[Scan]
initial_time=2016-01-28T16:17:29
final_time=2016-01-28T16:17:49
ip_count=19
run=1026
dataset=1
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.7974E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.14174E-10
ql2_vset=
ql2_vmon=-1.3113E-3
ql2_imon=1.25767E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.42231E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.41074E-8
mult1=-9.80693E-9
mult2=-2.75853E-9
rf_tmon=-4.84541E-3
rf_agc=3.35246E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.11615E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.09478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=1.24465E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0684E0
lens1_imon=1.15935E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.42304E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.00036E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.05115E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.31509E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15695E1
os_ea1_imon=2.40876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.56898E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=2.04062E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=4.42034E-9
tplens_vset=0.0E0
tplens_vmon=-1.60132E0
tplens_imon=-3.30742E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99237E1
iondef3_imon=8.88588E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98759E1
iondef2_imon=9.24336E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=8.04257E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=9.23628E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25741E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.10405E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57901E1
iondef1_imon=5.11995E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49987E1
iondef4_imon=5.40293E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.68929E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.25715E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.20314E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.39767E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.01353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=5.95879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.40997E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07509E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61815E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30668E1
cs_fil1_imon=9.22268E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34007E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64316E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26444E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.15987E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7611E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.64E2	1.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80028E1	-1.45435E-3	-8.80006E1	-9.53674E-5	5.29289E-3	9.3174E-2	1.57813E1	-1.98651E1	-1.99095E1	1.49962E1	2.15706E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17822E-2
2.0E0	1.71E2	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80027E1	-1.43051E-3	-8.80002E1	0.0E0	5.45979E-3	9.32217E-2	1.58325E1	-1.98637E1	-1.97982E1	1.50184E1	2.15624E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.17361E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8003E1	-1.19209E-3	-8.80001E1	9.53674E-5	5.26905E-3	9.29832E-2	1.57885E1	-1.98881E1	-1.98747E1	1.50234E1	2.15726E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.16374E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80029E1	-1.74046E-3	-8.80002E1	2.38419E-4	5.22137E-3	9.2864E-2	1.57837E1	-1.98617E1	-2.00658E1	1.49947E1	2.15879E-9	2.51952E-3	2.51952E-3	6.33021E-3	2.16053E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80026E1	-1.12057E-3	-8.80001E1	9.53674E-5	4.93526E-3	9.30309E-2	1.58287E1	-1.98573E1	-1.98567E1	1.5004E1	2.159E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80026E1	-1.33514E-3	-8.80001E1	-1.66893E-4	5.22137E-3	9.31025E-2	1.57985E1	-1.98546E1	-2.00275E1	1.50328E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80027E1	-1.16825E-3	-8.80002E1	1.66893E-4	4.88758E-3	9.30071E-2	1.58173E1	-1.98416E1	-1.98531E1	1.4989E1	2.16269E-9	2.51182E-3	2.51182E-3	6.32328E-3	2.17829E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80028E1	-9.29832E-4	-8.79999E1	2.6226E-4	5.00679E-3	9.31501E-2	1.58215E1	-1.98669E1	-2.0067E1	1.50154E1	2.15791E-9	2.5147E-3	2.5147E-3	6.30182E-3	2.17337E-2
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80025E1	-1.33514E-3	-8.80001E1	9.53674E-5	5.4121E-3	9.31263E-2	1.58011E1	-1.98843E1	-1.99318E1	1.49992E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.17732E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80024E1	-1.04904E-3	-8.8E1	-7.15256E-5	5.07832E-3	9.32693E-2	1.58321E1	-1.98753E1	-1.99431E1	1.49981E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16501E-2
1.4E1	6.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80025E1	-1.26362E-3	-8.80003E1	-2.38419E-5	4.86374E-3	9.35316E-2	1.58005E1	-1.98729E1	-1.99738E1	1.4986E1	2.15808E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.16436E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80026E1	-1.35899E-3	-8.8E1	-2.14577E-4	4.93526E-3	9.32693E-2	1.58774E1	-1.98729E1	-1.98218E1	1.50046E1	2.15314E-9	2.52473E-3	2.52473E-3	6.28511E-3	2.17722E-2
1.6E1	1.8E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80027E1	-1.09673E-3	-8.80003E1	-1.66893E-4	5.03063E-3	9.2864E-2	1.57949E1	-1.98411E1	-1.98446E1	1.50196E1	2.15711E-9	2.51647E-3	2.51647E-3	6.31555E-3	2.18152E-2
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80026E1	-1.19209E-3	-8.80004E1	1.43051E-4	5.03063E-3	9.30786E-2	1.57926E1	-1.98688E1	-2.00511E1	1.50062E1					
1.8E1	2.04E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80024E1	-9.29832E-4	-8.80004E1	2.38419E-5	5.38826E-3	9.32217E-2	1.58162E1	-1.98753E1	-1.993E1	1.49991E1	2.15997E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.16192E-2
1.9E1	3.53E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80024E1	-8.58307E-4	-8.80003E1	2.86102E-4	5.29289E-3	9.31978E-2	1.58421E1	-1.98641E1	-1.98594E1	1.50034E1	2.15715E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.17054E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80026E1	-1.16825E-3	-8.80001E1	4.76837E-5	5.50747E-3	9.34124E-2	1.57843E1	-1.98657E1	-2.00345E1	1.50094E1	2.15519E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.18201E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80027E1	-1.19209E-3	-8.8E1	-1.19209E-4	5.24521E-3	9.34124E-2	1.58032E1	-1.98505E1	-1.98198E1	1.50022E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.18201E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80028E1	-1.07288E-3	-8.80001E1	-2.38419E-5	5.17368E-3	9.31501E-2	1.58071E1	-1.98777E1	-1.99991E1	1.49896E1	2.16088E-9	2.52025E-3	2.52025E-3	6.2863E-3	2.16918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80025E1	-1.3113E-3	-8.80002E1	-1.66893E-4	5.22137E-3	9.32455E-2	1.57901E1	-1.98759E1	-1.99237E1	1.49987E1	2.15987E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17255E-2