[Scan]
initial_time=2016-01-28T16:02:23
final_time=2016-01-28T16:02:43
ip_count=19
run=1026
dataset=1
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82836E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.53048E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.20988E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.43614E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.43496E-8
mult1=-9.71631E-9
mult2=-2.57689E-9
rf_tmon=-5.5098E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=6.06668E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53528E1
cs_ef1b_imon=3.10172E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.01891E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=1.24642E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07312E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.96723E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.40747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.01067E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.02197E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.30312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=2.41478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=9.65747E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=2.03656E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.42313E-9
tplens_vset=0.0E0
tplens_vmon=-1.59837E0
tplens_imon=-3.87372E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00621E1
iondef3_imon=8.74076E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98651E1
iondef2_imon=9.42033E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.20196E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=9.20089E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.12709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24207E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00258E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.17262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41627E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10759E1
os_restr2_imon=3.35368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.0939E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58347E1
iondef1_imon=4.99253E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49956E1
iondef4_imon=5.28297E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67709E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.22939E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1898E0
cs_ionaccel_imon=-1.29569E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.56968E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92585E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.48781E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.39275E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07063E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30493E1
cs_fil1_imon=9.22704E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25381E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6253E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.95163E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.70973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21367E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88167E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.65E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80023E1	-1.16825E-3	-8.80002E1	-9.53674E-5	5.03063E-3	9.33647E-2	1.57939E1	-1.98783E1	-1.98969E1	1.49872E1	2.159E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.15515E-2
2.0E0	1.42E2	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80023E1	-1.52588E-3	-8.80002E1	1.19209E-4	5.19753E-3	9.31978E-2	1.58209E1	-1.98573E1	-1.99906E1	1.49966E1	2.15613E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.16313E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80024E1	-1.09673E-3	-8.80003E1	4.76837E-5	5.29289E-3	9.31978E-2	1.57658E1	-1.98585E1	-1.9983E1	1.50251E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80023E1	-1.0252E-3	-8.80004E1	-4.76837E-5	5.74589E-3	9.33409E-2	1.58413E1	-1.98326E1	-1.99378E1	1.50004E1	2.15546E-9	2.52765E-3	2.52765E-3	6.32328E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80026E1	-1.09673E-3	-8.80004E1	-7.15256E-5	5.76973E-3	9.3317E-2	1.57741E1	-1.98434E1	-1.99937E1	1.50256E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.15189E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80024E1	-1.40667E-3	-8.80003E1	-1.43051E-4	5.45979E-3	9.3317E-2	1.58299E1	-1.98573E1	-1.99408E1	1.50034E1	2.158E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.46377E-2	-8.80024E1	-1.3113E-3	-8.80002E1	0.0E0	5.43594E-3	9.28164E-2	1.58431E1	-1.98609E1	-1.99029E1	1.50172E1	2.15894E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.17444E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80025E1	-1.21593E-3	-8.80002E1	0.0E0	5.53131E-3	9.32693E-2	1.57566E1	-1.98458E1	-1.99714E1	1.4998E1	2.15613E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16501E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80024E1	-1.16825E-3	-8.79998E1	7.15256E-5	5.55515E-3	9.29832E-2	1.58203E1	-1.9847E1	-1.99961E1	1.5031E1	2.15808E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80027E1	-1.12057E-3	-8.79999E1	9.53674E-5	5.24521E-3	9.31978E-2	1.58323E1	-1.98338E1	-1.98837E1	1.5016E1	2.15706E-9	2.52373E-3	2.52373E-3	6.31563E-3	2.18011E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80024E1	-9.29832E-4	-8.79999E1	-2.38419E-5	5.24521E-3	9.30309E-2	1.57743E1	-1.98529E1	-2.00587E1	1.50057E1					
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80025E1	-1.28746E-3	-8.79998E1	2.38419E-5	5.38826E-3	9.31501E-2	1.58323E1	-1.98645E1	-1.98483E1	1.50298E1	2.15624E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.15699E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80025E1	-1.21593E-3	-8.8E1	-1.43051E-4	5.26905E-3	9.31263E-2	1.58044E1	-1.98653E1	-2.00198E1	1.49866E1	2.15894E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.16313E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80024E1	-1.33514E-3	-8.80002E1	-7.15256E-5	5.38826E-3	9.31501E-2	1.57666E1	-1.9867E1	-1.99136E1	1.50105E1	2.15349E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.16436E-2
1.8E1	2.02E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80023E1	-1.00136E-3	-8.80001E1	1.43051E-4	5.36442E-3	9.32932E-2	1.5812E1	-1.98788E1	-1.99349E1	1.50075E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17176E-2
1.9E1	3.11E2	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80025E1	-9.05991E-4	-8.80002E1	-9.53674E-5	5.36442E-3	9.33409E-2	1.58301E1	-1.99634E1	-2.00418E1	1.50208E1	2.16085E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.15883E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80025E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.05447E-3	9.36747E-2	1.58227E1	-1.98511E1	-1.99054E1	1.50046E1	2.15505E-9	2.51025E-3	2.51025E-3	6.29067E-3	2.1676E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80022E1	-8.10623E-4	-8.80002E1	-2.38419E-5	5.17368E-3	9.33886E-2	1.57674E1	-1.98705E1	-2.00357E1	1.50112E1	2.15441E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.17176E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80026E1	-9.05991E-4	-8.80003E1	-2.6226E-4	5.14984E-3	9.32693E-2	1.57879E1	-1.98736E1	-1.9873E1	1.50242E1	2.15716E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.16621E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80027E1	-1.0252E-3	-8.80001E1	9.53674E-5	4.8399E-3	9.34362E-2	1.58347E1	-1.98651E1	-2.00621E1	1.49956E1	2.15808E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.16067E-2