[Scan]
initial_time=2016-01-28T16:06:23
final_time=2016-01-28T16:06:42
ip_count=19
run=1026
dataset=1
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.7961E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.44345E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.23615E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.4051E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.42478E-8
mult1=-9.64122E-9
mult2=-2.73502E-9
rf_tmon=-5.28815E-3
rf_agc=3.23535E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.01578E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.75765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04747E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53208E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.26136E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06479E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.37492E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.00144E-5
olens2_vset=0.0E0
olens2_vmon=6.91414E-4
olens2_imon=1.02368E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.31653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15486E1
os_ea1_imon=2.42288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=9.88465E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.05684E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.41606E-9
tplens_vset=0.0E0
tplens_vmon=-1.59457E0
tplens_imon=-3.6784E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.97933E1
iondef3_imon=8.66257E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98806E1
iondef2_imon=9.17447E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02875E2
lens6_imon=2.98501E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.14068E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=9.38716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22686E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06052E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.36076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.09216E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57961E1
iondef1_imon=4.94947E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50172E1
iondef4_imon=5.18669E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68252E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.23413E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=6.99347E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=7.07278E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33162E1
os_fil1_imon=9.39813E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06891E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61316E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30465E1
cs_fil1_imon=9.22706E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26619E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62678E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56948E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21342E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.16125E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.76421E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.09E2	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80027E1	-1.19209E-3	-8.80003E1	-4.76837E-5	5.22137E-3	9.35793E-2	1.58059E1	-1.98549E1	-1.99714E1	1.50196E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17255E-2
2.0E0	1.48E2	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80028E1	-1.3113E-3	-8.80004E1	-7.15256E-5	5.24521E-3	9.3627E-2	1.58365E1	-1.98627E1	-1.9927E1	1.50028E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80026E1	-1.14441E-3	-8.79999E1	-1.66893E-4	5.43594E-3	9.35316E-2	1.58E1	-1.98637E1	-1.99263E1	1.49981E1	2.15982E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.15994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80025E1	-1.09673E-3	-8.79997E1	-2.38419E-5	5.45979E-3	9.36985E-2	1.58516E1	-1.98813E1	-2.00069E1	1.5025E1	2.15907E-9	2.52025E-3	2.52025E-3	6.33388E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80027E1	-1.09673E-3	-8.79997E1	-9.53674E-5	5.126E-3	9.36747E-2	1.58125E1	-1.98777E1	-1.98464E1	1.50184E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80026E1	-8.82149E-4	-8.80001E1	-7.15256E-5	5.24521E-3	9.34601E-2	1.58125E1	-1.98933E1	-1.99636E1	1.50184E1	2.15808E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.17176E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80026E1	-1.23978E-3	-8.79999E1	-2.86102E-4	5.17368E-3	9.3627E-2	1.57873E1	-1.98476E1	-1.98849E1	1.5022E1	2.15613E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80025E1	-1.19209E-3	-8.80002E1	-2.14577E-4	5.126E-3	9.37939E-2	1.58179E1	-1.988E1	-2.00133E1	1.49987E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17822E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80024E1	-1.23978E-3	-8.79998E1	-2.14577E-4	5.19753E-3	9.37223E-2	1.58293E1	-1.98657E1	-1.99985E1	1.50352E1	2.15624E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.17361E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80023E1	-8.10623E-4	-8.79999E1	1.19209E-4	5.31673E-3	9.35555E-2	1.57741E1	-1.98735E1	-1.99137E1	1.50244E1	2.15425E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16501E-2
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80025E1	-1.26362E-3	-8.80002E1	-1.43051E-4	5.31673E-3	9.35316E-2	1.57759E1	-1.98855E1	-2.00117E1	1.50046E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16313E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80026E1	-1.14441E-3	-8.8E1	-2.38419E-5	5.03063E-3	9.34839E-2	1.58263E1	-1.98657E1	-2.00832E1	1.50076E1	2.15987E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.17066E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80024E1	-8.10623E-4	-8.79999E1	-2.38419E-5	5.14984E-3	9.36031E-2	1.58126E1	-1.9831E1	-1.99272E1	1.49818E1	2.15145E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.16125E-2
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80025E1	-1.0252E-3	-8.80001E1	7.15256E-5	4.98295E-3	9.33647E-2	1.58203E1	-1.98641E1	-2.00641E1	1.50232E1	2.15992E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.18104E-2
1.8E1	1.8E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80023E1	-1.19209E-3	-8.80003E1	-4.76837E-5	5.17368E-3	9.32455E-2	1.5756E1	-1.98567E1	-1.99222E1	1.50057E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17444E-2
1.9E1	3.74E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80023E1	-1.00136E-3	-8.80003E1	-1.90735E-4	5.29289E-3	9.34839E-2	1.58492E1	-1.98653E1	-1.98806E1	1.50046E1	2.15992E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16991E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80026E1	-8.82149E-4	-8.8E1	-2.6226E-4	5.17368E-3	9.3317E-2	1.57824E1	-1.98545E1	-1.97773E1	1.49986E1	2.15808E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.17361E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80026E1	-7.86781E-4	-8.8E1	-3.09944E-4	5.48363E-3	9.32693E-2	1.58191E1	-1.98591E1	-1.98897E1	1.50196E1	2.15219E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.17722E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80027E1	-1.3113E-3	-8.8E1	-2.6226E-4	5.53131E-3	9.33647E-2	1.58287E1	-1.98296E1	-1.98585E1	1.50064E1	2.15706E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.15938E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80027E1	-1.12057E-3	-8.8E1	-1.66893E-4	5.29289E-3	9.35316E-2	1.57961E1	-1.98806E1	-1.97933E1	1.50172E1	2.158E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16125E-2