[Scan]
initial_time=2016-01-28T16:16:36
final_time=2016-01-28T16:16:55
ip_count=19
run=1026
dataset=1
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82508E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.68271E-10
ql2_vset=
ql2_vmon=-1.28746E-3
ql2_imon=1.23842E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.404E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.41115E-8
mult1=-9.45141E-9
mult2=-2.67669E-9
rf_tmon=-4.25407E-3
rf_agc=3.35439E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=6.23131E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.74146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.10346E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05466E1
cs_ea1_imon=1.24536E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04422E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.40216E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.00928E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=1.04686E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.111E1
os_restr1_imon=4.3264E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.155E1
os_ea1_imon=2.41584E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63855E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=9.80259E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93289E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=2.05185E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.36205E-9
tplens_vset=0.0E0
tplens_vmon=-1.60604E0
tplens_imon=-3.69675E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9933E1
iondef3_imon=8.86818E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98609E1
iondef2_imon=9.30353E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.13782E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=9.43449E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27392E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.18339E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76379E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.37105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.10398E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58029E1
iondef1_imon=5.22613E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50248E1
iondef4_imon=5.20651E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.69102E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.25648E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11566E0
cs_ionaccel_imon=-1.0837E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.81196E-1
window_imon=-1.10803E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86234E1
mask2_imon=-7.70926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=6.80117E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=7.01353E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=8.00457E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31402E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33228E1
os_fil1_imon=9.43208E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61956E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30615E1
cs_fil1_imon=9.2337E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26366E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64259E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23533E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.50122E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21731E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.66736E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.17E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80029E1	-1.26362E-3	-8.80002E1	1.19209E-4	5.10216E-3	9.32217E-2	1.57723E1	-1.98687E1	-1.98645E1	1.50118E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16067E-2
2.0E0	1.51E2	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80025E1	-1.14441E-3	-8.79999E1	9.53674E-5	5.36442E-3	9.30786E-2	1.58347E1	-1.98647E1	-2.00737E1	1.49954E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80027E1	-1.12057E-3	-8.80001E1	2.38419E-4	5.14984E-3	9.28879E-2	1.57768E1	-1.9845E1	-1.98714E1	1.49882E1	2.15791E-9	2.5147E-3	2.5147E-3	6.30182E-3	2.18301E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80027E1	-1.52588E-3	-8.80003E1	0.0E0	5.24521E-3	9.29117E-2	1.58328E1	-1.9851E1	-1.98129E1	1.50228E1	2.16007E-9	2.52058E-3	2.52058E-3	6.33297E-3	2.18718E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80029E1	-1.26362E-3	-8.80003E1	4.76837E-5	5.36442E-3	9.31025E-2	1.57765E1	-1.98687E1	-1.98591E1	1.50136E1	2.15982E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.16377E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80028E1	-1.07288E-3	-8.80002E1	-2.38419E-5	5.07832E-3	9.3174E-2	1.57957E1	-1.98615E1	-1.99173E1	1.50057E1	2.158E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80027E1	-1.26362E-3	-8.80002E1	7.15256E-5	5.26905E-3	9.32932E-2	1.58185E1	-1.98104E1	-1.99678E1	1.50135E1	2.15706E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80027E1	-8.82149E-4	-8.80001E1	1.19209E-4	5.126E-3	9.31978E-2	1.58298E1	-1.98602E1	-1.99659E1	1.50273E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15938E-2
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80025E1	-1.00136E-3	-8.80004E1	9.53674E-5	5.14984E-3	9.33647E-2	1.57777E1	-1.98346E1	-2.00267E1	1.49873E1	2.1547E-9	2.5199E-3	2.5199E-3	6.29703E-3	2.16848E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80029E1	-1.33514E-3	-8.8E1	2.14577E-4	4.86374E-3	9.31978E-2	1.58269E1	-1.98699E1	-2.00609E1	1.50124E1	2.1549E-9	2.51838E-3	2.51838E-3	6.28468E-3	2.17618E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80027E1	-1.43051E-3	-8.80001E1	2.38419E-4	5.14984E-3	9.31978E-2	1.57945E1	-1.98699E1	-2.00009E1	1.50124E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17066E-2
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80026E1	-1.4782E-3	-8.80001E1	2.38419E-5	5.24521E-3	9.32455E-2	1.58722E1	-1.98664E1	-1.98971E1	1.49938E1	2.158E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.17066E-2
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80026E1	-1.14441E-3	-8.79999E1	1.43051E-4	4.95911E-3	9.30786E-2	1.58053E1	-1.98464E1	-2.00165E1	1.5004E1	2.15533E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.18104E-2
1.7E1	4.3E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80024E1	-1.09673E-3	-8.8E1	3.8147E-4	5.50747E-3	9.31978E-2	1.5762E1	-1.98555E1	-2.00357E1	1.50091E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16313E-2
1.8E1	2.22E2	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80025E1	-1.21593E-3	-8.79998E1	3.33786E-4	5.38826E-3	9.31501E-2	1.58233E1	-1.98603E1	-2.01204E1	1.50116E1	2.15425E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16125E-2
1.9E1	3.72E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80027E1	-1.09673E-3	-8.80004E1	1.43051E-4	5.19753E-3	9.31501E-2	1.58167E1	-1.98597E1	-2.01198E1	1.50062E1	2.15519E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.17255E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80024E1	-1.45435E-3	-8.80002E1	9.53674E-5	5.07832E-3	9.31025E-2	1.57896E1	-1.98487E1	-1.9952E1	1.5019E1	2.15613E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80026E1	-1.33514E-3	-8.79998E1	-1.19209E-4	5.26905E-3	9.31025E-2	1.58185E1	-1.98322E1	-1.9765E1	1.50136E1	2.15613E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.18011E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80024E1	-1.09673E-3	-8.80001E1	9.53674E-5	5.53131E-3	9.30786E-2	1.58239E1	-1.98495E1	-1.99234E1	1.49788E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80024E1	-1.28746E-3	-8.8E1	-1.90735E-4	5.17368E-3	9.34839E-2	1.58029E1	-1.98609E1	-1.9933E1	1.50248E1	2.15716E-9	2.52061E-3	2.52061E-3	6.28592E-3	2.17732E-2