[Scan]
initial_time=2016-01-28T15:59:43
final_time=2016-01-28T16:00:03
ip_count=19
run=1026
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82784E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.63419E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.25055E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.44606E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.42936E-8
mult1=-9.94144E-9
mult2=-2.70566E-9
rf_tmon=-4.14207E-3
rf_agc=3.36528E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.42824E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65688E0
bslens_imon=2.45491E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.9975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.0485E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53331E1
cs_ef1b_imon=3.10752E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02066E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.23499E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06165E0
lens1_imon=1.4632E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64259E1
os_ef1alow_imon=2.96381E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03849E1
cs_ea2_imon=1.3988E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84494E1
cs_ef1a_imon=3.01807E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.02845E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11086E1
os_restr1_imon=4.29167E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15153E1
os_ea1_imon=2.43495E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.08544E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26312E0
cs_ionrep_imon=9.65026E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93269E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.03976E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.41518E-9
tplens_vset=0.0E0
tplens_vmon=-1.62429E0
tplens_imon=-3.73282E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00614E1
iondef3_imon=8.69161E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98514E1
iondef2_imon=9.34907E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98408E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.28922E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27169E0
ionrepsh_imon=9.38213E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.12287E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24108E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70877E1
cs_ef2a_imon=3.17115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09261E0
os_ef2alow_imon=-2.55186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70186E-1
os_ef2bup_imon=-5.4561E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10843E1
os_restr2_imon=3.36875E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29818E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01628E1
cs_anode2_imon=2.09029E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5813E1
iondef1_imon=5.10312E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5025E1
iondef4_imon=5.22522E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.68899E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.22815E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-1.19705E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55975E1
einzel_imon=7.53814E-6
window_vset=0.0E0
window_vmon=1.75181E-1
window_imon=-1.02863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86475E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=8.11863E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.55027E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.33629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.38465E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07111E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30522E1
cs_fil1_imon=9.2143E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3182E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50225E-2
os_fil2_imon=-2.63131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97206E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66146E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2149E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.11256E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37355E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80029E1	-9.53674E-4	-8.80002E1	-9.53674E-5	5.22137E-3	9.36031E-2	1.58365E1	-1.98527E1	-2.0019E1	1.50265E1	2.15791E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.16186E-2
2.0E0	1.69E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80028E1	-1.09673E-3	-8.80004E1	-4.29153E-4	4.95911E-3	9.38177E-2	1.58079E1	-1.98778E1	-1.98641E1	1.5044E1	2.15817E-9	2.51077E-3	2.51077E-3	6.33919E-3	2.171E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80027E1	-1.26362E-3	-8.80004E1	-3.33786E-4	5.00679E-3	9.35316E-2	1.57808E1	-1.98582E1	-2.01166E1	1.50161E1	2.16074E-9	2.51725E-3	2.51725E-3	6.3131E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80029E1	-9.29832E-4	-8.80005E1	1.19209E-4	5.17368E-3	9.33647E-2	1.57832E1	-1.98643E1	-2.01412E1	1.50328E1	2.159E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16806E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80026E1	-1.14441E-3	-8.80004E1	-2.38419E-4	5.24521E-3	9.32455E-2	1.58522E1	-1.98496E1	-1.98863E1	1.49938E1	2.15808E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80027E1	-1.04904E-3	-8.80003E1	1.43051E-4	4.88758E-3	9.3317E-2	1.57476E1	-1.98476E1	-1.99065E1	1.50118E1	2.14958E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80027E1	-1.16825E-3	-8.80001E1	7.15256E-5	5.05447E-3	9.33647E-2	1.58089E1	-1.98861E1	-2.00459E1	1.50298E1	2.14585E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80026E1	-1.26362E-3	-8.80003E1	-2.38419E-4	5.03063E-3	9.3317E-2	1.57985E1	-1.9867E1	-1.98747E1	1.50225E1	2.14678E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80028E1	-1.21593E-3	-8.80003E1	-9.53674E-5	4.98295E-3	9.30548E-2	1.57735E1	-1.98711E1	-2.00219E1	1.50082E1	2.1425E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80024E1	-1.21593E-3	-8.80003E1	-4.76837E-5	5.17368E-3	9.33647E-2	1.57741E1	-1.98531E1	-2.0091E1	1.50112E1	2.11256E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.18011E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80023E1	-1.21593E-3	-8.80001E1	7.15256E-5	5.17368E-3	9.33409E-2	1.58209E1	-1.98588E1	-1.99514E1	1.4998E1	2.11256E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.16878E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.80025E1	-7.39098E-4	-8.8E1	1.90735E-4	5.17368E-3	9.33886E-2	1.57902E1	-1.98546E1	-1.99307E1	1.50202E1	2.11348E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.17066E-2
1.6E1	1.9E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80024E1	-9.05991E-4	-8.8E1	1.66893E-4	4.98295E-3	9.3174E-2	1.57909E1	-1.98723E1	-2.00051E1	1.50244E1	2.11256E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.16991E-2
1.7E1	3.7E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80028E1	-9.53674E-4	-8.80003E1	1.66893E-4	4.91142E-3	9.31501E-2	1.57818E1	-1.98777E1	-1.99983E1	1.50046E1	2.11348E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.16878E-2
1.8E1	1.87E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80025E1	-8.82149E-4	-8.80001E1	1.43051E-4	5.14984E-3	9.33647E-2	1.58087E1	-1.98643E1	-1.98857E1	1.50155E1	2.11256E-9	2.52362E-3	2.52362E-3	6.27954E-3	2.16186E-2
1.9E1	3.31E2	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80025E1	-1.12057E-3	-8.8E1	1.90735E-4	5.22137E-3	9.34362E-2	1.57837E1	-1.98623E1	-2.00723E1	1.50172E1	2.11343E-9	2.51575E-3	2.51575E-3	6.3074E-3	2.16313E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80024E1	-9.05991E-4	-8.80001E1	3.8147E-4	4.91142E-3	9.36031E-2	1.57909E1	-1.986E1	-1.98545E1	1.50041E1	2.11256E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.16621E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80024E1	-8.34465E-4	-8.80002E1	4.76837E-5	5.19753E-3	9.35793E-2	1.57926E1	-1.98535E1	-2.01012E1	1.50086E1	2.11443E-9	2.52473E-3	2.52473E-3	6.33538E-3	2.1676E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80025E1	-1.3113E-3	-8.80003E1	-9.53674E-5	4.98295E-3	9.31263E-2	1.57837E1	-1.986E1	-2.00676E1	1.50118E1	2.11256E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.1829E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80026E1	-9.53674E-4	-8.80003E1	2.86102E-4	5.24521E-3	9.32932E-2	1.5813E1	-1.98514E1	-2.00614E1	1.5025E1	2.11256E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17066E-2