[Scan]
initial_time=2016-01-28T16:05:03
final_time=2016-01-28T16:05:22
ip_count=19
run=1026
dataset=1
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.87657E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.48887E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=1.23502E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.48116E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.43083E-8
mult1=-8.13987E-9
mult2=-2.76245E-9
rf_tmon=-4.69824E-3
rf_agc=3.25245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.88417E-10
bslens_vset=-6.2E0
bslens_vmon=-6.53408E0
bslens_imon=2.97153E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21806E1
lens5a_imon=2.05235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.0955E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04436E2
lens23_imon=1.01994E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06398E1
cs_ea1_imon=1.35367E-5
lens1_vset=-2.7E0
lens1_vmon=-3.15925E0
lens1_imon=7.09844E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.01814E1
cs_ea2_imon=1.31898E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.98703E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.0269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.32085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16102E1
os_ea1_imon=2.53371E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.42022E0
cs_ionrep_imon=9.92646E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91743E2
cs_nozzle_imon=1.92316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.06081E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.44936E-9
tplens_vset=0.0E0
tplens_vmon=-1.45738E0
tplens_imon=-2.98921E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.98015E1
iondef3_imon=9.38847E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98546E1
iondef2_imon=8.57087E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02768E2
lens6_imon=2.98049E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.06117E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.38129E0
ionrepsh_imon=1.01848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34525E1
lens5b_imon=2.14649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.02853E0
os_ea2_imon=-1.59785E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.01345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23223E2
cs_ionfoca_imon=6.30424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.09108E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57914E1
iondef1_imon=4.12183E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49944E1
iondef4_imon=5.1975E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.67695E-8
olens1_vset=0.0E0
olens1_vmon=5.72205E-4
olens1_imon=1.23405E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.49683E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.20314E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86104E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9257E3
multa_neg_imon=6.30565E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93807E3
defgrida_imon=7.18342E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.61877E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.00987E0
defgridb_imon=4.88281E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.4054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60417E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30494E1
cs_fil1_imon=9.23295E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29502E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62844E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.88709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E2	1.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80028E1	-1.33514E-3	-8.80003E1	-9.53674E-5	5.03063E-3	9.33647E-2	1.5619E1	-1.97635E1	-2.01673E1	1.49764E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.18011E-2
2.0E0	1.54E2	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80027E1	-1.00136E-3	-8.80002E1	-1.66893E-4	4.79221E-3	9.34362E-2	1.58362E1	-1.98777E1	-2.00216E1	1.49668E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.1839E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80027E1	-1.19209E-3	-8.80004E1	-2.14577E-4	4.81606E-3	9.35793E-2	1.57901E1	-1.98696E1	-2.00512E1	1.50213E1	2.15613E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17444E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80028E1	-1.50204E-3	-8.80003E1	-4.76837E-5	5.126E-3	9.35555E-2	1.58029E1	-1.98206E1	-1.99095E1	1.50058E1	2.15997E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8003E1	-1.14441E-3	-8.80002E1	1.43051E-4	5.22137E-3	9.33647E-2	1.57506E1	-1.98591E1	-1.99246E1	1.4992E1	2.15425E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80026E1	-1.43051E-3	-8.80004E1	-7.15256E-5	4.673E-3	9.36747E-2	1.58126E1	-1.98552E1	-2.00045E1	1.50335E1	2.15716E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80029E1	-1.43051E-3	-8.79999E1	0.0E0	4.88758E-3	9.36031E-2	1.57584E1	-1.98428E1	-1.99143E1	1.50406E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80029E1	-1.21593E-3	-8.79998E1	2.86102E-4	4.88758E-3	9.32932E-2	1.57497E1	-1.9869E1	-1.97842E1	1.50196E1	2.15425E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.16313E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80026E1	-1.23978E-3	-8.80003E1	4.29153E-4	5.29289E-3	9.34839E-2	1.58331E1	-1.98384E1	-1.98613E1	1.50297E1	2.16002E-9	2.52717E-3	2.52717E-3	6.3074E-3	2.16135E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80027E1	-1.26362E-3	-8.80001E1	1.19209E-4	4.93526E-3	9.36031E-2	1.58401E1	-1.98501E1	-1.98939E1	1.50016E1	2.15673E-9	2.51874E-3	2.51874E-3	6.3016E-3	2.16911E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80028E1	-1.0252E-3	-8.80003E1	2.14577E-4	4.8399E-3	9.3317E-2	1.58032E1	-1.98753E1	-1.99414E1	1.50106E1	2.15808E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.16436E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80029E1	-1.0252E-3	-8.80003E1	1.43051E-4	5.17368E-3	9.34601E-2	1.57814E1	-1.98647E1	-2.00116E1	1.49848E1	2.15332E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16878E-2
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80031E1	-1.14441E-3	-8.8E1	3.33786E-4	4.95911E-3	9.34124E-2	1.5782E1	-1.9847E1	-1.99467E1	1.50028E1	2.15636E-9	2.52553E-3	2.52553E-3	6.31269E-3	2.16374E-2
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80027E1	-1.09673E-3	-8.79999E1	4.05312E-4	4.86374E-3	9.34601E-2	1.58315E1	-1.98989E1	-1.9939E1	1.49819E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16806E-2
1.8E1	1.99E2	0.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80029E1	-1.3113E-3	-8.80001E1	-2.38419E-5	4.81606E-3	9.3174E-2	1.58293E1	-1.98134E1	-2.00159E1	1.49974E1	2.15706E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.16313E-2
1.9E1	3.17E2	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80028E1	-1.21593E-3	-8.80001E1	1.90735E-4	4.88758E-3	9.34839E-2	1.57554E1	-1.98657E1	-1.99546E1	1.49986E1	2.15987E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.17444E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80026E1	-1.16825E-3	-8.8E1	3.09944E-4	4.93526E-3	9.32217E-2	1.58005E1	-1.98501E1	-2.00045E1	1.4992E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80029E1	-1.16825E-3	-8.8E1	3.57628E-4	5.126E-3	9.33409E-2	1.58119E1	-1.98561E1	-1.99504E1	1.50076E1	2.15613E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.17066E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.80029E1	-1.23978E-3	-8.79997E1	4.52995E-4	4.93526E-3	9.35316E-2	1.57939E1	-1.98903E1	-2.00249E1	1.50052E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80027E1	-1.23978E-3	-8.8E1	3.09944E-4	4.62532E-3	9.36031E-2	1.57914E1	-1.98546E1	-1.98015E1	1.49944E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17732E-2