[Scan]
initial_time=2016-01-28T16:04:10
final_time=2016-01-28T16:04:29
ip_count=19
run=1026
dataset=1
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.80792E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.48542E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=1.21983E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.41225E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.43045E-8
mult1=-8.95775E-9
mult2=-2.58487E-9
rf_tmon=-5.23342E-3
rf_agc=3.34177E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.91433E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.98487E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.08685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=1.24694E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08642E0
lens1_imon=1.2652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0327E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.00829E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.02206E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10955E1
os_restr1_imon=4.3277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.4427E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.05154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93186E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.04531E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.40952E-9
tplens_vset=0.0E0
tplens_vmon=-1.64023E0
tplens_imon=-2.66901E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99384E1
iondef3_imon=8.88247E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98338E1
iondef2_imon=9.1961E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.07953E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=9.38356E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.09947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.1836E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.36544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.09685E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57981E1
iondef1_imon=4.76922E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=4.99928E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.67876E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.23395E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1812E0
cs_ionaccel_imon=-1.19233E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47042E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.85894E1
mask2_imon=-8.28332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.28405E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9366E3
defgrida_imon=6.20759E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.21841E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.40072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06867E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60771E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30486E1
cs_fil1_imon=9.20442E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33347E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62992E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.97938E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.99633E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33211E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.15566E-9
chamber_cvt_pmon=2.51935E-3
foreline_cvt_pmon=2.51935E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27167E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.37E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80023E1	-1.19209E-3	-8.80004E1	-7.15256E-5	5.38826E-3	9.35078E-2	1.58115E1	-1.98411E1	-1.98942E1	1.50277E1	2.15894E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17822E-2
2.0E0	1.36E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80023E1	-1.0252E-3	-8.80005E1	4.76837E-5	5.48363E-3	9.32455E-2	1.57909E1	-1.98588E1	-1.9931E1	1.4986E1	2.15285E-9	2.51935E-3	2.51935E-3	6.32112E-3	2.16784E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80026E1	-1.33514E-3	-8.80005E1	-1.43051E-4	5.10216E-3	9.3174E-2	1.58348E1	-1.98504E1	-1.9928E1	1.50051E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80026E1	-1.07288E-3	-8.80002E1	-7.15256E-5	5.14984E-3	9.3317E-2	1.5753E1	-1.98621E1	-1.99432E1	1.50022E1	2.15817E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80026E1	-1.0252E-3	-8.80002E1	7.15256E-5	4.98295E-3	9.31025E-2	1.57719E1	-1.9847E1	-1.97809E1	1.50057E1	2.15441E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.15699E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80022E1	-9.05991E-4	-8.80001E1	-2.38419E-5	5.14984E-3	9.31025E-2	1.58467E1	-1.98435E1	-1.98759E1	1.49679E1	2.15992E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.16067E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80024E1	-9.53674E-4	-8.80001E1	-1.19209E-4	5.36442E-3	9.3317E-2	1.57666E1	-1.98487E1	-1.99036E1	1.50242E1	2.15409E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.16952E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80025E1	-1.14441E-3	-8.80003E1	-2.14577E-4	5.00679E-3	9.34839E-2	1.58628E1	-1.98611E1	-2.00293E1	1.50322E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17444E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80025E1	-9.77516E-4	-8.80005E1	-4.05312E-4	5.34058E-3	9.31978E-2	1.57783E1	-1.98705E1	-2.0139E1	1.50328E1	2.15546E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.17829E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.43285E-2	-8.80029E1	-1.09673E-3	-8.79999E1	2.38419E-5	5.17368E-3	9.32693E-2	1.58503E1	-1.98912E1	-2.01606E1	1.50382E1	2.15887E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.17722E-2
1.4E1	1.2E1	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80027E1	-9.53674E-4	-8.80004E1	-4.76837E-5	5.22137E-3	9.3174E-2	1.57619E1	-1.98688E1	-2.00074E1	1.4965E1	2.158E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17633E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80026E1	-9.29832E-4	-8.80005E1	-4.52995E-4	5.05447E-3	9.3174E-2	1.57763E1	-1.98496E1	-1.983E1	1.4989E1	2.15987E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.15563E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80025E1	-6.67572E-4	-8.80001E1	1.19209E-4	5.07832E-3	9.29832E-2	1.58131E1	-1.9844E1	-1.98915E1	1.5007E1	2.15706E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17255E-2
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80025E1	-8.34465E-4	-8.79998E1	0.0E0	5.07832E-3	9.3174E-2	1.58126E1	-1.98794E1	-2.00652E1	1.50509E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17444E-2
1.8E1	1.93E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80027E1	-1.16825E-3	-8.80001E1	7.15256E-5	5.48363E-3	9.32932E-2	1.57524E1	-1.98459E1	-1.99971E1	1.5007E1	2.15613E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.15563E-2
1.9E1	3.27E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80025E1	-9.53674E-4	-8.80003E1	-9.53674E-5	5.29289E-3	9.31263E-2	1.58243E1	-1.98337E1	-2.005E1	1.50022E1	2.15706E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.15938E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80024E1	-1.04904E-3	-8.80005E1	-4.76837E-5	5.10216E-3	9.32693E-2	1.5744E1	-1.99007E1	-2.01069E1	1.49997E1	2.15817E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.1565E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80025E1	-1.21593E-3	-8.80004E1	1.90735E-4	5.10216E-3	9.29832E-2	1.58126E1	-1.98664E1	-2.00983E1	1.50022E1	2.15879E-9	2.52293E-3	2.52293E-3	6.30171E-3	2.16443E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80025E1	-1.21593E-3	-8.80003E1	2.38419E-5	5.07832E-3	9.31978E-2	1.58269E1	-1.98651E1	-2.00375E1	1.50028E1	2.159E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17176E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80025E1	-1.26362E-3	-8.80002E1	9.53674E-5	5.34058E-3	9.3174E-2	1.57981E1	-1.98338E1	-1.99384E1	1.50082E1	2.15566E-9	2.51935E-3	2.51935E-3	6.33211E-3	2.17066E-2