[Scan]
initial_time=2016-01-28T16:05:56
final_time=2016-01-28T16:06:16
ip_count=19
run=1026
dataset=1
scan=54
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.87988E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.49805E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=1.26214E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.40759E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.4291E-8
mult1=-8.61273E-9
mult2=-2.63115E-9
rf_tmon=-4.52717E-3
rf_agc=3.38046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.20711E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19453E1
lens5a_imon=1.97342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.05415E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.11666E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=1.21244E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0395E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65784E1
os_ef1alow_imon=2.95333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04245E1
cs_ea2_imon=1.44392E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.00963E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=1.02617E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11384E1
os_restr1_imon=4.30381E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.40381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20609E0
cs_ionrep_imon=9.55837E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=2.04976E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.44562E-9
tplens_vset=0.0E0
tplens_vmon=-1.63494E0
tplens_imon=-2.91808E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00528E1
iondef3_imon=8.43283E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98717E1
iondef2_imon=9.44157E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.27765E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2226E0
ionrepsh_imon=9.16549E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2987E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.0023E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03718E0
os_ef2alow_imon=-2.89431E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.40344E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.36028E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.27026E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.08208E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57654E1
iondef1_imon=5.25445E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.02232E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.6819E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.23141E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-9.27312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47094E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55936E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=1.47022E-1
window_imon=-1.18448E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82584E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-8.40431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=8.07535E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=5.66502E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=6.27733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47938E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.40636E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07439E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61029E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30518E1
cs_fil1_imon=9.23521E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23007E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.84295E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8023E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-3.06305E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.43889E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21463E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.15938E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.17503E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.16E2	0.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80027E1	-1.04904E-3	-8.80003E1	1.43051E-4	4.95911E-3	9.33647E-2	1.57578E1	-1.98218E1	-1.98969E1	1.49902E1	2.15519E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.17066E-2
2.0E0	1.67E2	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80025E1	-9.53674E-4	-8.80001E1	-1.90735E-4	5.17368E-3	9.33409E-2	1.58354E1	-1.98475E1	-1.97745E1	1.50022E1	2.15441E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8003E1	-1.0252E-3	-8.80003E1	-9.53674E-5	5.126E-3	9.36031E-2	1.57417E1	-1.98597E1	-2.00275E1	1.50178E1	2.15624E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.17176E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80027E1	-1.0252E-3	-8.80004E1	9.53674E-5	5.34058E-3	9.3317E-2	1.58431E1	-1.98827E1	-1.9918E1	1.49918E1	2.15791E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.1676E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80025E1	-7.62939E-4	-8.80005E1	7.15256E-5	5.48363E-3	9.31501E-2	1.57739E1	-1.98422E1	-1.99669E1	1.50259E1	2.15817E-9	2.52131E-3	2.52131E-3	6.2863E-3	2.171E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80021E1	-1.23978E-3	-8.80006E1	1.43051E-4	5.36442E-3	9.31263E-2	1.58011E1	-1.98236E1	-2.00808E1	1.5007E1	2.15872E-9	2.52106E-3	2.52106E-3	6.3016E-3	2.16114E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80024E1	-1.16825E-3	-8.80003E1	2.14577E-4	5.29289E-3	9.3627E-2	1.58125E1	-1.98537E1	-1.993E1	1.49944E1	2.15519E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80026E1	-7.62939E-4	-8.80001E1	-4.76837E-5	5.29289E-3	9.33647E-2	1.58058E1	-1.98846E1	-2.00317E1	1.49935E1	2.16177E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.16621E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.47923E-2	-8.80025E1	-9.29832E-4	-8.80002E1	1.19209E-4	5.34058E-3	9.3174E-2	1.57542E1	-1.98861E1	-1.98927E1	1.50064E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.16555E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80027E1	-8.10623E-4	-8.80001E1	1.19209E-4	5.55515E-3	9.33886E-2	1.57784E1	-1.98694E1	-1.99101E1	1.50064E1	2.15987E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.16501E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80026E1	-9.53674E-4	-8.80001E1	3.09944E-4	5.43594E-3	9.33409E-2	1.58093E1	-1.98404E1	-2.00724E1	1.49902E1	2.15425E-9	2.52099E-3	2.52099E-3	6.34588E-3	2.17822E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80029E1	-9.29832E-4	-8.80004E1	9.53674E-5	4.88758E-3	9.35078E-2	1.58101E1	-1.98495E1	-1.99384E1	1.49968E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.15563E-2
1.6E1	1.2E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80025E1	-1.4782E-3	-8.80003E1	3.33786E-4	5.07832E-3	9.36747E-2	1.58101E1	-1.98957E1	-1.98789E1	1.50274E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16125E-2
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80025E1	-1.35899E-3	-8.79998E1	4.52995E-4	5.36442E-3	9.33886E-2	1.58053E1	-1.98519E1	-1.993E1	1.4998E1	2.15519E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17255E-2
1.8E1	1.96E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-1.00136E-3	-8.8E1	9.53674E-5	5.60284E-3	9.32693E-2	1.57997E1	-1.98865E1	-1.99532E1	1.5013E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16313E-2
1.9E1	3.85E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80025E1	-9.29832E-4	-8.80003E1	2.14577E-4	5.96046E-3	9.3317E-2	1.58344E1	-1.9849E1	-1.99139E1	1.49902E1	2.15624E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.16806E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80023E1	-7.62939E-4	-8.80004E1	4.05312E-4	5.38826E-3	9.34839E-2	1.57377E1	-1.98499E1	-2.01508E1	1.50046E1	2.15505E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.1676E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80023E1	-1.12057E-3	-8.80003E1	1.66893E-4	5.38826E-3	9.3317E-2	1.58144E1	-1.98552E1	-1.99667E1	1.4959E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17255E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80022E1	-1.14441E-3	-8.80004E1	9.53674E-5	5.60284E-3	9.33647E-2	1.58418E1	-1.98563E1	-1.98679E1	1.50052E1	2.15808E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.16991E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80023E1	-1.19209E-3	-8.80004E1	4.76837E-5	5.45979E-3	9.31501E-2	1.57654E1	-1.98717E1	-2.00528E1	1.5019E1	2.158E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.15938E-2