[Scan]
initial_time=2016-01-28T16:06:49
final_time=2016-01-28T16:07:09
ip_count=19
run=1026
dataset=1
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.73706E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.32985E-10
ql2_vset=
ql2_vmon=-1.40667E-3
ql2_imon=1.20732E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.44959E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.42754E-8
mult1=-9.22991E-9
mult2=-2.62634E-9
rf_tmon=-3.68907E-3
rf_agc=3.45955E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=6.45912E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67932E0
bslens_imon=2.64176E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20198E1
lens5a_imon=1.96855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12425E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53236E1
cs_ef1b_imon=3.10132E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=1.25988E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04E0
lens1_imon=1.27909E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64622E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03718E1
cs_ea2_imon=1.4036E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84489E1
cs_ef1a_imon=2.99874E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.03049E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.31157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15721E1
os_ea1_imon=2.43327E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6371E1
os_ef1bup_imon=3.07577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23484E0
cs_ionrep_imon=9.53382E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=2.05283E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.43952E-9
tplens_vset=0.0E0
tplens_vmon=-1.63453E0
tplens_imon=-4.35644E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9882E1
iondef3_imon=8.72201E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98239E1
iondef2_imon=9.22318E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02874E2
lens6_imon=2.98694E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=7.98583E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32665E0
ionrepsh_imon=9.15691E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33576E1
lens5b_imon=2.1773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74792E1
cs_ef2b_imon=3.11794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24174E0
os_ea2_imon=-6.67588E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.17957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.59022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62285E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.36769E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30425E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.09257E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57836E1
iondef1_imon=4.98191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49884E1
iondef4_imon=5.17813E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.68816E-8
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=1.23496E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47328E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56196E1
einzel_imon=7.47295E-6
window_vset=0.0E0
window_vmon=1.81003E-1
window_imon=-1.01304E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86162E1
mask2_imon=-7.65713E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92696E3
multa_neg_imon=7.83565E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.6428E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.25579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29284E0
defgridb_imon=5.81857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33141E1
os_fil1_imon=9.40494E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0687E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60872E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30424E1
cs_fil1_imon=9.22513E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32573E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62771E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25565E-2
os_fil2_imon=-2.49928E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95387E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.76387E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.24926E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31191E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21423E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=2.17282E-2
chamber_ion_pmon=2.15636E-9
chamber_cvt_pmon=2.52765E-3
foreline_cvt_pmon=2.52765E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2987E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.52E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80028E1	-1.21593E-3	-8.8E1	-1.66893E-4	5.126E-3	9.33886E-2	1.58835E1	-1.99005E1	-1.98691E1	1.50245E1	2.15531E-9	2.5199E-3	2.5199E-3	6.31974E-3	2.16948E-2
2.0E0	1.75E2	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80027E1	-1.19209E-3	-8.80001E1	0.0E0	5.26905E-3	9.35078E-2	1.57613E1	-1.98701E1	-1.9813E1	1.50107E1	2.15571E-9	2.5216E-3	2.5216E-3	6.32784E-3	2.16605E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80029E1	-8.10623E-4	-8.80001E1	2.38419E-5	5.03063E-3	9.34839E-2	1.57601E1	-1.98759E1	-1.99703E1	1.50286E1	2.16168E-9	2.51439E-3	2.51439E-3	6.34301E-3	2.16584E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80029E1	-1.0252E-3	-8.8E1	0.0E0	5.19753E-3	9.33886E-2	1.58365E1	-1.98543E1	-2.00267E1	1.50016E1	2.15992E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80028E1	-1.0252E-3	-8.80002E1	-1.66893E-4	5.48363E-3	9.33647E-2	1.58233E1	-1.98511E1	-2.01118E1	1.50068E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80029E1	-1.0252E-3	-8.79998E1	7.15256E-5	5.22137E-3	9.31501E-2	1.57921E1	-1.98543E1	-2.01511E1	1.50022E1	2.16085E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1829E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80029E1	-9.53674E-4	-8.8E1	-2.14577E-4	5.4121E-3	9.32693E-2	1.57919E1	-1.98284E1	-2.01059E1	1.50311E1	2.16269E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80029E1	-1.00136E-3	-8.80001E1	2.38419E-4	4.91142E-3	9.33886E-2	1.58179E1	-1.98446E1	-1.9978E1	1.5019E1	2.1567E-9	2.519E-3	2.519E-3	6.31548E-3	2.16621E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80028E1	-1.23978E-3	-8.80001E1	2.38419E-5	4.79221E-3	9.31501E-2	1.57668E1	-1.98338E1	-1.99059E1	1.50118E1	2.16081E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80027E1	-1.26362E-3	-8.79999E1	2.38419E-5	5.19753E-3	9.31978E-2	1.57801E1	-1.98711E1	-2.00651E1	1.49938E1					
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80032E1	-1.09673E-3	-8.79998E1	1.19209E-4	4.95911E-3	9.32693E-2	1.58817E1	-1.99119E1	-2.01107E1	1.49968E1	2.16081E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17255E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80029E1	-9.77516E-4	-8.8E1	-4.76837E-5	5.19753E-3	9.31025E-2	1.57993E1	-1.98531E1	-2.01312E1	1.50226E1	2.15992E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.16436E-2
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80028E1	-8.58307E-4	-8.80003E1	1.43051E-4	5.22137E-3	9.34124E-2	1.57719E1	-1.98517E1	-1.99213E1	1.50051E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17444E-2
1.7E1	4.4E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80027E1	-1.04904E-3	-8.79998E1	1.19209E-4	5.126E-3	9.32693E-2	1.58516E1	-1.98458E1	-1.98723E1	1.49908E1	2.15533E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.18104E-2
1.8E1	1.72E2	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80026E1	-1.09673E-3	-8.80001E1	1.19209E-4	4.95911E-3	9.30548E-2	1.58035E1	-1.98771E1	-2.0094E1	1.5019E1	2.15441E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.17732E-2
1.9E1	3.71E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80025E1	-8.82149E-4	-8.79999E1	3.33786E-4	4.74453E-3	9.33647E-2	1.5779E1	-1.98694E1	-2.00293E1	1.49964E1	2.15987E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80027E1	-1.07288E-3	-8.80004E1	1.19209E-4	5.22137E-3	9.30309E-2	1.58087E1	-1.98759E1	-1.99245E1	1.50099E1	2.15624E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.17547E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80024E1	-1.16825E-3	-8.80001E1	2.38419E-4	5.05447E-3	9.34601E-2	1.57692E1	-1.98861E1	-1.98476E1	1.50016E1	2.15808E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.15883E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80028E1	-1.14441E-3	-8.8E1	-1.43051E-4	4.95911E-3	9.31263E-2	1.5779E1	-1.98434E1	-1.99154E1	1.50051E1	2.15894E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.17066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80026E1	-1.40667E-3	-8.79997E1	-9.53674E-5	4.98295E-3	9.3174E-2	1.57836E1	-1.98239E1	-1.9882E1	1.49884E1	2.15636E-9	2.52765E-3	2.52765E-3	6.32328E-3	2.17282E-2