[Scan]
initial_time=2016-01-28T16:12:36
final_time=2016-01-28T16:12:55
ip_count=19
run=1026
dataset=1
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.75885E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.10752E-10
ql2_vset=
ql2_vmon=-1.62125E-3
ql2_imon=1.18967E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.45296E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.4227E-8
mult1=-9.4998E-9
mult2=-2.72396E-9
rf_tmon=-3.95842E-3
rf_agc=3.34141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=6.41906E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.39355E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.09839E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=1.24442E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05397E0
lens1_imon=1.44185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.95063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.39835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.00829E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.03551E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.398E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.03882E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=4.43085E-9
tplens_vset=0.0E0
tplens_vmon=-1.58075E0
tplens_imon=-4.00285E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00638E1
iondef3_imon=8.61931E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9841E1
iondef2_imon=9.50613E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.21149E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=9.20692E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22987E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63787E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.09396E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58326E1
iondef1_imon=4.9711E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50029E1
iondef4_imon=5.08938E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.69093E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.24174E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.05178E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.01293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.41795E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=9.2264E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23135E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58624E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.15515E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11549E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.24E2	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80024E1	-1.04904E-3	-8.80002E1	-2.38419E-5	5.07832E-3	9.28879E-2	1.5766E1	-1.98806E1	-2.00711E1	1.5022E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
2.0E0	1.58E2	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80024E1	-1.09673E-3	-8.80007E1	-7.15256E-5	4.98295E-3	9.31025E-2	1.57842E1	-1.98441E1	-1.99053E1	1.50022E1	2.16175E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.1839E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80025E1	-1.16825E-3	-8.80006E1	-9.53674E-5	4.95911E-3	9.32693E-2	1.58085E1	-1.98653E1	-1.99697E1	1.50106E1	2.15894E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80024E1	-1.16825E-3	-8.80004E1	-9.53674E-5	4.76837E-3	9.34124E-2	1.58197E1	-1.986E1	-1.99691E1	1.49999E1	2.15533E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.18104E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80026E1	-1.12057E-3	-8.80005E1	4.05312E-4	4.8399E-3	9.28879E-2	1.58338E1	-1.98649E1	-1.99745E1	1.50016E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80026E1	-1.07288E-3	-8.80003E1	-9.53674E-5	5.07832E-3	9.34601E-2	1.57584E1	-1.98759E1	-1.99282E1	1.50437E1	2.15505E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.16377E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80026E1	-1.04904E-3	-8.80004E1	9.53674E-5	5.126E-3	9.3174E-2	1.57997E1	-1.98694E1	-1.99425E1	1.5008E1	2.15987E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80028E1	-1.09673E-3	-8.80003E1	1.19209E-4	5.31673E-3	9.32932E-2	1.58191E1	-1.98659E1	-1.99284E1	1.50058E1	2.15533E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16067E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80027E1	-1.12057E-3	-8.80006E1	4.76837E-4	5.26905E-3	9.31501E-2	1.57867E1	-1.98771E1	-2.00075E1	1.49926E1	2.15145E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.15189E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80024E1	-9.29832E-4	-8.80004E1	3.33786E-4	4.74453E-3	9.32217E-2	1.58161E1	-1.98422E1	-1.99906E1	1.50292E1	2.15808E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.16806E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80024E1	-9.53674E-4	-8.80002E1	1.66893E-4	4.8399E-3	9.30548E-2	1.5769E1	-1.98464E1	-1.98794E1	1.49877E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.1575E-2
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80024E1	-1.23978E-3	-8.80001E1	1.66893E-4	5.17368E-3	9.29832E-2	1.57879E1	-1.98452E1	-1.99612E1	1.5007E1	2.15425E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17066E-2
1.6E1	1.5E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80026E1	-1.16825E-3	-8.80003E1	9.53674E-5	4.86374E-3	9.3317E-2	1.58005E1	-1.98519E1	-1.99594E1	1.49896E1	2.15808E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.17176E-2
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80027E1	-1.33514E-3	-8.80004E1	-4.76837E-5	5.00679E-3	9.32455E-2	1.58888E1	-1.99384E1	-1.99185E1	1.5028E1	2.15332E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16501E-2
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80026E1	-1.57356E-3	-8.80005E1	-9.53674E-5	4.95911E-3	9.32932E-2	1.57596E1	-1.98495E1	-1.99288E1	1.49878E1	2.15613E-9	2.53196E-3	2.53196E-3	6.32936E-3	2.1839E-2
1.9E1	3.52E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80024E1	-1.71661E-3	-8.80006E1	-2.38419E-5	4.8399E-3	9.34124E-2	1.58067E1	-1.98328E1	-1.99301E1	1.4995E1	2.16081E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.17444E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80022E1	-1.85966E-3	-8.80004E1	2.38419E-5	4.62532E-3	9.30786E-2	1.57656E1	-1.97203E1	-1.98801E1	1.50034E1	2.15992E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.15331E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80025E1	-1.3113E-3	-8.80004E1	1.66893E-4	4.79221E-3	9.32455E-2	1.57398E1	-1.98627E1	-2.00561E1	1.50317E1	2.15894E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16501E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80026E1	-1.35899E-3	-8.80004E1	2.86102E-4	5.05447E-3	9.29832E-2	1.57985E1	-1.98493E1	-1.98487E1	1.50158E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16878E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80026E1	-1.62125E-3	-8.80002E1	1.43051E-4	5.00679E-3	9.33647E-2	1.58326E1	-1.9841E1	-2.00638E1	1.50029E1	2.159E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.15515E-2