[Scan]
initial_time=2016-01-28T16:13:56
final_time=2016-01-28T16:14:15
ip_count=19
run=1026
dataset=1
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78622E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.58162E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.22186E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.42852E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.422E-8
mult1=-9.88488E-9
mult2=-2.70065E-9
rf_tmon=-4.63259E-3
rf_agc=3.33516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.10411E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62408E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=3.1128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=1.24478E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06599E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65365E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.41457E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.00793E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=1.03569E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.40701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=9.71522E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=2.04927E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=4.4199E-9
tplens_vset=0.0E0
tplens_vmon=-1.59156E0
tplens_imon=-3.8947E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9951E1
iondef3_imon=8.75269E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99023E1
iondef2_imon=9.44484E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.52478E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=9.30425E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20764E0
os_ea2_imon=-9.15793E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.11234E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58245E1
iondef1_imon=5.17658E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50136E1
iondef4_imon=5.111E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.6852E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23915E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.04457E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39005E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.71807E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.27248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.02952E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.39567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61558E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30464E1
cs_fil1_imon=9.22046E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30764E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64091E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.34005E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43985E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5E2	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80026E1	-1.33514E-3	-8.80004E1	4.76837E-5	5.14984E-3	9.34124E-2	1.57702E1	-1.98824E1	-1.99284E1	1.50124E1	2.15519E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16125E-2
2.0E0	1.46E2	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80025E1	-1.19209E-3	-8.79999E1	4.76837E-5	5.36442E-3	9.33886E-2	1.58356E1	-1.98557E1	-1.99487E1	1.49974E1	2.15716E-9	2.52384E-3	2.52384E-3	6.34518E-3	2.16806E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80028E1	-1.04904E-3	-8.80003E1	2.86102E-4	5.53131E-3	9.3317E-2	1.57751E1	-1.98631E1	-1.98892E1	1.50132E1	2.15791E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80027E1	-8.82149E-4	-8.8E1	-1.43051E-4	5.48363E-3	9.32455E-2	1.58011E1	-1.98837E1	-1.9993E1	1.50064E1	2.15546E-9	2.51709E-3	2.51709E-3	6.27577E-3	2.17646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80025E1	-7.86781E-4	-8.80001E1	-2.38419E-5	4.93526E-3	9.34601E-2	1.57885E1	-1.98627E1	-1.99648E1	1.50028E1	2.15051E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80026E1	-1.0252E-3	-8.80001E1	0.0E0	5.24521E-3	9.31978E-2	1.58107E1	-1.98332E1	-2.00111E1	1.49962E1	2.15987E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80025E1	-1.0252E-3	-8.80003E1	7.15256E-5	5.14984E-3	9.32693E-2	1.57926E1	-1.98588E1	-1.98623E1	1.5013E1	2.15425E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80023E1	-9.29832E-4	-8.80001E1	-4.76837E-5	5.126E-3	9.34601E-2	1.57704E1	-1.98308E1	-2.00603E1	1.50124E1	2.15441E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.15515E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80025E1	-9.05991E-4	-8.80002E1	-2.6226E-4	5.34058E-3	9.34601E-2	1.58179E1	-1.98717E1	-1.99222E1	1.50214E1	2.15706E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80027E1	-6.67572E-4	-8.8E1	-1.43051E-4	5.19753E-3	9.34124E-2	1.5762E1	-1.98561E1	-1.99672E1	1.5004E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80027E1	-1.09673E-3	-8.79998E1	-2.38419E-5	5.26905E-3	9.32217E-2	1.58011E1	-1.98867E1	-1.99095E1	1.49974E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15563E-2
1.5E1	2.0E0	1.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80029E1	-7.86781E-4	-8.79998E1	-2.38419E-5	5.29289E-3	9.34124E-2	1.58197E1	-1.98951E1	-2.00766E1	1.50202E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16313E-2
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80028E1	-1.04904E-3	-8.80004E1	-1.90735E-4	5.31673E-3	9.37462E-2	1.57656E1	-1.98681E1	-1.99702E1	1.50112E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16313E-2
1.7E1	3.8E1	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80027E1	-9.53674E-4	-8.80003E1	-4.76837E-5	5.24521E-3	9.33647E-2	1.57843E1	-1.98812E1	-1.99726E1	1.50201E1	2.158E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.17633E-2
1.8E1	1.59E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80025E1	-8.34465E-4	-8.80002E1	4.76837E-5	5.36442E-3	9.33886E-2	1.58251E1	-1.98825E1	-1.99654E1	1.49776E1	2.15992E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.17547E-2
1.9E1	3.24E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80028E1	-1.21593E-3	-8.79999E1	-2.14577E-4	5.6982E-3	9.32217E-2	1.57765E1	-1.98392E1	-1.99348E1	1.50238E1	2.15706E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16125E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80026E1	-1.28746E-3	-8.8E1	-1.90735E-4	5.67436E-3	9.31978E-2	1.5825E1	-1.98487E1	-1.99301E1	1.50136E1	2.15711E-9	2.52134E-3	2.52134E-3	6.32099E-3	2.16189E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80024E1	-1.00136E-3	-8.8E1	-7.15256E-5	5.55515E-3	9.32455E-2	1.57903E1	-1.98639E1	-1.99528E1	1.50208E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80028E1	-1.19209E-3	-8.80001E1	7.15256E-5	5.26905E-3	9.32217E-2	1.57879E1	-1.98499E1	-2.00823E1	1.50109E1	2.158E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.16689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80027E1	-1.12057E-3	-8.8E1	-2.6226E-4	5.07832E-3	9.32693E-2	1.58245E1	-1.99023E1	-1.9951E1	1.50136E1	2.15624E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16991E-2