[Scan]
initial_time=2016-01-28T16:15:42
final_time=2016-01-28T16:16:02
ip_count=19
run=1026
dataset=1
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.85418E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.81527E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.20851E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.39679E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.41519E-8
mult1=-9.8433E-9
mult2=-2.7687E-9
rf_tmon=-4.31347E-3
rf_agc=3.31386E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=5.81515E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53601E1
cs_ef1b_imon=3.0992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.2473E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04256E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64605E1
os_ef1alow_imon=2.96934E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.01286E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.04206E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11241E1
os_restr1_imon=4.31536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.42756E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63644E1
os_ef1bup_imon=3.08328E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.80173E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.04864E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.45758E-9
tplens_vset=0.0E0
tplens_vmon=-1.58856E0
tplens_imon=-4.97618E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.0171E1
iondef3_imon=8.91852E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98765E1
iondef2_imon=9.19971E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=7.86328E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=9.40158E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3352E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7459E1
cs_ef2b_imon=3.11654E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24789E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71305E1
cs_ef2a_imon=3.19262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05308E0
os_ef2alow_imon=-2.57717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7639E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10876E1
os_restr2_imon=3.38369E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08756E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58295E1
iondef1_imon=4.85574E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5006E1
iondef4_imon=5.18616E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.69298E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.25411E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14547E0
cs_ionaccel_imon=-1.09103E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47145E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56323E1
einzel_imon=7.63123E-6
window_vset=0.0E0
window_vmon=1.73582E-1
window_imon=-1.2078E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39148E-4
mask2_vset=0.0E0
mask2_vmon=-1.86391E1
mask2_imon=-7.86723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.32513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.26527E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.60774E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=5.74977E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.40545E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61403E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30639E1
cs_fil1_imon=9.23342E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28112E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.59094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09159E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79763E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35054E-1
cs_fil2_imon=-2.35504E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14389E-1
res40_imon=-2.44979E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.27E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80026E1	-1.28746E-3	-8.80005E1	1.43051E-4	4.48227E-3	9.31978E-2	1.58439E1	-1.98676E1	-2.01384E1	1.49974E1	2.16081E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17444E-2
2.0E0	1.5E2	2.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80026E1	-1.00136E-3	-8.80004E1	4.76837E-5	4.76837E-3	9.33647E-2	1.57636E1	-1.98354E1	-2.01629E1	1.50135E1	2.15613E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17633E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80028E1	-9.53674E-4	-8.80005E1	9.53674E-5	4.95911E-3	9.28879E-2	1.58238E1	-1.991E1	-2.00647E1	1.49987E1	2.15791E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80026E1	-1.0252E-3	-8.80001E1	1.19209E-4	5.24521E-3	9.31978E-2	1.57761E1	-1.98788E1	-2.00045E1	1.50064E1	2.1567E-9	2.51686E-3	2.51686E-3	6.31009E-3	2.17918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80029E1	-1.21593E-3	-8.80001E1	9.53674E-5	4.81606E-3	9.31025E-2	1.57958E1	-1.98569E1	-1.99475E1	1.50148E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80028E1	-1.09673E-3	-8.80004E1	7.15256E-5	4.91142E-3	9.30071E-2	1.58109E1	-1.98759E1	-1.9798E1	1.49906E1	2.156E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.16186E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80028E1	-1.21593E-3	-8.80002E1	2.86102E-4	4.93526E-3	9.29832E-2	1.58185E1	-1.9857E1	-1.99184E1	1.50809E1	2.15546E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.16374E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80028E1	-1.00136E-3	-8.80004E1	9.53674E-5	4.93526E-3	9.32217E-2	1.57716E1	-1.98795E1	-2.00501E1	1.50064E1	2.158E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16125E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80029E1	-1.07288E-3	-8.80002E1	1.90735E-4	5.03063E-3	9.34839E-2	1.58005E1	-1.98801E1	-2.00297E1	1.49836E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16689E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80027E1	-1.12057E-3	-8.80001E1	3.33786E-4	5.07832E-3	9.36031E-2	1.57999E1	-1.98807E1	-1.98945E1	1.49902E1	2.158E-9	2.52538E-3	2.52538E-3	6.34037E-3	2.15938E-2
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80027E1	-1.00136E-3	-8.80006E1	0.0E0	4.88758E-3	9.33886E-2	1.57784E1	-1.98464E1	-1.98812E1	1.5022E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.15938E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80027E1	-9.05991E-4	-8.80001E1	2.38419E-5	5.07832E-3	9.2864E-2	1.58107E1	-1.98501E1	-2.00147E1	1.50225E1	2.15716E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.16067E-2
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80028E1	-9.05991E-4	-8.80002E1	2.6226E-4	5.22137E-3	9.35555E-2	1.57266E1	-1.98789E1	-2.01553E1	1.50103E1	2.15441E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.16991E-2
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80029E1	-9.77516E-4	-8.80003E1	2.14577E-4	5.19753E-3	9.32932E-2	1.58471E1	-1.98579E1	-2.0132E1	1.50094E1	2.15696E-9	2.52139E-3	2.52139E-3	6.29624E-3	2.17722E-2
1.8E1	1.8E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80027E1	-8.58307E-4	-8.8E1	3.09944E-4	5.24521E-3	9.35316E-2	1.57827E1	-1.98519E1	-2.00382E1	1.50085E1	2.15483E-9	2.51244E-3	2.51244E-3	6.34835E-3	2.17307E-2
1.9E1	3.66E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	-1.04904E-3	-8.80002E1	9.53674E-5	5.29289E-3	9.34124E-2	1.57987E1	-1.98621E1	-1.99702E1	1.49866E1	2.15872E-9	2.5257E-3	2.5257E-3	6.29002E-3	2.16712E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80025E1	-1.19209E-3	-8.80003E1	5.00679E-4	4.79221E-3	9.31501E-2	1.57664E1	-1.9873E1	-1.99263E1	1.4989E1	2.15987E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.1575E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80023E1	-9.29832E-4	-8.80001E1	4.52995E-4	5.14984E-3	9.31025E-2	1.58311E1	-1.98588E1	-1.99937E1	1.50022E1	2.15992E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.16252E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-1.04904E-3	-8.80003E1	4.05312E-4	5.10216E-3	9.34839E-2	1.57777E1	-1.98621E1	-2.01613E1	1.50094E1	2.15647E-9	2.51783E-3	2.51783E-3	6.29185E-3	2.18101E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80026E1	-9.29832E-4	-8.80001E1	3.09944E-4	5.07832E-3	9.3174E-2	1.58295E1	-1.98765E1	-2.0171E1	1.5006E1	2.15706E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17066E-2