[Scan]
initial_time=2016-01-28T16:10:23
final_time=2016-01-28T16:10:42
ip_count=19
run=1026
dataset=1
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80669E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.02031E-10
ql2_vset=
ql2_vmon=-1.4782E-3
ql2_imon=1.24832E-9
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.44974E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.42201E-8
mult1=-9.82467E-9
mult2=-2.74256E-9
rf_tmon=-4.83086E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.08444E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.09298E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02052E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=1.26064E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07981E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03612E1
cs_ea2_imon=1.39763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.97549E-5
olens2_vset=0.0E0
olens2_vmon=5.48363E-4
olens2_imon=1.0332E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.41567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.05298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.06946E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=4.37005E-9
tplens_vset=0.0E0
tplens_vmon=-1.618E0
tplens_imon=-3.9668E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98489E1
iondef3_imon=8.76711E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98561E1
iondef2_imon=9.3439E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=8.24034E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24248E0
ionrepsh_imon=9.39077E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74369E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25751E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0047E0
os_ef2alow_imon=-2.77447E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.37806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02338E1
cs_anode2_imon=2.11234E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57999E1
iondef1_imon=5.07564E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.17588E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.68752E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.24093E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20943E0
cs_ionaccel_imon=-1.19233E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.38817E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.93437E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=5.89396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.42018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61044E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30416E1
cs_fil1_imon=9.22568E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.16648E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62469E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70684E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.82214E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.15148E-2
chamber_ion_pmon=2.15257E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00738E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.72E2	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80027E1	-1.19209E-3	-8.80003E1	9.53674E-5	4.98295E-3	9.31978E-2	1.58085E1	-1.98552E1	-1.99372E1	1.50298E1	2.15624E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.17918E-2
2.0E0	1.85E2	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80029E1	-1.23978E-3	-8.80001E1	7.15256E-5	5.07832E-3	9.31263E-2	1.57933E1	-1.98849E1	-1.98831E1	1.49908E1	2.16177E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80026E1	-1.14441E-3	-8.79999E1	7.15256E-5	4.88758E-3	9.32217E-2	1.57902E1	-1.98539E1	-1.99993E1	1.49947E1	2.15791E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80025E1	-9.53674E-4	-8.80002E1	2.38419E-4	4.673E-3	9.3317E-2	1.58498E1	-1.9834E1	-2.00806E1	1.49808E1	2.15817E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80026E1	-1.38283E-3	-8.8E1	2.14577E-4	4.45843E-3	9.32932E-2	1.5767E1	-1.98527E1	-1.98469E1	1.50091E1	2.15441E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.16067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80026E1	-1.43051E-3	-8.80005E1	-4.76837E-5	4.673E-3	9.32932E-2	1.57684E1	-1.98525E1	-1.98551E1	1.50205E1	2.15997E-9	2.52342E-3	2.52342E-3	6.32328E-3	2.16918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80024E1	-1.28746E-3	-8.80001E1	1.66893E-4	4.98295E-3	9.34839E-2	1.58061E1	-1.98835E1	-1.99242E1	1.4995E1	2.15729E-9	2.52305E-3	2.52305E-3	6.29558E-3	2.16991E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80025E1	-1.26362E-3	-8.80005E1	4.05312E-4	4.8399E-3	9.35793E-2	1.57945E1	-1.98543E1	-2.01042E1	1.50118E1	2.15987E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.18011E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80024E1	-1.45435E-3	-8.80003E1	3.57628E-4	4.93526E-3	9.34362E-2	1.57927E1	-1.98657E1	-2.01198E1	1.50028E1	2.15894E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.1858E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80026E1	-1.66893E-3	-8.80001E1	3.33786E-4	4.86374E-3	9.31025E-2	1.57867E1	-1.9857E1	-2.00918E1	1.50046E1	2.15624E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.17732E-2
1.4E1	1.3E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80026E1	-1.16825E-3	-8.79999E1	-7.15256E-5	5.126E-3	9.32217E-2	1.58293E1	-1.98633E1	-1.9927E1	1.49938E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1839E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80026E1	-1.14441E-3	-8.80001E1	2.6226E-4	4.98295E-3	9.30548E-2	1.57951E1	-1.98476E1	-1.99558E1	1.49932E1	2.15425E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.15938E-2
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-1.33514E-3	-8.80001E1	4.05312E-4	5.26905E-3	9.32693E-2	1.57819E1	-1.98597E1	-1.98176E1	1.50232E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16689E-2
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80024E1	-1.38283E-3	-8.80001E1	4.29153E-4	4.93526E-3	9.31025E-2	1.58077E1	-1.98747E1	-1.98146E1	1.50004E1	2.15706E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16501E-2
1.8E1	1.68E2	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80023E1	-1.21593E-3	-8.80002E1	2.14577E-4	4.93526E-3	9.31978E-2	1.5779E1	-1.98611E1	-1.98959E1	1.50256E1	2.15624E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.16436E-2
1.9E1	3.45E2	2.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80023E1	-1.28746E-3	-8.80001E1	2.86102E-4	4.93526E-3	9.29356E-2	1.5841E1	-1.98948E1	-2.00387E1	1.49976E1	2.15441E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.16252E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80027E1	-1.16825E-3	-8.8E1	1.43051E-4	4.76837E-3	9.3174E-2	1.57949E1	-1.98617E1	-2.00251E1	1.50082E1	2.15613E-9	2.51007E-3	2.51007E-3	6.3074E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80028E1	-1.12057E-3	-8.80002E1	0.0E0	4.72069E-3	9.32693E-2	1.58085E1	-1.98794E1	-1.98487E1	1.50039E1	2.15817E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.16918E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80026E1	-1.40667E-3	-8.80002E1	1.43051E-4	4.88758E-3	9.29832E-2	1.57943E1	-1.98847E1	-1.98133E1	1.50022E1	2.15987E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.16689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80027E1	-1.4782E-3	-8.79996E1	4.52995E-4	5.07832E-3	9.30309E-2	1.57999E1	-1.98561E1	-1.98489E1	1.50166E1	2.15257E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.15148E-2