[Scan]
initial_time=2016-01-28T15:53:57
final_time=2016-01-28T15:54:17
ip_count=19
run=1026
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.7856E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.44572E-10
ql2_vset=
ql2_vmon=-1.40667E-3
ql2_imon=1.30019E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.41201E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.42076E-8
mult1=-1.00432E-8
mult2=-2.71346E-9
rf_tmon=-4.76903E-3
rf_agc=3.27546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=5.98311E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.94955E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53536E1
cs_ef1b_imon=3.10663E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.23973E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05578E0
lens1_imon=1.31928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64417E1
os_ef1alow_imon=2.96049E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84509E1
cs_ef1a_imon=3.00968E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.02708E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.31359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15708E1
os_ea1_imon=2.41494E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25811E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=2.03979E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.44242E-9
tplens_vset=0.0E0
tplens_vmon=-1.63362E0
tplens_imon=-3.93075E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00511E1
iondef3_imon=8.78153E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99095E1
iondef2_imon=9.31146E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.18479E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=9.44484E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.10522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19081E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00374E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7114E1
cs_ef2a_imon=3.19085E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07019E0
os_ef2alow_imon=-2.80363E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70492E-1
os_ef2bup_imon=-5.323E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10899E1
os_restr2_imon=3.38015E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.10454E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5733E1
iondef1_imon=4.98912E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5016E1
iondef4_imon=5.09063E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.67619E-8
olens1_vset=0.0E0
olens1_vmon=1.00136E-3
olens1_imon=1.23197E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1726E0
cs_ionaccel_imon=-9.14106E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56505E1
einzel_imon=7.51092E-6
window_vset=0.0E0
window_vmon=2.13094E-1
window_imon=-1.05211E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86173E1
mask2_imon=-6.94723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50185E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.43063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07435E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60679E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30439E1
cs_fil1_imon=9.22487E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2711E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62854E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.80325E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96775E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.90462E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3658E-1
cs_fil2_imon=-2.94478E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21288E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.15425E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50697E-1
res40_imon=-2.41794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.51E2	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80026E1	-1.12057E-3	-8.8E1	1.19209E-4	5.03063E-3	9.35793E-2	1.58395E1	-1.98687E1	-2.01048E1	1.5016E1	2.15894E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.16689E-2
2.0E0	1.66E2	2.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80026E1	-1.14441E-3	-8.80002E1	-1.19209E-4	4.76837E-3	9.36031E-2	1.57614E1	-1.98326E1	-1.99654E1	1.49966E1	2.15706E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.16689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80028E1	-1.54972E-3	-8.80001E1	-1.19209E-4	4.76837E-3	9.34839E-2	1.58323E1	-1.98152E1	-1.99258E1	1.5019E1	2.15887E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80026E1	-1.12057E-3	-8.8E1	-7.15256E-5	4.88758E-3	9.37223E-2	1.57761E1	-1.98977E1	-2.00611E1	1.49974E1	2.15624E-9	2.52008E-3	2.52008E-3	6.30202E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80024E1	-1.45435E-3	-8.80001E1	-9.53674E-5	4.64916E-3	9.35316E-2	1.58392E1	-1.98393E1	-1.98877E1	1.50178E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80026E1	-1.12057E-3	-8.8E1	4.76837E-5	4.64916E-3	9.34124E-2	1.57695E1	-1.98826E1	-1.97541E1	1.50112E1	2.15613E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.17255E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80026E1	-1.57356E-3	-8.8E1	1.19209E-4	4.86374E-3	9.34601E-2	1.58191E1	-1.98835E1	-1.98995E1	1.501E1	2.158E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.8003E1	-1.21593E-3	-8.8E1	1.43051E-4	4.91142E-3	9.35555E-2	1.58185E1	-1.98621E1	-1.99852E1	1.50124E1	2.15425E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16125E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80027E1	-1.40667E-3	-8.79999E1	-1.90735E-4	5.00679E-3	9.34124E-2	1.57326E1	-1.98585E1	-2.00471E1	1.5016E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80026E1	-1.14441E-3	-8.79998E1	4.76837E-5	4.86374E-3	9.31978E-2	1.58377E1	-1.98687E1	-1.99408E1	1.49894E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.17633E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80028E1	-1.07288E-3	-8.79996E1	-2.14577E-4	5.07832E-3	9.34601E-2	1.57932E1	-1.98517E1	-1.98157E1	1.5025E1	2.15716E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.17732E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80026E1	-1.00136E-3	-8.8E1	-2.38419E-4	4.60148E-3	9.34362E-2	1.57753E1	-1.98404E1	-1.97455E1	1.50142E1	2.159E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16252E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80028E1	-1.3113E-3	-8.80002E1	7.15256E-5	4.88758E-3	9.37462E-2	1.5869E1	-1.98086E1	-1.98657E1	1.49836E1	2.15987E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.16501E-2
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80026E1	-1.45435E-3	-8.80003E1	-9.53674E-5	4.86374E-3	9.37462E-2	1.5792E1	-1.98948E1	-2.00045E1	1.5028E1	2.15706E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.16125E-2
1.8E1	2.05E2	1.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80025E1	-1.33514E-3	-8.80006E1	-9.53674E-5	4.74453E-3	9.36747E-2	1.58516E1	-1.98591E1	-1.98567E1	1.50082E1	2.158E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16125E-2
1.9E1	3.26E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80027E1	-1.40667E-3	-8.80003E1	7.15256E-5	4.55379E-3	9.32693E-2	1.58029E1	-1.98236E1	-1.99179E1	1.49938E1	2.159E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.17176E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80028E1	-1.07288E-3	-8.80003E1	-2.38419E-5	4.79221E-3	9.32455E-2	1.58474E1	-1.98741E1	-1.99438E1	1.50128E1	2.15696E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.16377E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80027E1	-1.23978E-3	-8.80001E1	-2.38419E-5	4.86374E-3	9.3627E-2	1.58297E1	-1.98222E1	-1.98653E1	1.5014E1	2.15533E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.16067E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80027E1	-1.40667E-3	-8.80003E1	7.15256E-5	4.98295E-3	9.34601E-2	1.57867E1	-1.98705E1	-1.99738E1	1.50136E1	2.15349E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80027E1	-1.40667E-3	-8.80003E1	-4.76837E-5	5.19753E-3	9.33886E-2	1.5733E1	-1.99095E1	-2.00511E1	1.5016E1	2.15425E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16313E-2