[Scan]
initial_time=2016-01-28T15:56:10
final_time=2016-01-28T15:56:30
ip_count=19
run=1026
dataset=1
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.84247E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.63204E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=1.22334E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.47589E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.42489E-8
mult1=-9.07816E-9
mult2=-2.70863E-9
rf_tmon=-3.70732E-3
rf_agc=3.30993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=6.1475E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.10207E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.24996E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05897E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64411E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.39331E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84464E1
cs_ef1a_imon=3.01102E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.02505E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=4.30381E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.41407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.67163E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.04351E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.42827E-9
tplens_vset=0.0E0
tplens_vmon=-1.63081E0
tplens_imon=-3.80294E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00357E1
iondef3_imon=8.71599E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98711E1
iondef2_imon=9.27521E-6
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=7.48456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=9.38494E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.1118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24797E0
os_ea2_imon=-9.81993E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.18061E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06325E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71166E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.36202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.0932E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57885E1
iondef1_imon=5.0173E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50509E1
iondef4_imon=5.25169E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.67803E-8
olens1_vset=0.0E0
olens1_vmon=1.09673E-3
olens1_imon=1.22736E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16084E0
cs_ionaccel_imon=-1.26789E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.5629E-1
window_imon=-1.11845E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.72495E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.48073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33199E1
os_fil1_imon=9.40897E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07074E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60882E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30519E1
cs_fil1_imon=9.22362E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.321E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62761E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74282E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17822E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06122E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.43285E-2	-8.80025E1	-1.09673E-3	-8.80001E1	3.57628E-4	4.86374E-3	9.34124E-2	1.57731E1	-1.98393E1	-2.00452E1	1.49974E1	2.15533E-9	2.52384E-3	2.52384E-3	6.35601E-3	2.16806E-2
2.0E0	1.58E2	0.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80028E1	-1.12057E-3	-8.8E1	2.38419E-5	5.24521E-3	9.34839E-2	1.58056E1	-1.9849E1	-2.00406E1	1.501E1	2.15613E-9	2.52977E-3	2.52977E-3	6.32386E-3	2.16595E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80026E1	-1.19209E-3	-8.80002E1	2.14577E-4	5.00679E-3	9.34839E-2	1.58313E1	-1.9844E1	-1.98759E1	1.50166E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.48695E-2	-8.80028E1	-1.33514E-3	-8.80001E1	2.38419E-5	4.88758E-3	9.34839E-2	1.58233E1	-1.98464E1	-2.0091E1	1.49883E1	2.15636E-9	2.51919E-3	2.51919E-3	6.31798E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.57198E-2	-8.80028E1	-8.82149E-4	-8.80003E1	-1.43051E-4	5.07832E-3	9.36031E-2	1.5759E1	-1.98621E1	-2.00531E1	1.50232E1	2.15425E-9	2.53196E-3	2.53196E-3	6.32936E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80028E1	-1.09673E-3	-8.79999E1	-3.33786E-4	5.14984E-3	9.34362E-2	1.57795E1	-1.98633E1	-2.0073E1	1.5007E1	2.15613E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.17066E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.48695E-2	-8.80029E1	-1.14441E-3	-8.8E1	2.38419E-4	5.126E-3	9.34124E-2	1.57662E1	-1.98585E1	-2.00483E1	1.50184E1	2.15706E-9	2.52867E-3	2.52867E-3	6.29645E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80027E1	-1.3113E-3	-8.80002E1	0.0E0	5.24521E-3	9.35555E-2	1.58274E1	-1.98487E1	-1.99066E1	1.50265E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.1575E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80027E1	-1.23978E-3	-8.80002E1	4.76837E-5	5.126E-3	9.34601E-2	1.58137E1	-1.98152E1	-1.98921E1	1.50058E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16501E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80028E1	-1.04904E-3	-8.80003E1	1.66893E-4	4.91142E-3	9.35555E-2	1.57738E1	-1.98551E1	-1.99059E1	1.49998E1	2.15716E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16252E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80028E1	-1.00136E-3	-8.80002E1	4.52995E-4	5.24521E-3	9.33647E-2	1.57985E1	-1.98552E1	-1.98959E1	1.50214E1	2.15505E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.16186E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80027E1	-1.00136E-3	-8.80004E1	5.00679E-4	5.26905E-3	9.34124E-2	1.58389E1	-1.9835E1	-1.9847E1	1.49854E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16313E-2
1.6E1	1.6E1	0.0E0	6.47E2	4.41E2	-7.48695E-2	-8.80028E1	-9.53674E-4	-8.80004E1	2.6226E-4	5.24521E-3	9.37939E-2	1.57939E1	-1.98777E1	-1.9844E1	1.5019E1	2.15624E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.15331E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80027E1	-1.12057E-3	-8.80003E1	7.15256E-5	5.03063E-3	9.34124E-2	1.58264E1	-1.98337E1	-1.98539E1	1.50058E1	2.158E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16125E-2
1.8E1	1.86E2	0.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80026E1	-1.40667E-3	-8.80003E1	2.38419E-5	5.05447E-3	9.3627E-2	1.58315E1	-1.9883E1	-1.99213E1	1.49866E1	2.15696E-9	2.5147E-3	2.5147E-3	6.34661E-3	2.16377E-2
1.9E1	3.47E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80028E1	-1.3113E-3	-8.80003E1	1.43051E-4	4.88758E-3	9.36508E-2	1.57525E1	-1.98517E1	-2.00393E1	1.49932E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.15883E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80028E1	-1.21593E-3	-8.79999E1	1.19209E-4	4.98295E-3	9.37939E-2	1.58424E1	-1.98392E1	-2.01361E1	1.50184E1	2.15613E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80027E1	-8.10623E-4	-8.80002E1	-1.43051E-4	4.74453E-3	9.35793E-2	1.59129E1	-1.99201E1	-1.99756E1	1.50166E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16125E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80027E1	-9.29832E-4	-8.80003E1	2.38419E-5	4.93526E-3	9.3627E-2	1.57961E1	-1.98487E1	-2.00175E1	1.50138E1	2.15349E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80028E1	-1.07288E-3	-8.80001E1	-1.19209E-4	4.91142E-3	9.377E-2	1.57885E1	-1.98711E1	-2.00357E1	1.50509E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17822E-2