[Scan]
initial_time=2016-01-28T15:53:04
final_time=2016-01-28T15:53:23
ip_count=19
run=1026
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.48695E-2
qbias_imon=-3.83327E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.60462E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.19739E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.42611E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.42632E-8
mult1=-1.00896E-8
mult2=-2.78847E-9
rf_tmon=-4.54247E-3
rf_agc=3.37902E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.95737E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61867E0
bslens_imon=1.6978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18787E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12579E2
lens4a_imon=2.05601E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53346E1
cs_ef1b_imon=3.08469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01595E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03678E1
cs_ea1_imon=1.20656E-5
lens1_vset=-2.7E0
lens1_vmon=-3.15611E0
lens1_imon=2.22412E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05E1
cs_ea2_imon=1.38177E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.99676E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.0271E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.32157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1426E1
os_ea1_imon=2.37385E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.06055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=1.00721E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93654E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.05252E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.42729E-9
tplens_vset=0.0E0
tplens_vmon=-1.58315E0
tplens_imon=-1.01313E-6
iondef3_vset=-2.0E1
iondef3_vmon=-1.98711E1
iondef3_imon=8.72746E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98476E1
iondef2_imon=9.9207E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.9783E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.61919E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.18601E0
ionrepsh_imon=9.0483E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.23217E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29656E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0597E2
lens4b_imon=1.99891E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.76366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53576E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.34507E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.10477E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58131E1
iondef1_imon=5.20181E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5004E1
iondef4_imon=5.13984E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67959E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.23166E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16558E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.39857E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92719E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=7.50538E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50071E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.99405E0
defgridb_imon=6.359E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33136E1
os_fil1_imon=9.41825E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60934E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30521E1
cs_fil1_imon=9.23193E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28361E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62883E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.75896E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.16252E-2
chamber_ion_pmon=2.15441E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92929E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.42E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80026E1	-1.35899E-3	-8.80002E1	7.15256E-5	5.50747E-3	9.36508E-2	1.56775E1	-1.98198E1	-2.00251E1	1.4989E1	2.15894E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.17444E-2
2.0E0	1.53E2	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80025E1	-1.40667E-3	-8.8E1	1.66893E-4	5.31673E-3	9.35078E-2	1.58528E1	-1.98697E1	-2.00475E1	1.5031E1	2.14771E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16313E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80025E1	-1.0252E-3	-8.80003E1	-7.15256E-5	4.93526E-3	9.32932E-2	1.58047E1	-1.98747E1	-1.99176E1	1.50244E1	2.15029E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.17337E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80024E1	-1.26362E-3	-8.80004E1	1.90735E-4	5.05447E-3	9.32932E-2	1.57885E1	-1.98322E1	-1.98953E1	1.5012E1	2.15441E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.18104E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80023E1	-1.14441E-3	-8.80003E1	1.43051E-4	5.126E-3	9.32932E-2	1.58356E1	-1.98369E1	-1.99313E1	1.50178E1	2.15808E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.15883E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80023E1	-1.23978E-3	-8.80006E1	-2.38419E-5	5.36442E-3	9.35793E-2	1.58026E1	-1.98312E1	-1.99028E1	1.50136E1	2.15533E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.16252E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80023E1	-1.09673E-3	-8.80006E1	2.38419E-5	5.17368E-3	9.34124E-2	1.57374E1	-1.98681E1	-2.00261E1	1.5028E1	2.156E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.15994E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80023E1	-1.0252E-3	-8.80003E1	4.76837E-5	5.24521E-3	9.34839E-2	1.58323E1	-1.98374E1	-2.00447E1	1.50004E1	2.15051E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16125E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80023E1	-1.14441E-3	-8.80004E1	0.0E0	5.4121E-3	9.34124E-2	1.58297E1	-1.98541E1	-2.00629E1	1.49974E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80028E1	-9.29832E-4	-8.80003E1	2.38419E-4	5.26905E-3	9.3317E-2	1.58347E1	-1.98687E1	-1.99083E1	1.49976E1	2.15758E-9	2.5208E-3	2.5208E-3	6.31283E-3	2.16468E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.45602E-2	-8.80026E1	-9.53674E-4	-8.80005E1	-9.53674E-5	5.10216E-3	9.34124E-2	1.57795E1	-1.98639E1	-2.00742E1	1.50072E1					
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80028E1	-9.29832E-4	-8.80003E1	-1.19209E-4	5.14984E-3	9.34601E-2	1.58065E1	-1.98579E1	-1.98669E1	1.50154E1	2.15982E-9	2.5147E-3	2.5147E-3	6.30182E-3	2.17145E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80029E1	-1.19209E-3	-8.80003E1	-7.15256E-5	5.24521E-3	9.33647E-2	1.57981E1	-1.9844E1	-1.98098E1	1.50022E1	2.15238E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16878E-2
1.7E1	3.7E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80026E1	-7.86781E-4	-8.80005E1	-7.15256E-5	5.14984E-3	9.35793E-2	1.57861E1	-1.98338E1	-1.99474E1	1.5013E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16878E-2
1.8E1	1.67E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80028E1	-7.39098E-4	-8.80002E1	-7.15256E-5	4.86374E-3	9.36985E-2	1.58335E1	-1.98891E1	-1.98783E1	1.5014E1	2.15519E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.16501E-2
1.9E1	3.46E2	1.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80028E1	-1.0252E-3	-8.80001E1	-4.76837E-5	5.14984E-3	9.34839E-2	1.58486E1	-1.98501E1	-2.00363E1	1.50016E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80027E1	-1.00136E-3	-8.8E1	-2.38419E-4	5.38826E-3	9.34601E-2	1.57843E1	-1.98659E1	-1.99514E1	1.50196E1	2.159E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.18104E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.52559E-2	-8.80023E1	-1.0252E-3	-8.80001E1	-4.29153E-4	5.17368E-3	9.3627E-2	1.57831E1	-1.98446E1	-1.99602E1	1.49608E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.48695E-2	-8.80025E1	-8.34465E-4	-8.8E1	-9.53674E-5	4.91142E-3	9.31978E-2	1.57601E1	-1.98423E1	-2.00169E1	1.50178E1	2.15073E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.16252E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.48695E-2	-8.80026E1	-1.0252E-3	-8.80002E1	-1.90735E-4	5.03063E-3	9.35793E-2	1.58131E1	-1.98476E1	-1.98711E1	1.5004E1	2.15441E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.16252E-2