[Scan]
initial_time=2016-01-28T15:57:04
final_time=2016-01-28T15:57:23
ip_count=19
run=1026
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.7947E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.40376E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.22875E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.44001E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.4278E-8
mult1=-1.01979E-8
mult2=-2.7266E-9
rf_tmon=-3.89958E-3
rf_agc=3.37241E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.03127E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62137E0
bslens_imon=2.55775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2049E1
lens5a_imon=1.98648E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04858E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.0901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04908E1
cs_ea1_imon=1.22985E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07328E0
lens1_imon=1.31629E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03898E1
cs_ea2_imon=1.38338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00973E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.02937E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.3277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.43495E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27965E0
cs_ionrep_imon=9.51803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93383E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.04279E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.38296E-9
tplens_vset=0.0E0
tplens_vmon=-1.62429E0
tplens_imon=-2.15344E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99985E1
iondef3_imon=8.84955E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98693E1
iondef2_imon=9.1691E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.98474E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.16309E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30413E0
ionrepsh_imon=9.34907E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33597E1
lens5b_imon=2.18335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22822E0
os_ea2_imon=-6.96503E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.10622E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58095E1
iondef1_imon=4.72113E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49829E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.68259E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.23377E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19141E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.33996E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.15998E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43419E0
defgridb_imon=5.93688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33165E1
os_fil1_imon=9.42288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30456E1
cs_fil1_imon=9.21631E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30764E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62472E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21376E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41272E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=273
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.41E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80027E1	-1.14441E-3	-8.80003E1	4.29153E-4	4.93526E-3	9.34124E-2	1.57945E1	-1.98557E1	-2.00308E1	1.50189E1	2.15696E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.17337E-2
2.0E0	1.4E2	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80027E1	-1.4782E-3	-8.80005E1	1.43051E-4	4.98295E-3	9.33886E-2	1.57886E1	-1.9898E1	-2.00953E1	1.50178E1	2.15658E-9	2.52262E-3	2.52262E-3	6.32784E-3	2.15731E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80025E1	-1.33514E-3	-8.80004E1	1.66893E-4	4.98295E-3	9.30786E-2	1.57843E1	-1.98641E1	-1.99266E1	1.50213E1	2.1556E-9	2.52502E-3	2.52502E-3	6.32518E-3	2.16787E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80023E1	-1.00136E-3	-8.80005E1	4.52995E-4	4.72069E-3	9.36031E-2	1.58128E1	-1.98649E1	-1.99419E1	1.5019E1	2.159E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80025E1	-1.04904E-3	-8.80004E1	2.38419E-4	5.03063E-3	9.36508E-2	1.58007E1	-1.98655E1	-1.99585E1	1.50076E1	2.15907E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.16011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80028E1	-1.28746E-3	-8.80002E1	2.6226E-4	5.05447E-3	9.36031E-2	1.58351E1	-1.98346E1	-1.99213E1	1.5004E1	2.15791E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.1676E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80028E1	-1.00136E-3	-8.8E1	7.15256E-5	5.29289E-3	9.36985E-2	1.58107E1	-1.98723E1	-1.98248E1	1.50214E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80026E1	-1.50204E-3	-8.80005E1	1.19209E-4	4.8399E-3	9.3627E-2	1.57819E1	-1.98513E1	-2.00706E1	1.4992E1	2.15332E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.16125E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80023E1	-1.28746E-3	-8.80004E1	4.76837E-5	5.34058E-3	9.37462E-2	1.58474E1	-1.98639E1	-2.00513E1	1.49974E1	2.15425E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.16313E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80025E1	-1.07288E-3	-8.80002E1	1.19209E-4	5.4121E-3	9.37223E-2	1.57696E1	-1.98641E1	-1.98765E1	1.50016E1	2.158E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.1575E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80027E1	-8.58307E-4	-8.80004E1	4.76837E-5	5.34058E-3	9.38416E-2	1.57716E1	-1.98543E1	-1.98747E1	1.50322E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.16067E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80026E1	-1.21593E-3	-8.80003E1	2.38419E-5	5.29289E-3	9.3627E-2	1.58546E1	-1.98502E1	-1.98612E1	1.49914E1	2.15425E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.14815E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80026E1	-1.00136E-3	-8.80004E1	-4.76837E-5	5.43594E-3	9.37223E-2	1.57796E1	-1.98328E1	-1.98617E1	1.5022E1	2.158E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.15189E-2
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80024E1	-1.0252E-3	-8.80002E1	-4.76837E-5	5.126E-3	9.37223E-2	1.57949E1	-1.9824E1	-1.98393E1	1.50068E1	2.15706E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.16501E-2
1.8E1	2.01E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-1.04904E-3	-8.80003E1	1.90735E-4	5.31673E-3	9.37223E-2	1.57955E1	-1.98546E1	-1.97892E1	1.49914E1	2.15624E-9	2.52492E-3	2.52492E-3	6.29665E-3	2.16252E-2
1.9E1	3.48E2	2.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80019E1	-1.3113E-3	-8.80002E1	1.19209E-4	4.95911E-3	9.34601E-2	1.5783E1	-1.98594E1	-1.97461E1	1.50166E1	2.16085E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16436E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.8002E1	-1.3113E-3	-8.80002E1	2.14577E-4	5.17368E-3	9.35793E-2	1.58451E1	-1.98576E1	-1.97862E1	1.50076E1	2.15696E-9	2.52921E-3	2.52921E-3	6.31299E-3	2.1676E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80024E1	-1.19209E-3	-8.80002E1	-4.76837E-5	5.57899E-3	9.35078E-2	1.58425E1	-1.98903E1	-1.9838E1	1.50142E1	2.159E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80023E1	-1.21593E-3	-8.80003E1	2.86102E-4	5.57899E-3	9.39608E-2	1.57608E1	-1.98627E1	-1.99438E1	1.50236E1	2.15753E-9	2.51498E-3	2.51498E-3	6.31014E-3	2.17822E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80024E1	-1.04904E-3	-8.80002E1	1.19209E-4	5.126E-3	9.35793E-2	1.58095E1	-1.98693E1	-1.99985E1	1.49829E1