[Scan]
initial_time=2016-01-28T16:09:03
final_time=2016-01-28T16:09:22
ip_count=19
run=1026
dataset=1
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79041E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.8403E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.21119E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.44404E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.43102E-8
mult1=-9.00591E-9
mult2=-2.59286E-9
rf_tmon=-4.45835E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.38986E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6428E0
bslens_imon=2.39614E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1978E1
lens5a_imon=1.96518E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.08613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.24821E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06042E0
lens1_imon=1.57707E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03953E1
cs_ea2_imon=1.40872E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=3.00396E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.02819E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15006E1
os_ea1_imon=2.4074E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=9.55843E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.03414E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.37553E-9
tplens_vset=0.0E0
tplens_vmon=-1.66286E0
tplens_imon=-5.01836E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99059E1
iondef3_imon=8.68794E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98669E1
iondef2_imon=9.49967E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98361E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.07953E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24659E0
ionrepsh_imon=9.22419E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33713E1
lens5b_imon=2.16903E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24904E0
os_ea2_imon=-6.59773E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70813E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.35463E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.29708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.10081E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58245E1
iondef1_imon=5.22433E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50238E1
iondef4_imon=5.37049E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.6849E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.23741E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92691E3
multa_neg_imon=7.60809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.20134E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.84778E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48629E0
defgridb_imon=5.98463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.42084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30459E1
cs_fil1_imon=9.23205E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26799E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62408E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46282E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.67197E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21222E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.37958E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.42E2	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80023E1	-1.0252E-3	-8.80003E1	2.38419E-5	4.8399E-3	9.35316E-2	1.58269E1	-1.98657E1	-1.99077E1	1.50274E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.16878E-2
2.0E0	1.67E2	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80023E1	-9.53674E-4	-8.80001E1	-1.43051E-4	4.93526E-3	9.33647E-2	1.58148E1	-1.98777E1	-2.00485E1	1.50041E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18201E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80024E1	-1.0252E-3	-8.80001E1	3.33786E-4	4.72069E-3	9.34362E-2	1.5785E1	-1.98405E1	-1.98591E1	1.50103E1	2.15804E-9	2.5208E-3	2.5208E-3	6.32099E-3	2.17309E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80025E1	-1.50204E-3	-8.80005E1	2.38419E-5	4.69685E-3	9.36747E-2	1.57488E1	-1.98615E1	-2.00153E1	1.4995E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80025E1	-1.35899E-3	-8.80003E1	1.90735E-4	4.72069E-3	9.34601E-2	1.57915E1	-1.98867E1	-1.99528E1	1.50064E1	2.15533E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.16067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80027E1	-1.28746E-3	-8.80005E1	1.19209E-4	4.72069E-3	9.35793E-2	1.58141E1	-1.98264E1	-1.98885E1	1.50169E1	2.15696E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.15994E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80025E1	-1.26362E-3	-8.80003E1	1.19209E-4	4.81606E-3	9.33886E-2	1.58245E1	-1.98508E1	-2.00486E1	1.50146E1	2.15828E-9	2.52247E-3	2.52247E-3	6.29455E-3	2.17937E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80024E1	-1.09673E-3	-8.80002E1	2.86102E-4	4.62532E-3	9.37223E-2	1.57904E1	-1.98703E1	-2.00862E1	1.50029E1	2.15405E-9	2.51606E-3	2.51606E-3	6.28578E-3	2.16148E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80026E1	-1.40667E-3	-8.80002E1	-1.19209E-4	4.55379E-3	9.37462E-2	1.58581E1	-1.98316E1	-1.987E1	1.50254E1	2.16173E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.16569E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80024E1	-1.0252E-3	-8.80001E1	2.38419E-5	4.57764E-3	9.32693E-2	1.57879E1	-1.98806E1	-1.99573E1	1.50154E1	2.15425E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.16125E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80026E1	-1.33514E-3	-8.80001E1	-2.6226E-4	4.8399E-3	9.35316E-2	1.57975E1	-1.98476E1	-2.00153E1	1.50112E1	2.15441E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.16436E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80027E1	-1.16825E-3	-8.80004E1	7.15256E-5	4.69685E-3	9.35793E-2	1.58119E1	-1.98735E1	-2.0097E1	1.50088E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.18011E-2
1.6E1	1.9E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80026E1	-8.10623E-4	-8.8E1	1.19209E-4	5.126E-3	9.35078E-2	1.57188E1	-1.98605E1	-1.99473E1	1.49987E1	2.15425E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16125E-2
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80027E1	-1.19209E-3	-8.80004E1	3.09944E-4	4.95911E-3	9.36747E-2	1.58636E1	-1.98753E1	-1.99474E1	1.50063E1	2.15762E-9	2.51578E-3	2.51578E-3	6.31278E-3	2.17083E-2
1.8E1	1.99E2	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80028E1	-9.53674E-4	-8.80003E1	4.29153E-4	4.91142E-3	9.3627E-2	1.58286E1	-1.98588E1	-2.00882E1	1.4983E1					
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80025E1	-1.16825E-3	-8.80003E1	3.57628E-4	5.14984E-3	9.35316E-2	1.58035E1	-1.98326E1	-1.99017E1	1.5001E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.17066E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80027E1	-1.0252E-3	-8.80003E1	4.76837E-4	4.98295E-3	9.31978E-2	1.57789E1	-1.98855E1	-1.99852E1	1.5007E1	2.15519E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80023E1	-1.00136E-3	-8.80002E1	2.86102E-4	5.05447E-3	9.33647E-2	1.58439E1	-1.99184E1	-1.99248E1	1.5012E1	2.16175E-9	2.52977E-3	2.52977E-3	6.32936E-3	2.15563E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80028E1	-9.29832E-4	-8.80001E1	1.43051E-4	4.79221E-3	9.3317E-2	1.5802E1	-1.98806E1	-2.00116E1	1.50154E1	2.159E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16806E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80028E1	-7.86781E-4	-8.80003E1	1.43051E-4	4.88758E-3	9.36031E-2	1.58245E1	-1.98669E1	-1.99059E1	1.50238E1	2.15533E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.17361E-2