[Scan]
initial_time=2016-01-28T16:05:30
final_time=2016-01-28T16:05:49
ip_count=19
run=1026
dataset=1
scan=53
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.82513E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.46789E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.23488E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.46155E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.42507E-8
mult1=-8.9792E-9
mult2=-2.67034E-9
rf_tmon=-4.32071E-3
rf_agc=3.40465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=5.86772E-10
bslens_vset=-6.2E0
bslens_vmon=-6.502E0
bslens_imon=2.57979E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21727E1
lens5a_imon=2.07573E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53181E1
cs_ef1b_imon=3.10266E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04436E2
lens23_imon=1.01666E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.062E1
cs_ea1_imon=1.35767E-5
lens1_vset=-2.7E0
lens1_vmon=-3.14062E0
lens1_imon=1.19875E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64477E1
os_ef1alow_imon=2.95857E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.01964E1
cs_ea2_imon=1.31322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84425E1
cs_ef1a_imon=3.01059E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.02622E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11379E1
os_restr1_imon=4.3175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15238E1
os_ea1_imon=2.51245E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.07534E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.41922E0
cs_ionrep_imon=1.01424E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91792E2
cs_nozzle_imon=1.92388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01828E1
cs_anode1_imon=2.03864E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.47065E-9
tplens_vset=0.0E0
tplens_vmon=-1.47125E0
tplens_imon=-9.78087E-8
iondef3_vset=-2.0E1
iondef3_vmon=-2.01012E1
iondef3_imon=9.36377E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98423E1
iondef2_imon=8.58877E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02762E2
lens6_imon=2.98089E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.24869E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34821E0
ionrepsh_imon=1.03628E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34668E1
lens5b_imon=2.14882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74676E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.0758E0
os_ea2_imon=-1.45681E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.01324E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.18574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07202E0
os_ef2alow_imon=-2.58554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.66444E-1
os_ef2bup_imon=-5.47107E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.35116E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23186E2
cs_ionfoca_imon=6.33675E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01753E1
cs_anode2_imon=2.09478E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57855E1
iondef1_imon=4.16651E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49932E1
iondef4_imon=5.09797E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.68815E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.2349E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14449E0
cs_ionaccel_imon=-1.15588E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47088E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56018E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.43993E-1
window_imon=-1.18208E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86375E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92556E3
multa_neg_imon=6.23072E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93792E3
defgrida_imon=7.45015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=8.17372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29324E0
defgridb_imon=5.01497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.41272E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07229E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60984E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30468E1
cs_fil1_imon=9.23838E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29699E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62399E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67308E-2
os_fil2_imon=-2.68745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74289E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.74359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21382E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30197E-3
inlet_lpb_pmon=2.16748E-2
chamber_ion_pmon=2.15758E-9
chamber_cvt_pmon=2.51701E-3
foreline_cvt_pmon=2.51701E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79345E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.19E2	0.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80024E1	-9.05991E-4	-8.8E1	1.19209E-4	4.81606E-3	9.35078E-2	1.58834E1	-2.00086E1	-1.99225E1	1.49975E1	2.15894E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.17255E-2
2.0E0	1.54E2	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80027E1	-1.26362E-3	-8.80004E1	1.19209E-4	5.126E-3	9.36508E-2	1.57983E1	-1.98661E1	-1.99898E1	1.49771E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17444E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80024E1	-1.09673E-3	-8.80005E1	-4.76837E-5	4.93526E-3	9.34839E-2	1.58292E1	-1.9824E1	-1.98192E1	1.49941E1	2.15696E-9	2.52697E-3	2.52697E-3	6.28511E-3	2.18108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80025E1	-1.35899E-3	-8.80003E1	2.38419E-5	5.03063E-3	9.35078E-2	1.58011E1	-1.98555E1	-1.99852E1	1.49974E1	2.15817E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80026E1	-7.86781E-4	-8.80002E1	3.57628E-4	4.8399E-3	9.36747E-2	1.58445E1	-1.9844E1	-2.00829E1	1.50262E1	2.15894E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80026E1	-1.26362E-3	-8.80003E1	4.76837E-5	5.24521E-3	9.35793E-2	1.58143E1	-1.9844E1	-2.01246E1	1.49944E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80027E1	-1.12057E-3	-8.80003E1	-1.19209E-4	5.4121E-3	9.39131E-2	1.58011E1	-1.98344E1	-2.00165E1	1.50028E1	2.15706E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44831E-2	-8.80028E1	-1.23978E-3	-8.80003E1	1.90735E-4	5.60284E-3	9.38892E-2	1.57987E1	-1.98585E1	-1.9939E1	1.49884E1	2.15894E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17255E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.80028E1	-1.40667E-3	-8.80003E1	0.0E0	5.45979E-3	9.408E-2	1.58256E1	-1.9857E1	-1.98605E1	1.4997E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16252E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.47149E-2	-8.80029E1	-1.33514E-3	-8.80004E1	1.66893E-4	5.29289E-3	9.38177E-2	1.57855E1	-1.98747E1	-1.98906E1	1.50286E1	2.159E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16806E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80028E1	-1.62125E-3	-8.80003E1	3.09944E-4	5.29289E-3	9.36031E-2	1.57891E1	-1.98618E1	-1.98539E1	1.5001E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16313E-2
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80027E1	-1.35899E-3	-8.80002E1	9.53674E-5	4.91142E-3	9.38892E-2	1.57985E1	-1.98794E1	-1.99537E1	1.49896E1	2.15894E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.16125E-2
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80028E1	-1.28746E-3	-8.80002E1	2.38419E-4	4.93526E-3	9.37462E-2	1.58245E1	-1.98609E1	-2.00682E1	1.50406E1	2.158E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.17255E-2
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80028E1	-1.28746E-3	-8.80002E1	1.66893E-4	5.14984E-3	9.33886E-2	1.57807E1	-1.98549E1	-2.00706E1	1.50196E1	2.16081E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17444E-2
1.8E1	1.64E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80029E1	-1.50204E-3	-8.80004E1	1.43051E-4	5.31673E-3	9.35316E-2	1.58173E1	-1.98957E1	-2.00147E1	1.5016E1	2.15441E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.16252E-2
1.9E1	2.9E2	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80025E1	-1.3113E-3	-8.80005E1	2.38419E-4	4.98295E-3	9.34601E-2	1.58125E1	-1.98723E1	-1.99462E1	1.50232E1	2.15987E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.17444E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80026E1	-1.0252E-3	-8.8E1	2.86102E-4	5.14984E-3	9.36508E-2	1.58431E1	-1.98362E1	-2.00027E1	1.49872E1	2.15987E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80022E1	-1.04904E-3	-8.80002E1	-4.76837E-5	5.57899E-3	9.35316E-2	1.58035E1	-1.9847E1	-2.0079E1	1.49806E1	2.15987E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80025E1	-8.34465E-4	-8.80003E1	-4.76837E-5	5.07832E-3	9.32217E-2	1.57749E1	-1.98659E1	-2.01419E1	1.50201E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80022E1	-1.0252E-3	-8.80003E1	1.43051E-4	5.10216E-3	9.35316E-2	1.57855E1	-1.98423E1	-2.01012E1	1.49932E1	2.15758E-9	2.51701E-3	2.51701E-3	6.30197E-3	2.16748E-2