[Scan]
initial_time=2016-01-28T16:03:43
final_time=2016-01-28T16:04:03
ip_count=19
run=1026
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.88597E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.37443E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=1.20797E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.43656E-9
ql4_vset=
ql4_vmon=-4.05312E-4
ql4_imon=1.42915E-8
mult1=-8.95775E-9
mult2=-2.81842E-9
rf_tmon=-5.41967E-3
rf_agc=3.20718E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.03676E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.01902E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=1.25775E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10557E0
lens1_imon=1.52391E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0405E1
cs_ea2_imon=1.3972E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=3.00973E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.02548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.42965E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.68225E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02188E1
cs_anode1_imon=2.0381E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.44653E-9
tplens_vset=0.0E0
tplens_vmon=-1.60014E0
tplens_imon=-3.87372E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00784E1
iondef3_imon=8.80447E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98771E1
iondef2_imon=9.33538E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=7.86173E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=9.0947E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26685E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00343E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.35463E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.11198E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5771E1
iondef1_imon=5.07394E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5031E1
iondef4_imon=5.12182E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.67182E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23044E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16858E0
cs_ionaccel_imon=-1.21756E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.24005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.01707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33158E1
os_fil1_imon=9.40168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60585E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3049E1
cs_fil1_imon=9.23199E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27761E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96935E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.84617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.34E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80026E1	-5.00679E-4	-8.80001E1	-4.76837E-5	5.22137E-3	9.31501E-2	1.57508E1	-1.98492E1	-1.99726E1	1.4997E1	2.15808E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16806E-2
2.0E0	1.68E2	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80026E1	-1.00136E-3	-8.80002E1	-4.76837E-5	5.19753E-3	9.29832E-2	1.57929E1	-1.98709E1	-1.99065E1	1.49935E1	2.15349E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.15883E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80026E1	-1.28746E-3	-8.80002E1	-7.15256E-5	4.98295E-3	9.31025E-2	1.57461E1	-1.98405E1	-2.00833E1	1.50207E1	2.15685E-9	2.52407E-3	2.52407E-3	6.31879E-3	2.16443E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80029E1	-1.04904E-3	-8.8E1	-1.19209E-4	4.81606E-3	9.33886E-2	1.58161E1	-1.98621E1	-2.00952E1	1.49926E1	2.15997E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.17646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80028E1	-1.0252E-3	-8.8E1	-1.43051E-4	4.60148E-3	9.32693E-2	1.57702E1	-1.98764E1	-1.99362E1	1.50335E1	2.15706E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.17633E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80025E1	-1.0252E-3	-8.79999E1	1.66893E-4	4.88758E-3	9.36747E-2	1.57842E1	-1.98569E1	-1.98398E1	1.50175E1	2.15647E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80028E1	-1.23978E-3	-8.79999E1	-1.66893E-4	4.93526E-3	9.34362E-2	1.57873E1	-1.98499E1	-1.97774E1	1.50109E1	2.15505E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.17915E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80027E1	-9.29832E-4	-8.79999E1	7.15256E-5	5.10216E-3	9.36031E-2	1.58137E1	-1.98717E1	-1.98086E1	1.50094E1	2.15624E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.17547E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80026E1	-7.15256E-4	-8.8E1	-4.76837E-5	4.74453E-3	9.32455E-2	1.58224E1	-1.98386E1	-1.99226E1	1.50146E1	2.15706E-9	2.52647E-3	2.52647E-3	6.34588E-3	2.16313E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.48695E-2	-8.80024E1	-8.58307E-4	-8.80003E1	0.0E0	5.07832E-3	9.32455E-2	1.58228E1	-1.98894E1	-1.98992E1	1.49932E1	2.15937E-9	2.52248E-3	2.52248E-3	6.32197E-3	2.16757E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80025E1	-7.15256E-4	-8.80003E1	2.14577E-4	5.126E-3	9.31501E-2	1.57778E1	-1.98735E1	-1.98558E1	1.49866E1	2.15887E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.16569E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80023E1	-9.77516E-4	-8.80003E1	1.66893E-4	4.86374E-3	9.31025E-2	1.58317E1	-1.98428E1	-2.00736E1	1.50142E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.16806E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80023E1	-8.10623E-4	-8.80001E1	0.0E0	5.26905E-3	9.30071E-2	1.57446E1	-1.9841E1	-2.00327E1	1.49938E1	2.15519E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.15563E-2
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80021E1	-1.07288E-3	-8.80002E1	-1.19209E-4	5.07832E-3	9.32932E-2	1.58443E1	-1.98669E1	-1.98573E1	1.5007E1	2.16081E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.15563E-2
1.8E1	1.82E2	0.0E0	7.27E2	5.0E2	-7.51013E-2	-8.80023E1	-9.77516E-4	-8.80001E1	-1.66893E-4	4.95911E-3	9.32217E-2	1.57963E1	-1.98573E1	-1.98885E1	1.50028E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15563E-2
1.9E1	3.25E2	0.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80026E1	-1.16825E-3	-8.80001E1	-9.53674E-5	4.81606E-3	9.31025E-2	1.58451E1	-1.98747E1	-1.9775E1	1.49974E1	2.15987E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17633E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80024E1	-1.33514E-3	-8.80005E1	-4.29153E-4	5.03063E-3	9.3174E-2	1.58167E1	-1.98242E1	-1.99017E1	1.50369E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.18104E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80025E1	-1.26362E-3	-8.80006E1	-3.33786E-4	4.76837E-3	9.35316E-2	1.57525E1	-1.98936E1	-2.01136E1	1.50034E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.18201E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80023E1	-1.26362E-3	-8.80005E1	-2.38419E-4	5.03063E-3	9.35078E-2	1.5812E1	-1.98464E1	-2.01295E1	1.5008E1	2.15716E-9	2.519E-3	2.519E-3	6.31278E-3	2.17083E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80026E1	-1.26362E-3	-8.80005E1	-4.05312E-4	4.88758E-3	9.34362E-2	1.5771E1	-1.98771E1	-2.00784E1	1.5031E1