[Scan]
initial_time=2016-01-28T16:02:50
final_time=2016-01-28T16:03:09
ip_count=19
run=1026
dataset=1
scan=47
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79598E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.41222E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=1.30274E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.36538E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.4275E-8
mult1=-1.00313E-8
mult2=-2.70366E-9
rf_tmon=-4.02576E-3
rf_agc=3.37456E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=6.11234E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.10524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.24153E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06359E0
lens1_imon=1.27602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.40339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.01045E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.02841E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.41675E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.54939E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.03702E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.42441E-9
tplens_vset=0.0E0
tplens_vmon=-1.62882E0
tplens_imon=-4.94013E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98399E1
iondef3_imon=8.51477E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98257E1
iondef2_imon=9.30786E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.69215E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2533E0
ionrepsh_imon=9.33309E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.17579E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.35607E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.10009E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57566E1
iondef1_imon=5.06843E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5022E1
iondef4_imon=5.17948E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67677E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.22879E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-1.1635E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.45864E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=8.04612E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=5.63801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.52123E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33153E1
os_fil1_imon=9.39393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30509E1
cs_fil1_imon=9.22959E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28962E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62479E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.0116E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15257E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36177E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.23E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80023E1	-1.14441E-3	-8.80003E1	9.53674E-5	4.98295E-3	9.35555E-2	1.58451E1	-1.98741E1	-2.01083E1	1.5037E1	2.15624E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16067E-2
2.0E0	1.65E2	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80025E1	-1.12057E-3	-8.80001E1	-1.90735E-4	4.86374E-3	9.34839E-2	1.57879E1	-1.98771E1	-2.01089E1	1.50086E1	2.15894E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.1575E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80025E1	-1.0252E-3	-8.80003E1	2.14577E-4	4.8399E-3	9.33886E-2	1.58056E1	-1.98612E1	-2.01177E1	1.50503E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16067E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80026E1	-1.0252E-3	-8.80004E1	-2.38419E-5	4.98295E-3	9.36985E-2	1.5759E1	-1.98254E1	-1.99852E1	1.50076E1	2.15887E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.15994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80024E1	-1.19209E-3	-8.80003E1	-4.76837E-5	4.8399E-3	9.36985E-2	1.57725E1	-1.98405E1	-2.00133E1	1.49584E1	2.16036E-9	2.51647E-3	2.51647E-3	6.31012E-3	2.17309E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80025E1	-9.53674E-4	-8.80005E1	7.15256E-5	5.126E-3	9.34362E-2	1.57777E1	-1.9838E1	-1.9936E1	1.50091E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80021E1	-8.82149E-4	-8.80006E1	0.0E0	5.17368E-3	9.33647E-2	1.58137E1	-1.98446E1	-1.99642E1	1.50172E1	2.15992E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.18104E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80025E1	-1.26362E-3	-8.80001E1	7.15256E-5	5.05447E-3	9.34601E-2	1.57404E1	-1.98573E1	-1.99396E1	1.49999E1	2.15219E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.17337E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80025E1	-1.16825E-3	-8.79999E1	-2.38419E-5	5.43594E-3	9.33647E-2	1.57926E1	-1.98682E1	-1.99378E1	1.49902E1	2.15332E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80029E1	-1.35899E-3	-8.79999E1	9.53674E-5	5.24521E-3	9.32932E-2	1.58185E1	-1.98555E1	-1.99288E1	1.50148E1	2.15441E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.17732E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80031E1	-1.04904E-3	-8.8E1	-7.15256E-5	5.03063E-3	9.3317E-2	1.57795E1	-1.9838E1	-1.99714E1	1.50148E1	2.15706E-9	2.51116E-3	2.51116E-3	6.33486E-3	2.15563E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80025E1	-1.38283E-3	-8.80002E1	2.6226E-4	5.17368E-3	9.33886E-2	1.5843E1	-1.98594E1	-1.98673E1	1.49932E1	2.15613E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.16313E-2
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80028E1	-1.00136E-3	-8.80002E1	1.66893E-4	5.126E-3	9.33647E-2	1.57602E1	-1.98549E1	-2.00856E1	1.50058E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.15422E-2
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80028E1	-1.21593E-3	-8.80003E1	-7.15256E-5	4.79221E-3	9.34839E-2	1.58002E1	-1.98369E1	-2.01148E1	1.50178E1	2.158E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.17066E-2
1.8E1	1.65E2	1.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80025E1	-1.04904E-3	-8.80003E1	2.38419E-5	5.29289E-3	9.33886E-2	1.57811E1	-1.98214E1	-1.98606E1	1.5007E1	2.15441E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.16621E-2
1.9E1	3.53E2	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80024E1	-1.12057E-3	-8.80004E1	0.0E0	5.29289E-3	9.36031E-2	1.58192E1	-1.98748E1	-2.00571E1	1.50016E1	2.15309E-9	2.51498E-3	2.51498E-3	6.32017E-3	2.15993E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80025E1	-1.09673E-3	-8.80006E1	-2.38419E-5	5.72205E-3	9.35555E-2	1.57506E1	-1.98358E1	-1.99705E1	1.50065E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80024E1	-1.21593E-3	-8.80007E1	1.19209E-4	5.14984E-3	9.34601E-2	1.58238E1	-1.98846E1	-1.99489E1	1.50051E1	2.15938E-9	2.52204E-3	2.52204E-3	6.30097E-3	2.1646E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80026E1	-1.14441E-3	-8.80009E1	1.19209E-4	5.24521E-3	9.35078E-2	1.57825E1	-1.98495E1	-1.99991E1	1.49896E1	2.15726E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.16192E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80026E1	-1.26362E-3	-8.80003E1	9.53674E-5	5.05447E-3	9.36508E-2	1.57566E1	-1.98257E1	-1.98399E1	1.5022E1	2.15257E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.16806E-2