[Scan]
initial_time=2016-01-28T16:17:02
final_time=2016-01-28T16:17:22
ip_count=19
run=1026
dataset=1
scan=79
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.79421E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.57923E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.21686E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.4096E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.40427E-8
mult1=-9.46389E-9
mult2=-2.82909E-9
rf_tmon=-5.18786E-3
rf_agc=3.27841E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.94902E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67162E0
bslens_imon=2.36344E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20203E1
lens5a_imon=1.97881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.11155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.26846E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11225E0
lens1_imon=1.40537E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64842E1
os_ef1alow_imon=2.96948E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03843E1
cs_ea2_imon=1.40969E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84102E1
cs_ef1a_imon=3.02203E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=1.05164E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11545E1
os_restr1_imon=4.29169E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=2.40784E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6348E1
os_ef1bup_imon=3.07924E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26419E0
cs_ionrep_imon=9.62339E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93405E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02113E1
cs_anode1_imon=2.06336E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=4.40604E-9
tplens_vset=0.0E0
tplens_vmon=-1.61281E0
tplens_imon=-4.19158E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9988E1
iondef3_imon=8.74548E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98759E1
iondef2_imon=9.36002E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98518E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=7.91943E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25273E0
ionrepsh_imon=9.25314E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33588E1
lens5b_imon=2.1647E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74287E1
cs_ef2b_imon=3.12906E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28772E0
os_ea2_imon=-7.85591E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.0042E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71394E1
cs_ef2a_imon=3.17733E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03445E0
os_ef2alow_imon=-2.72791E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55041E-1
os_ef2bup_imon=-5.23065E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11188E1
os_restr2_imon=3.37934E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.3176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01517E1
cs_anode2_imon=2.10306E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57955E1
iondef1_imon=5.0468E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5028E1
iondef4_imon=5.21235E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68692E-8
olens1_vset=0.0E0
olens1_vmon=8.58307E-4
olens1_imon=1.25648E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14117E0
cs_ionaccel_imon=-1.02698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5636E1
einzel_imon=7.66838E-6
window_vset=0.0E0
window_vmon=1.85435E-1
window_imon=-9.91952E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39065E-4
mask2_vset=0.0E0
mask2_vmon=-1.86331E1
mask2_imon=-6.14401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.55839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.64613E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41731E0
defgridb_imon=6.19572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.41356E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07628E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30669E1
cs_fil1_imon=9.22297E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38409E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6467E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53574E-2
os_fil2_imon=-2.74958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93413E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.37447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36364E-1
cs_fil2_imon=-2.30197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02593E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21738E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.16085E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00353E-1
res40_imon=-2.39707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.45E2	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80022E1	-1.07288E-3	-8.80004E1	9.53674E-5	5.36442E-3	9.31978E-2	1.58073E1	-1.98682E1	-1.9985E1	1.49877E1	2.15277E-9	2.5118E-3	2.5118E-3	6.32483E-3	2.1751E-2
2.0E0	1.43E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80023E1	-1.35899E-3	-8.80003E1	-4.76837E-5	5.19753E-3	9.31263E-2	1.58111E1	-1.98679E1	-1.98979E1	1.49922E1	2.15349E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.17547E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80023E1	-1.12057E-3	-8.80001E1	-9.53674E-5	5.19753E-3	9.30786E-2	1.57699E1	-1.98602E1	-1.98376E1	1.50045E1	2.15791E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80027E1	-9.53674E-4	-8.80001E1	-1.19209E-4	5.05447E-3	9.33409E-2	1.57963E1	-1.98507E1	-1.9841E1	1.50022E1	2.15636E-9	2.51498E-3	2.51498E-3	6.33388E-3	2.17282E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80025E1	-1.09673E-3	-8.80006E1	-4.76837E-5	5.126E-3	9.32455E-2	1.58425E1	-1.98657E1	-1.98987E1	1.49954E1	2.16177E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80023E1	-1.19209E-3	-8.8E1	2.38419E-5	5.29289E-3	9.34839E-2	1.57831E1	-1.98712E1	-1.97756E1	1.49889E1	2.15219E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.16186E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.8002E1	-1.43051E-3	-8.80004E1	2.6226E-4	5.17368E-3	9.32217E-2	1.57795E1	-1.98422E1	-1.9933E1	1.50172E1	2.15817E-9	2.52342E-3	2.52342E-3	6.3445E-3	2.16192E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80023E1	-8.82149E-4	-8.80003E1	3.33786E-4	5.14984E-3	9.32217E-2	1.58113E1	-1.98603E1	-1.9987E1	1.50118E1	2.156E-9	2.51248E-3	2.51248E-3	6.29624E-3	2.16186E-2
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80022E1	-7.15256E-4	-8.80004E1	3.33786E-4	5.31673E-3	9.33647E-2	1.58251E1	-1.9838E1	-1.98627E1	1.50172E1	2.15706E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.18201E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.80023E1	-7.86781E-4	-8.80002E1	0.0E0	5.53131E-3	9.32217E-2	1.5769E1	-1.98476E1	-1.99467E1	1.5019E1	2.15441E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.17918E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80023E1	-1.14441E-3	-8.80004E1	-1.43051E-4	5.67436E-3	9.33647E-2	1.58287E1	-1.98579E1	-2.00393E1	1.50202E1	2.15613E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17633E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80024E1	-1.04904E-3	-8.80002E1	2.6226E-4	5.38826E-3	9.3317E-2	1.58936E1	-1.9924E1	-1.9972E1	1.50169E1	2.15533E-9	2.51096E-3	2.51096E-3	6.32896E-3	2.17547E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80022E1	-1.14441E-3	-8.80001E1	0.0E0	4.64916E-3	9.3317E-2	1.57729E1	-1.98717E1	-2.00267E1	1.49881E1	2.15894E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.1839E-2
1.7E1	4.2E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80021E1	-1.23978E-3	-8.80003E1	-2.86102E-4	5.14984E-3	9.31978E-2	1.58445E1	-1.98529E1	-1.98263E1	1.50149E1	2.15505E-9	2.52473E-3	2.52473E-3	6.34099E-3	2.17337E-2
1.8E1	1.9E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80024E1	-1.26362E-3	-8.80003E1	9.53674E-5	5.03063E-3	9.3174E-2	1.58173E1	-1.98555E1	-2.00207E1	1.50058E1	2.15441E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.16252E-2
1.9E1	3.54E2	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80023E1	-1.3113E-3	-8.80004E1	-1.43051E-4	5.00679E-3	9.34124E-2	1.57795E1	-1.98723E1	-2.01222E1	1.50106E1	2.16081E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80024E1	-1.23978E-3	-8.80003E1	-9.53674E-5	5.4121E-3	9.34362E-2	1.57855E1	-1.98531E1	-2.00748E1	1.49968E1	2.15238E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16313E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-1.35899E-3	-8.80002E1	-1.43051E-4	5.03063E-3	9.32455E-2	1.57578E1	-1.98464E1	-1.99414E1	1.4992E1	2.15987E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.16501E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80025E1	-8.82149E-4	-8.80006E1	-1.19209E-4	5.05447E-3	9.32217E-2	1.57979E1	-1.986E1	-1.98812E1	1.5023E1	2.15636E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.16011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80022E1	-7.86781E-4	-8.80005E1	-1.90735E-4	5.29289E-3	9.32217E-2	1.57955E1	-1.98759E1	-1.9988E1	1.5028E1	2.16085E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.16806E-2