[Scan]
initial_time=2016-01-28T15:58:24
final_time=2016-01-28T15:58:43
ip_count=19
run=1026
dataset=1
scan=37
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82139E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.55408E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.21977E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.42493E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.43273E-8
mult1=-9.39121E-9
mult2=-2.79047E-9
rf_tmon=-5.01712E-3
rf_agc=3.27388E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.07443E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53687E1
cs_ef1b_imon=3.08836E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05288E1
cs_ea1_imon=1.24514E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0696E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6452E1
os_ef1alow_imon=2.96646E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.41205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.00134E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.02333E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11056E1
os_restr1_imon=4.3115E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1581E1
os_ea1_imon=2.42576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63712E1
os_ef1bup_imon=3.05825E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.72242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.05544E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.39843E-9
tplens_vset=0.0E0
tplens_vmon=-1.63963E0
tplens_imon=-4.36334E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98753E1
iondef3_imon=8.79595E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98645E1
iondef2_imon=9.32948E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.17144E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=9.41961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74777E1
cs_ef2b_imon=3.12031E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23107E0
os_ea2_imon=-9.19398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06833E0
os_ef2alow_imon=-2.5753E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52544E-1
os_ef2bup_imon=-5.27787E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.35972E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01852E1
cs_anode2_imon=2.10538E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57566E1
iondef1_imon=5.13332E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49794E1
iondef4_imon=5.33044E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.67861E-8
olens1_vset=0.0E0
olens1_vmon=1.7643E-3
olens1_imon=1.22545E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13198E0
cs_ionaccel_imon=-1.22035E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.56666E-6
window_vset=0.0E0
window_vmon=1.9054E-1
window_imon=-1.00737E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86522E1
mask2_imon=-7.76041E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.25664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.81683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.88029E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.43681E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30502E1
cs_fil1_imon=9.22383E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30884E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6268E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.59695E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.05801E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35786E-1
cs_fil2_imon=-2.47455E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.97538E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21316E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.15563E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24515E-1
res40_imon=-2.47249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.33E2	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80026E1	-1.21593E-3	-8.79999E1	1.90735E-4	4.98295E-3	9.38177E-2	1.57452E1	-1.98573E1	-2.00057E1	1.49904E1	2.15238E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.17255E-2
2.0E0	1.67E2	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80028E1	-8.58307E-4	-8.79999E1	3.57628E-4	5.00679E-3	9.36508E-2	1.58467E1	-1.98698E1	-1.99549E1	1.50384E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80027E1	-9.77516E-4	-8.79999E1	2.14577E-4	4.8399E-3	9.35793E-2	1.58061E1	-1.98468E1	-2.00739E1	1.49843E1	2.15894E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80025E1	-1.09673E-3	-8.8E1	2.6226E-4	4.93526E-3	9.34362E-2	1.57955E1	-1.9847E1	-1.99254E1	1.50106E1	2.16269E-9	2.52236E-3	2.52236E-3	6.29684E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80025E1	-1.3113E-3	-8.80002E1	1.90735E-4	4.79221E-3	9.37223E-2	1.5802E1	-1.98392E1	-1.9811E1	1.5037E1	2.159E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80028E1	-1.12057E-3	-8.80003E1	9.53674E-5	5.00679E-3	9.38892E-2	1.57963E1	-1.98597E1	-1.99924E1	1.49944E1	2.15505E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.15994E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80026E1	-1.09673E-3	-8.80002E1	3.09944E-4	4.86374E-3	9.37939E-2	1.58345E1	-1.98588E1	-1.99596E1	1.5004E1	2.15808E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80028E1	-1.21593E-3	-8.8E1	1.19209E-4	4.95911E-3	9.38654E-2	1.57934E1	-1.98667E1	-1.98343E1	1.50022E1	2.158E-9	2.52977E-3	2.52977E-3	6.30192E-3	2.16501E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80028E1	-1.14441E-3	-8.80003E1	-7.15256E-5	4.79221E-3	9.34601E-2	1.57975E1	-1.9832E1	-1.98615E1	1.49991E1	2.15894E-9	2.52647E-3	2.52647E-3	6.36244E-3	2.1839E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80027E1	-1.09673E-3	-8.80001E1	-2.38419E-5	4.93526E-3	9.36985E-2	1.57873E1	-1.98482E1	-1.98145E1	1.50213E1	2.15791E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.16377E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80027E1	-1.04904E-3	-8.80003E1	-2.6226E-4	4.93526E-3	9.35793E-2	1.58558E1	-1.98845E1	-1.9863E1	1.501E1	2.16085E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.15699E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80025E1	-8.10623E-4	-8.80003E1	-4.76837E-5	5.03063E-3	9.36747E-2	1.5746E1	-1.98611E1	-1.9962E1	1.50334E1	2.15613E-9	2.51334E-3	2.51334E-3	6.29098E-3	2.17066E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80025E1	-1.04904E-3	-8.80001E1	7.15256E-5	5.00679E-3	9.34601E-2	1.58179E1	-1.99132E1	-2.00149E1	1.50274E1	2.158E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16125E-2
1.7E1	6.4E1	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80027E1	-9.53674E-4	-8.80004E1	2.86102E-4	4.95911E-3	9.33886E-2	1.57826E1	-1.98552E1	-2.01732E1	1.501E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16878E-2
1.8E1	1.98E2	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80026E1	-1.28746E-3	-8.80002E1	0.0E0	5.24521E-3	9.33647E-2	1.5812E1	-1.98281E1	-2.01148E1	1.50226E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17822E-2
1.9E1	3.25E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80025E1	-1.16825E-3	-8.80003E1	1.66893E-4	4.91142E-3	9.33886E-2	1.57723E1	-1.98711E1	-1.99372E1	1.49831E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16252E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80025E1	-1.04904E-3	-8.8E1	-4.76837E-5	4.98295E-3	9.35555E-2	1.57826E1	-1.986E1	-1.98257E1	1.50058E1	2.159E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.16991E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80023E1	-7.39098E-4	-8.80001E1	-2.6226E-4	4.93526E-3	9.35078E-2	1.57867E1	-1.98621E1	-1.98314E1	1.50142E1	2.15613E-9	2.51443E-3	2.51443E-3	6.28006E-3	2.16501E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-1.23978E-3	-8.80003E1	1.90735E-4	4.86374E-3	9.35793E-2	1.58822E1	-1.98204E1	-1.98015E1	1.50178E1	2.15808E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.15883E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80026E1	-1.21593E-3	-8.80005E1	7.15256E-5	5.24521E-3	9.3627E-2	1.57566E1	-1.98645E1	-1.98753E1	1.49794E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.15563E-2