[Scan]
initial_time=2016-01-28T16:11:43
final_time=2016-01-28T16:12:02
ip_count=19
run=1026
dataset=1
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.76206E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-5.15199E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=1.20142E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.45221E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=1.42414E-8
mult1=-9.38114E-9
mult2=-2.69974E-9
rf_tmon=-4.88111E-3
rf_agc=3.34566E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=6.26576E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.36629E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.09025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=1.23085E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08256E0
lens1_imon=1.50267E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.4064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=2.99434E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.036E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.31806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=2.4169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=9.61854E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.04872E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.42966E-9
tplens_vset=0.0E0
tplens_vmon=-1.6084E0
tplens_imon=-2.88269E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99478E1
iondef3_imon=8.69121E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98664E1
iondef2_imon=9.43449E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=8.08346E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=9.2646E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.1191E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21788E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.18096E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07425E0
os_ef2alow_imon=-2.80047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.41386E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.3641E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.28689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.09703E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58126E1
iondef1_imon=4.79786E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50028E1
iondef4_imon=5.06402E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.68691E-8
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=1.23997E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.03852E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47146E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.84671E-1
window_imon=-1.16015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-8.1958E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9257E3
multa_neg_imon=7.13033E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.90027E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33168E1
os_fil1_imon=9.41951E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30472E1
cs_fil1_imon=9.233E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31289E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62901E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59781E-2
os_fil2_imon=-2.81978E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.84295E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21426E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.86632E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.31E2	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.8003E1	-1.04904E-3	-8.80005E1	7.15256E-5	4.64916E-3	9.34601E-2	1.58144E1	-1.98659E1	-1.99974E1	1.50094E1	2.15425E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.1575E-2
2.0E0	1.86E2	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80028E1	-1.07288E-3	-8.80004E1	4.76837E-5	4.57764E-3	9.32932E-2	1.57954E1	-1.98772E1	-1.98416E1	1.50247E1	2.15716E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80027E1	-1.14441E-3	-8.80001E1	-4.76837E-5	4.86374E-3	9.34601E-2	1.57583E1	-1.98724E1	-1.99877E1	1.50126E1	2.15791E-9	2.52585E-3	2.52585E-3	6.31299E-3	2.16186E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80026E1	-1.19209E-3	-8.80003E1	2.14577E-4	4.8399E-3	9.35555E-2	1.58295E1	-1.98588E1	-1.98955E1	1.50172E1	2.15907E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80028E1	-1.35899E-3	-8.80003E1	2.86102E-4	4.57764E-3	9.32932E-2	1.58065E1	-1.98729E1	-1.99726E1	1.5028E1	2.15791E-9	2.52473E-3	2.52473E-3	6.30182E-3	2.16377E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80028E1	-1.33514E-3	-8.80003E1	2.14577E-4	4.673E-3	9.3174E-2	1.57855E1	-1.9844E1	-2.00633E1	1.49944E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80029E1	-1.23978E-3	-8.80002E1	2.38419E-5	4.95911E-3	9.3317E-2	1.5815E1	-1.98776E1	-1.98883E1	1.50358E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80027E1	-1.35899E-3	-8.80003E1	3.33786E-4	4.79221E-3	9.33409E-2	1.58065E1	-1.99077E1	-2.00676E1	1.50473E1	2.15706E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.16501E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80029E1	-1.14441E-3	-8.80001E1	3.8147E-4	4.79221E-3	9.34124E-2	1.58317E1	-1.98362E1	-1.99702E1	1.5016E1	2.15808E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.15699E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80028E1	-1.26362E-3	-8.8E1	4.29153E-4	4.8399E-3	9.34839E-2	1.57783E1	-1.98543E1	-1.98513E1	1.50172E1	2.15238E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.16689E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80029E1	-1.23978E-3	-8.80004E1	1.43051E-4	4.86374E-3	9.35316E-2	1.57897E1	-1.98885E1	-2.00027E1	1.50046E1	2.15982E-9	2.52362E-3	2.52362E-3	6.29624E-3	2.16952E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80027E1	-1.04904E-3	-8.80006E1	2.86102E-4	4.88758E-3	9.35793E-2	1.58251E1	-1.98531E1	-2.00832E1	1.49998E1	2.15706E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15938E-2
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80027E1	-9.53674E-4	-8.80006E1	3.09944E-4	4.79221E-3	9.34601E-2	1.5802E1	-1.98667E1	-1.99267E1	1.5016E1	2.15716E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.16436E-2
1.7E1	4.0E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80026E1	-7.86781E-4	-8.80007E1	2.14577E-4	4.88758E-3	9.36031E-2	1.57879E1	-1.98558E1	-1.99815E1	1.5007E1	2.156E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.17145E-2
1.8E1	1.99E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.8003E1	-8.34465E-4	-8.80003E1	2.38419E-4	4.81606E-3	9.3174E-2	1.57813E1	-1.98591E1	-1.98434E1	1.50352E1	2.15808E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16252E-2
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.8003E1	-1.16825E-3	-8.80002E1	5.72205E-4	4.91142E-3	9.33647E-2	1.58185E1	-1.98591E1	-2.00429E1	1.49872E1	2.15332E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.16313E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80029E1	-1.12057E-3	-8.80004E1	2.14577E-4	4.69685E-3	9.35793E-2	1.57656E1	-1.9832E1	-1.9942E1	1.50214E1	2.15982E-9	2.51136E-3	2.51136E-3	6.32978E-3	2.17337E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.10051E-2	-8.80027E1	-1.09673E-3	-8.80002E1	3.33786E-4	4.673E-3	9.34124E-2	1.5818E1	-1.98666E1	-1.99187E1	1.50219E1	2.15706E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17822E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.11597E-2	-8.80026E1	-1.21593E-3	-8.80002E1	1.90735E-4	4.8399E-3	9.34601E-2	1.58173E1	-1.98711E1	-2.00417E1	1.49974E1	2.15997E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.17646E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80029E1	-1.23978E-3	-8.79998E1	6.19888E-4	4.8399E-3	9.29832E-2	1.58126E1	-1.98664E1	-1.99478E1	1.50028E1	2.15533E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.16806E-2