[Scan]
initial_time=2016-01-28T15:57:57
final_time=2016-01-28T15:58:16
ip_count=19
run=1026
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.79718E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.44953E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.21824E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.46101E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.42624E-8
mult1=-9.57182E-9
mult2=-2.7266E-9
rf_tmon=-4.41028E-3
rf_agc=3.30452E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=6.10375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61402E0
bslens_imon=2.53938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20135E1
lens5a_imon=1.99162E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.12434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=1.24931E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.52564E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.95387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03978E1
cs_ea2_imon=1.39366E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=3.00973E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=1.02781E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15232E1
os_ea1_imon=2.40189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28822E0
cs_ionrep_imon=9.67964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=2.04459E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.38777E-9
tplens_vset=0.0E0
tplens_vmon=-1.62613E0
tplens_imon=-2.52073E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.01619E1
iondef3_imon=8.61448E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98386E1
iondef2_imon=9.28663E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98394E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.21841E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27046E0
ionrepsh_imon=9.12135E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33474E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.10956E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24781E0
os_ea2_imon=-6.12025E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00604E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.76006E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.54592E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.38202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.09072E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58395E1
iondef1_imon=4.82397E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49998E1
iondef4_imon=5.04253E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.6827E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.23242E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.04097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.38933E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.13795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.71188E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=6.89553E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=6.01769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33193E1
os_fil1_imon=9.37423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30502E1
cs_fil1_imon=9.22815E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37671E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.627E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15441E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4848E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.23E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80023E1	-8.82149E-4	-8.80003E1	7.15256E-5	5.14984E-3	9.35316E-2	1.58162E1	-1.98629E1	-1.98647E1	1.5016E1	2.158E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16501E-2
2.0E0	1.64E2	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80023E1	-1.04904E-3	-8.80004E1	-1.19209E-4	4.91142E-3	9.35793E-2	1.58228E1	-1.98845E1	-1.9819E1	1.50047E1	2.15987E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.15938E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80024E1	-9.77516E-4	-8.80007E1	-2.86102E-4	5.07832E-3	9.30548E-2	1.57495E1	-1.98629E1	-2.00469E1	1.50201E1	2.15409E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80025E1	-9.77516E-4	-8.80005E1	2.86102E-4	4.45843E-3	9.34362E-2	1.57896E1	-1.98541E1	-2.00753E1	1.5025E1	2.15533E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.15883E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80023E1	-9.05991E-4	-8.80001E1	-2.14577E-4	4.91142E-3	9.34601E-2	1.58251E1	-1.98771E1	-2.00796E1	1.49947E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80022E1	-8.10623E-4	-8.79999E1	-9.53674E-5	4.76837E-3	9.35316E-2	1.58077E1	-1.98879E1	-1.98915E1	1.50088E1	2.15665E-9	2.52189E-3	2.52189E-3	6.3074E-3	2.16189E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80021E1	-6.67572E-4	-8.80001E1	-7.15256E-5	5.17368E-3	9.34124E-2	1.57909E1	-1.9847E1	-1.98266E1	1.50166E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.8002E1	-1.04904E-3	-8.80001E1	9.53674E-5	5.05447E-3	9.34124E-2	1.58323E1	-1.98452E1	-2.00249E1	1.50022E1	2.15982E-9	2.51693E-3	2.51693E-3	6.31858E-3	2.16569E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80022E1	-7.86781E-4	-8.79998E1	-9.53674E-5	5.17368E-3	9.3627E-2	1.58059E1	-1.98314E1	-1.98783E1	1.49794E1	2.15987E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80019E1	-8.82149E-4	-8.80001E1	-3.09944E-4	4.93526E-3	9.34124E-2	1.5848E1	-1.98933E1	-2.00676E1	1.49632E1	2.15238E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16689E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-1.21593E-3	-8.80001E1	0.0E0	4.8399E-3	9.3627E-2	1.57324E1	-1.98334E1	-1.99272E1	1.50214E1	2.15624E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.16252E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.8002E1	-1.09673E-3	-8.80002E1	-2.38419E-5	4.8399E-3	9.34839E-2	1.57903E1	-1.98831E1	-2.00345E1	1.49764E1	2.15706E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17066E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80021E1	-1.12057E-3	-8.80002E1	2.86102E-4	5.36442E-3	9.33409E-2	1.57795E1	-1.98717E1	-1.99714E1	1.49974E1	2.15349E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16252E-2
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80024E1	-1.09673E-3	-8.79999E1	-1.19209E-4	5.22137E-3	9.3627E-2	1.58089E1	-1.98458E1	-1.99029E1	1.4986E1	2.15791E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.15994E-2
1.8E1	1.78E2	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80024E1	-9.53674E-4	-8.80002E1	1.19209E-4	4.95911E-3	9.37462E-2	1.57939E1	-1.9844E1	-1.9832E1	1.49758E1	2.158E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.15938E-2
1.9E1	3.76E2	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80023E1	-1.19209E-3	-8.79999E1	6.19888E-4	4.8399E-3	9.3627E-2	1.57915E1	-1.98591E1	-2.00303E1	1.49734E1	2.15992E-9	2.53031E-3	2.53031E-3	6.31817E-3	2.15148E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.8002E1	-9.29832E-4	-8.8E1	4.76837E-5	5.10216E-3	9.35793E-2	1.57997E1	-1.98883E1	-2.01048E1	1.50068E1	2.15505E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.16377E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80022E1	-7.39098E-4	-8.80004E1	3.8147E-4	5.03063E-3	9.34124E-2	1.58309E1	-1.98776E1	-1.99838E1	1.49926E1	2.15533E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17176E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80024E1	-1.19209E-3	-8.80004E1	0.0E0	4.673E-3	9.35078E-2	1.57713E1	-1.98623E1	-2.00635E1	1.5001E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16991E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80023E1	-1.12057E-3	-8.80003E1	-4.76837E-5	4.95911E-3	9.38892E-2	1.58395E1	-1.98386E1	-2.01619E1	1.49998E1	2.15441E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.16806E-2