[Scan]
initial_time=2016-01-28T16:01:03
final_time=2016-01-28T16:01:23
ip_count=19
run=1026
dataset=1
scan=43
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.84519E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.73397E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.23291E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.37182E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.42912E-8
mult1=-1.14381E-8
mult2=-2.67718E-9
rf_tmon=-2.34843E-3
rf_agc=3.60708E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.08349E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.96669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=3.111E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.25385E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09908E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64392E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.39048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=3.01045E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.02017E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.42221E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.56898E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93271E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.04747E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.37534E-9
tplens_vset=0.0E0
tplens_vmon=-1.59601E0
tplens_imon=-3.90912E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00393E1
iondef3_imon=8.8965E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98355E1
iondef2_imon=9.34954E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.13556E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=9.40263E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2285E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10381E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63186E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.36004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.10622E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57928E1
iondef1_imon=5.02792E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.6767E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.22659E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.0734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55985E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.30022E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.40372E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30474E1
cs_fil1_imon=9.22863E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28481E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16551E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21541E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.15331E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92328E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.08E2	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80027E1	-1.23978E-3	-8.80003E1	1.90735E-4	4.98295E-3	9.32693E-2	1.57668E1	-1.98573E1	-2.00904E1	1.49776E1	2.15992E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.15331E-2
2.0E0	1.77E2	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80026E1	-1.3113E-3	-8.80002E1	0.0E0	4.93526E-3	9.34601E-2	1.57783E1	-1.98428E1	-1.99071E1	1.49674E1	2.15332E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.15938E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80024E1	-1.14441E-3	-8.80001E1	1.19209E-4	4.98295E-3	9.32217E-2	1.58492E1	-1.98358E1	-1.99349E1	1.50132E1	2.15613E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80025E1	-1.14441E-3	-8.80002E1	1.66893E-4	5.31673E-3	9.32932E-2	1.5756E1	-1.98653E1	-2.00428E1	1.50202E1	2.15992E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.15883E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80024E1	-1.33514E-3	-8.80005E1	4.05312E-4	5.05447E-3	9.35316E-2	1.58425E1	-1.98428E1	-1.98633E1	1.4989E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80023E1	-1.16825E-3	-8.80003E1	2.86102E-4	5.19753E-3	9.32693E-2	1.57787E1	-1.98588E1	-1.99934E1	1.50118E1	2.15505E-9	2.53033E-3	2.53033E-3	6.34661E-3	2.17337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80026E1	-8.82149E-4	-8.80003E1	1.90735E-4	5.00679E-3	9.35793E-2	1.57903E1	-1.98416E1	-1.98561E1	1.49896E1	2.15519E-9	2.52209E-3	2.52209E-3	6.35692E-3	2.16313E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80023E1	-1.12057E-3	-8.80002E1	4.76837E-5	5.03063E-3	9.35316E-2	1.58089E1	-1.9844E1	-2.0085E1	1.50118E1	2.158E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.15189E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80025E1	-1.33514E-3	-8.80001E1	2.38419E-4	5.48363E-3	9.3627E-2	1.57891E1	-1.98416E1	-1.98933E1	1.49829E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16689E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80029E1	-1.12057E-3	-8.79999E1	-1.43051E-4	4.98295E-3	9.35078E-2	1.58305E1	-1.98508E1	-2.00341E1	1.50072E1	2.16081E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17444E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80026E1	-9.05991E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.33409E-2	1.5799E1	-1.9874E1	-1.98513E1	1.49932E1	2.16002E-9	2.52301E-3	2.52301E-3	6.3126E-3	2.1882E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80026E1	-1.43051E-3	-8.80002E1	4.76837E-5	5.10216E-3	9.35078E-2	1.57699E1	-1.98521E1	-1.98585E1	1.49877E1	2.15965E-9	2.51911E-3	2.51911E-3	6.32518E-3	2.17602E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80026E1	-1.12057E-3	-8.80002E1	1.19209E-4	4.79221E-3	9.34362E-2	1.57963E1	-1.98615E1	-1.97852E1	1.50316E1	2.15546E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.15831E-2
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80026E1	-1.33514E-3	-8.79999E1	4.29153E-4	5.29289E-3	9.32693E-2	1.59307E1	-1.98741E1	-1.99185E1	1.50033E1	2.15894E-9	2.50898E-3	2.50898E-3	6.30192E-3	2.16313E-2
1.8E1	1.67E2	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80027E1	-1.35899E-3	-8.8E1	9.53674E-5	4.81606E-3	9.33886E-2	1.57557E1	-1.98681E1	-1.99621E1	1.49973E1	2.15825E-9	2.51575E-3	2.51575E-3	6.3282E-3	2.17384E-2
1.9E1	3.28E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80028E1	-1.21593E-3	-8.8E1	1.66893E-4	4.74453E-3	9.36747E-2	1.5878E1	-1.98314E1	-2.00051E1	1.50232E1	2.15808E-9	2.51939E-3	2.51939E-3	6.3074E-3	2.1715E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80027E1	-8.58307E-4	-8.80001E1	3.8147E-4	4.8399E-3	9.34362E-2	1.57777E1	-1.98603E1	-1.99486E1	1.50611E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80026E1	-1.21593E-3	-8.80001E1	-1.90735E-4	4.93526E-3	9.34601E-2	1.58186E1	-1.98567E1	-1.99014E1	1.49935E1	2.15987E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80026E1	-1.12057E-3	-8.80003E1	9.53674E-5	4.86374E-3	9.34601E-2	1.57993E1	-1.98825E1	-1.99997E1	1.4992E1	2.15624E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80026E1	-1.21593E-3	-8.80001E1	-1.43051E-4	5.126E-3	9.33409E-2	1.57928E1	-1.98355E1	-2.00393E1	1.50196E1	2.159E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.15331E-2