[Scan]
initial_time=2016-01-28T16:07:16
final_time=2016-01-28T16:07:36
ip_count=19
run=1026
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79548E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.58996E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.21608E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.43803E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.42688E-8
mult1=-1.0469E-8
mult2=-2.606E-9
rf_tmon=-3.585E-3
rf_agc=3.47731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.28185E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.95748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.10884E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=1.22603E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02994E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.38717E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.01153E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.03205E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.41963E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=9.63951E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.04207E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.4059E-9
tplens_vset=0.0E0
tplens_vmon=-1.63963E0
tplens_imon=-1.47938E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99775E1
iondef3_imon=8.60489E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98294E1
iondef2_imon=9.49892E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=7.65169E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=9.49171E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23407E0
os_ea2_imon=-4.61569E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53576E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09288E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57714E1
iondef1_imon=4.9747E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5016E1
iondef4_imon=5.15425E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.68792E-8
olens1_vset=0.0E0
olens1_vmon=7.62939E-4
olens1_imon=1.23698E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16438E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.18873E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.85996E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=6.30132E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93797E3
defgrida_imon=6.04537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5023E3
multb_neg_imon=6.91777E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3315E1
os_fil1_imon=9.37891E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60948E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30473E1
cs_fil1_imon=9.22658E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32386E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6277E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30171E-3
inlet_lpb_pmon=2.16248E-2
chamber_ion_pmon=2.15879E-9
chamber_cvt_pmon=2.51952E-3
foreline_cvt_pmon=2.51952E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.54E2	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80027E1	-1.28746E-3	-8.80001E1	-7.15256E-5	5.38826E-3	9.3627E-2	1.58026E1	-1.98576E1	-2.00145E1	1.49923E1	2.158E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.17633E-2
2.0E0	1.46E2	1.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80025E1	-1.38283E-3	-8.80003E1	-4.76837E-5	5.48363E-3	9.34362E-2	1.58105E1	-1.98557E1	-1.99592E1	1.50191E1	2.16085E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80024E1	-1.38283E-3	-8.80002E1	2.38419E-4	5.67436E-3	9.36031E-2	1.58081E1	-1.9899E1	-1.99083E1	1.49947E1	2.15409E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80025E1	-1.35899E-3	-8.79999E1	4.76837E-5	5.62668E-3	9.35316E-2	1.58067E1	-1.98234E1	-1.99461E1	1.50248E1	2.15726E-9	2.52025E-3	2.52025E-3	6.29157E-3	2.16011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80025E1	-1.3113E-3	-8.80002E1	-1.43051E-4	5.03063E-3	9.35078E-2	1.58329E1	-1.98759E1	-1.99113E1	1.50154E1	2.15808E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80025E1	-1.57356E-3	-8.79999E1	7.15256E-5	5.05447E-3	9.32932E-2	1.57626E1	-1.98513E1	-2.00075E1	1.49944E1	2.15519E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80025E1	-1.4782E-3	-8.80002E1	3.09944E-4	5.126E-3	9.34124E-2	1.57855E1	-1.98158E1	-1.98489E1	1.50088E1	2.15987E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.15563E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80024E1	-1.26362E-3	-8.80002E1	2.38419E-5	5.29289E-3	9.35316E-2	1.57596E1	-1.98717E1	-2.00135E1	1.4992E1	2.15332E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16313E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80026E1	-1.16825E-3	-8.80005E1	4.76837E-5	5.05447E-3	9.35555E-2	1.57933E1	-1.98452E1	-1.99312E1	1.50322E1	2.15894E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.16125E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80026E1	-9.05991E-4	-8.80006E1	0.0E0	5.00679E-3	9.33647E-2	1.58277E1	-1.98686E1	-1.992E1	1.50228E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16313E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80028E1	-8.82149E-4	-8.80006E1	-7.15256E-5	5.05447E-3	9.32217E-2	1.58077E1	-1.98765E1	-2.00243E1	1.49968E1	2.15696E-9	2.52697E-3	2.52697E-3	6.31299E-3	2.16377E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80028E1	-1.04904E-3	-8.80005E1	-1.19209E-4	4.8399E-3	9.30071E-2	1.57644E1	-1.98591E1	-1.98404E1	1.49638E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17255E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80027E1	-8.58307E-4	-8.80001E1	4.76837E-5	4.95911E-3	9.32217E-2	1.57909E1	-1.98555E1	-2.00627E1	1.5001E1	2.15519E-9	2.5188E-3	2.5188E-3	6.3514E-3	2.18201E-2
1.7E1	4.0E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80026E1	-1.07288E-3	-8.80003E1	-4.76837E-5	5.10216E-3	9.30786E-2	1.58115E1	-1.98564E1	-1.99667E1	1.50028E1	2.15706E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17255E-2
1.8E1	1.9E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80023E1	-1.19209E-3	-8.8E1	1.43051E-4	5.22137E-3	9.2864E-2	1.57416E1	-1.98422E1	-1.99288E1	1.5019E1	2.159E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.17176E-2
1.9E1	3.45E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80026E1	-9.05991E-4	-8.80001E1	2.14577E-4	4.88758E-3	9.33647E-2	1.58305E1	-1.98543E1	-2.00243E1	1.50214E1	2.158E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.1575E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80024E1	-1.09673E-3	-8.79999E1	1.43051E-4	4.86374E-3	9.31978E-2	1.58244E1	-1.98434E1	-1.98948E1	1.50118E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80025E1	-9.29832E-4	-8.80001E1	1.19209E-4	5.00679E-3	9.33409E-2	1.57722E1	-1.99077E1	-2.00168E1	1.50279E1	2.15441E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.16991E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80029E1	-9.29832E-4	-8.8E1	2.14577E-4	5.00679E-3	9.31978E-2	1.58684E1	-1.98472E1	-1.99651E1	1.50053E1	2.15745E-9	2.5216E-3	2.5216E-3	6.3074E-3	2.1643E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80024E1	-9.05991E-4	-8.80002E1	1.66893E-4	5.07832E-3	9.3317E-2	1.57714E1	-1.98294E1	-1.99775E1	1.5016E1	2.15879E-9	2.51952E-3	2.51952E-3	6.30171E-3	2.16248E-2