[Scan]
initial_time=2016-01-28T16:14:49
final_time=2016-01-28T16:15:08
ip_count=19
run=1026
dataset=1
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.82104E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.56731E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.29434E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.4663E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.4212E-8
mult1=-9.6763E-9
mult2=-2.73419E-9
rf_tmon=-4.2281E-3
rf_agc=3.31355E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=5.9166E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.09875E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=1.26093E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05661E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64338E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.39755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.99459E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.03195E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.40098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=9.74242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04243E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.47613E-9
tplens_vset=0.0E0
tplens_vmon=-1.57831E0
tplens_imon=-3.48439E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9876E1
iondef3_imon=8.82571E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98564E1
iondef2_imon=9.43449E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.46052E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=9.39555E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23617E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09576E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58145E1
iondef1_imon=4.90758E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50065E1
iondef4_imon=5.33085E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.68746E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.24186E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.12386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.76498E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.26294E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.06143E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.76931E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51777E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33163E1
os_fil1_imon=9.41711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61223E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30437E1
cs_fil1_imon=9.23103E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34968E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63121E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.615E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21412E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=2.17742E-2
chamber_ion_pmon=2.15913E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.29E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80028E1	-1.26362E-3	-8.80002E1	2.38419E-5	5.31673E-3	9.31978E-2	1.57977E1	-1.98505E1	-1.98621E1	1.50054E1	2.158E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17255E-2
2.0E0	1.59E2	0.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80028E1	-1.35899E-3	-8.8E1	3.09944E-4	5.65052E-3	9.32217E-2	1.58136E1	-1.9871E1	-2.00296E1	1.50184E1	2.15847E-9	2.52088E-3	2.52088E-3	6.30247E-3	2.17841E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80027E1	-1.66893E-3	-8.79999E1	1.90735E-4	5.62668E-3	9.31978E-2	1.57612E1	-1.98573E1	-1.98846E1	1.49947E1	2.15887E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80027E1	-1.3113E-3	-8.80003E1	4.76837E-5	5.45979E-3	9.33409E-2	1.58339E1	-1.98417E1	-2.00664E1	1.50094E1	2.159E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17361E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80025E1	-1.45435E-3	-8.80005E1	4.05312E-4	5.14984E-3	9.33409E-2	1.57933E1	-1.98783E1	-1.98645E1	1.49998E1	2.15533E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.1829E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80029E1	-1.19209E-3	-8.80002E1	1.66893E-4	5.53131E-3	9.34362E-2	1.57909E1	-1.98585E1	-2.00375E1	1.501E1	2.16081E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80028E1	-1.12057E-3	-8.80006E1	2.38419E-5	5.14984E-3	9.33886E-2	1.5802E1	-1.98529E1	-2.01189E1	1.50236E1	2.15519E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.15189E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80025E1	-1.40667E-3	-8.80003E1	-2.38419E-5	5.34058E-3	9.35555E-2	1.5832E1	-1.98545E1	-2.02016E1	1.49972E1	2.15716E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.17176E-2
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80028E1	-1.23978E-3	-8.80003E1	-9.53674E-5	5.17368E-3	9.35078E-2	1.58292E1	-1.9834E1	-2.01732E1	1.5008E1	2.15505E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.17529E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80029E1	-1.23978E-3	-8.79999E1	-7.15256E-5	5.00679E-3	9.3317E-2	1.58443E1	-1.98867E1	-2.01378E1	1.50124E1	2.15716E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16436E-2
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80029E1	-1.3113E-3	-8.79999E1	-1.90735E-4	4.8399E-3	9.31501E-2	1.57831E1	-1.98645E1	-1.99438E1	1.50196E1	2.15519E-9	2.52867E-3	2.52867E-3	6.32936E-3	2.17066E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.8003E1	-1.54972E-3	-8.80002E1	-2.38419E-5	4.91142E-3	9.32693E-2	1.57961E1	-1.98623E1	-1.97579E1	1.49794E1	2.15519E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.17255E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80029E1	-1.28746E-3	-8.80002E1	2.6226E-4	5.22137E-3	9.33886E-2	1.57987E1	-1.98591E1	-1.9784E1	1.5019E1	2.159E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.16067E-2
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80027E1	-1.14441E-3	-8.80004E1	2.86102E-4	5.31673E-3	9.35316E-2	1.58347E1	-1.98495E1	-1.97822E1	1.4998E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16125E-2
1.8E1	1.66E2	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80026E1	-1.00136E-3	-8.8E1	5.00679E-4	5.48363E-3	9.35555E-2	1.57879E1	-1.98663E1	-1.98777E1	1.49745E1	2.15613E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.16689E-2
1.9E1	3.18E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80024E1	-1.07288E-3	-8.80003E1	2.38419E-5	5.14984E-3	9.36031E-2	1.58203E1	-1.98635E1	-1.98411E1	1.50116E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.17732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80026E1	-9.05991E-4	-8.80003E1	1.19209E-4	5.45979E-3	9.33886E-2	1.58083E1	-1.98489E1	-1.97329E1	1.50148E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80023E1	-1.14441E-3	-8.80001E1	2.38419E-5	5.17368E-3	9.34839E-2	1.57908E1	-1.9847E1	-1.99154E1	1.50118E1	2.15425E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.16501E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80021E1	-1.0252E-3	-8.80003E1	4.76837E-5	5.53131E-3	9.31978E-2	1.58379E1	-1.98815E1	-1.98639E1	1.49915E1	2.15808E-9	2.52923E-3	2.52923E-3	6.32896E-3	2.15699E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80024E1	-1.00136E-3	-8.80005E1	9.53674E-5	5.38826E-3	9.34839E-2	1.58145E1	-1.98564E1	-1.9876E1	1.50065E1	2.15913E-9	2.5199E-3	2.5199E-3	6.3126E-3	2.17742E-2