-1.43051E-4	4.72069E-3	9.36747E-2	1.57723E1	-1.98224E1	-1.9927E1	1.50172E1	2.15716E-9	2.52707E-3	2.52707E-3	6.33977E-3	2.18104E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80026E1	-9.53674E-4	-8.80007E1	7.15256E-5	5.17368E-3	9.33886E-2	1.58029E1	-1.99077E1	-2.00994E1	1.50154E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16878E-2
1.4E1	1.2E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80025E1	-1.09673E-3	-8.80004E1	-4.76837E-5	5.07832E-3	9.36985E-2	1.57975E1	-1.98531E1	-2.00345E1	1.49884E1	2.15332E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15376E-2
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80022E1	-1.26362E-3	-8.8E1	2.38419E-5	5.126E-3	9.35078E-2	1.58089E1	-1.98573E1	-1.98248E1	1.50142E1	2.15425E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.15563E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80024E1	-1.28746E-3	-8.80005E1	9.53674E-5	5.24521E-3	9.32693E-2	1.57945E1	-1.98507E1	-1.99185E1	1.50238E1	2.15519E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17066E-2
1.7E1	3.7E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80026E1	-1.16825E-3	-8.80003E1	-1.43051E-4	5.34058E-3	9.36508E-2	1.58445E1	-1.98399E1	-2.0067E1	1.49998E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17547E-2
1.8E1	1.77E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80025E1	-9.29832E-4	-8.80007E1	-9.53674E-5	5.34058E-3	9.36031E-2	1.57895E1	-1.98508E1	-1.98793E1	1.49949E1	2.15533E-9	2.5233E-3	2.5233E-3	6.31009E-3	2.17732E-2
1.9E1	3.5E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80024E1	-1.19209E-3	-8.80002E1	3.33786E-4	5.14984E-3	9.37462E-2	1.58356E1	-1.98721E1	-2.00731E1	1.49828E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80024E1	-8.10623E-4	-8.80005E1	2.38419E-5	5.03063E-3	9.38654E-2	1.57969E1	-1.98386E1	-1.99119E1	1.50076E1	2.15393E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.16248E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80025E1	-1.19209E-3	-8.80002E1	4.76837E-5	4.95911E-3	9.35078E-2	1.57936E1	-1.98533E1	-1.99014E1	1.50201E1	2.15854E-9	2.52115E-3	2.52115E-3	6.32626E-3	2.16713E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80025E1	-1.33514E-3	-8.80001E1	2.38419E-5	5.22137E-3	9.36985E-2	1.57913E1	-1.98559E1	-1.98975E1	1.49943E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80025E1	-1.0252E-3	-8.80005E1	2.38419E-5	5.22137E-3	9.36747E-2	1.58122E1	-1.98728E1	-2.00338E1	1.49935E1	2.15647E-9	2.5199E-3	2.5199E-3	6.3126E-3	2.15425E-2