[Scan]
initial_time=2016-01-28T15:57:30
final_time=2016-01-28T15:57:50
ip_count=19
run=1026
dataset=1
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.81026E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.15747E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.25372E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.39833E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.43191E-8
mult1=-9.51162E-9
mult2=-2.66671E-9
rf_tmon=-4.04378E-3
rf_agc=3.39885E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.33407E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64757E0
bslens_imon=2.44099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19991E1
lens5a_imon=1.97664E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53726E1
cs_ef1b_imon=3.09207E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.01991E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04925E1
cs_ea1_imon=1.25295E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05021E0
lens1_imon=1.3891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.40322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.01691E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.02421E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11314E1
os_restr1_imon=4.31143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.43701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6354E1
os_ef1bup_imon=3.06657E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26064E0
cs_ionrep_imon=9.63344E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93451E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01793E1
cs_anode1_imon=2.04216E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.38452E-9
tplens_vset=0.0E0
tplens_vmon=-1.61753E0
tplens_imon=-2.5362E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99149E1
iondef3_imon=8.93332E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98771E1
iondef2_imon=9.33632E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98387E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.43132E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25267E0
ionrepsh_imon=9.29875E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33737E1
lens5b_imon=2.17916E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74719E1
cs_ef2b_imon=3.12261E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21624E0
os_ea2_imon=-7.01014E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.1716E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05847E0
os_ef2alow_imon=-2.68375E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81392E-1
os_ef2bup_imon=-5.38486E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10866E1
os_restr2_imon=3.36185E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.3027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0186E1
cs_anode2_imon=2.09887E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58564E1
iondef1_imon=4.91361E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50053E1
iondef4_imon=5.28536E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.68378E-8
olens1_vset=0.0E0
olens1_vmon=1.09673E-3
olens1_imon=1.23161E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1609E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47173E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56316E1
einzel_imon=7.59724E-6
window_vset=0.0E0
window_vmon=1.77181E-1
window_imon=-9.95979E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86417E1
mask2_imon=-6.00039E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.11301E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.68611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.23254E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28775E0
defgridb_imon=6.12942E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33193E1
os_fil1_imon=9.40401E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06736E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60747E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30463E1
cs_fil1_imon=9.23742E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34295E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63134E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74777E-2
os_fil2_imon=-2.63863E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81848E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.00163E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33268E-1
cs_fil2_imon=-2.46526E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34873E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19524E-1
res40_imon=-2.45894E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.28E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80024E1	-8.10623E-4	-8.80002E1	3.8147E-4	4.72069E-3	9.35078E-2	1.58147E1	-1.98684E1	-2.00756E1	1.50029E1	2.15913E-9	2.52405E-3	2.52405E-3	6.3126E-3	2.1667E-2
2.0E0	1.68E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80024E1	-1.12057E-3	-8.80005E1	1.90735E-4	5.14984E-3	9.35555E-2	1.57902E1	-1.98625E1	-1.98313E1	1.50201E1	2.15587E-9	2.51725E-3	2.51725E-3	6.30171E-3	2.16639E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80025E1	-1.00136E-3	-8.80004E1	2.86102E-4	4.69685E-3	9.32932E-2	1.57837E1	-1.98501E1	-1.98753E1	1.50346E1	2.15817E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.16736E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80024E1	-7.15256E-4	-8.80003E1	3.33786E-4	4.93526E-3	9.31263E-2	1.58041E1	-1.98681E1	-1.99179E1	1.49812E1	2.15332E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15938E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80025E1	-8.58307E-4	-8.80001E1	1.19209E-4	4.95911E-3	9.37462E-2	1.58107E1	-1.9844E1	-1.98561E1	1.50256E1	2.16081E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16125E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80023E1	-7.62939E-4	-8.79998E1	-2.38419E-5	4.95911E-3	9.34124E-2	1.57778E1	-1.988E1	-1.99089E1	1.50028E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80025E1	-1.0252E-3	-8.80005E1	1.19209E-4	4.98295E-3	9.37223E-2	1.57777E1	-1.98627E1	-1.99516E1	1.50058E1	2.15894E-9	2.52538E-3	2.52538E-3	6.3514E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80025E1	-1.09673E-3	-8.80004E1	1.43051E-4	4.8399E-3	9.34124E-2	1.58445E1	-1.98387E1	-2.01437E1	1.50091E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.15938E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80027E1	-8.58307E-4	-8.80004E1	3.57628E-4	4.98295E-3	9.34124E-2	1.57989E1	-1.98943E1	-2.00014E1	1.50172E1	2.159E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.16806E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.8003E1	-9.53674E-4	-8.80004E1	1.43051E-4	4.98295E-3	9.34601E-2	1.5782E1	-1.98499E1	-1.98175E1	1.4968E1	2.158E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.17633E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80023E1	-1.16825E-3	-8.80003E1	2.38419E-5	5.00679E-3	9.35316E-2	1.57999E1	-1.98987E1	-2.00375E1	1.50136E1	2.15987E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16878E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80023E1	-9.05991E-4	-8.80004E1	1.66893E-4	5.17368E-3	9.32932E-2	1.57943E1	-1.98676E1	-1.99083E1	1.50201E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16878E-2
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80024E1	-7.15256E-4	-8.80002E1	1.66893E-4	5.10216E-3	9.34362E-2	1.58275E1	-1.98729E1	-2.00982E1	1.4991E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.17547E-2
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80026E1	-1.00136E-3	-8.80006E1	-1.43051E-4	5.126E-3	9.36031E-2	1.57392E1	-1.98507E1	-2.01469E1	1.50126E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16313E-2
1.8E1	1.81E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80026E1	-1.07288E-3	-8.80005E1	-2.14577E-4	5.07832E-3	9.34839E-2	1.58347E1	-1.98537E1	-2.00694E1	1.50358E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.15563E-2
1.9E1	3.72E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80027E1	-9.53674E-4	-8.80004E1	-4.76837E-5	5.10216E-3	9.34124E-2	1.57654E1	-1.98794E1	-2.01431E1	1.5001E1	2.15051E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16125E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80025E1	-1.33514E-3	-8.8E1	-2.6226E-4	5.05447E-3	9.35316E-2	1.58299E1	-1.98603E1	-2.00988E1	1.501E1	2.15073E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.15883E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-1.26362E-3	-8.80003E1	3.33786E-4	4.95911E-3	9.36031E-2	1.57885E1	-1.98617E1	-1.9985E1	1.50028E1	2.158E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.1839E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80026E1	-1.21593E-3	-8.80003E1	3.09944E-4	5.36442E-3	9.3627E-2	1.5768E1	-1.98543E1	-1.99336E1	1.50306E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16806E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80024E1	-1.0252E-3	-8.80001E1	-2.38419E-5	5.26905E-3	9.37223E-2	1.58564E1	-1.98771E1	-1.99149E1	1.50053E1	2.15519E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.15938E-2