[Scan]
initial_time=2016-01-28T16:18:06
final_time=2016-01-28T16:18:25
ip_count=19
run=1026
dataset=2
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.20684E-1
ql1_imon=1.58724E-8
ql2_vset=
ql2_vmon=-7.99298E-1
ql2_imon=1.90167E-9
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=7.8655E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-7.20096E-10
mult1=-9.15653E-9
mult2=-2.70562E-9
rf_tmon=-3.44175E-3
rf_agc=3.41645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.43923E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66049E0
bslens_imon=2.60419E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98601E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05083E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.10343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04878E1
cs_ea1_imon=1.22958E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40037E0
lens1_imon=2.78495E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64314E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03812E1
cs_ea2_imon=1.40583E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.23302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10859E1
os_restr1_imon=4.28842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1512E1
os_ea1_imon=2.41636E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22139E0
cs_ionrep_imon=9.56702E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.06225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20637E0
olens4_imon=3.33146E-8
tplens_vset=1.4E-1
tplens_vmon=1.62405E0
tplens_imon=-1.69825E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25989E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.75657E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27064E0
ionrepsh_imon=9.4975E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33837E1
lens5b_imon=2.19145E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7509E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26426E0
os_ea2_imon=-7.01685E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70927E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14242E-1
os_ef2bup_imon=-5.50268E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10613E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.29754E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.08289E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.57524E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.7192E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08449E0
cs_ionaccel_imon=-9.94115E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.39257E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=6.99116E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93668E3
defgrida_imon=7.4813E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50085E3
multb_neg_imon=7.63078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21219E0
defgridb_imon=5.92396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33208E1
os_fil1_imon=9.40114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.21974E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29322E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62063E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65548E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.55945E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.85818E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21675E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.2085E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-8.22544E-1	-7.99227E-1	-9.13172E0	-9.14207E0	5.19753E-3	9.30309E-2	2.73303E1	-3.26837E1	-3.25437E1	2.67972E1	2.15716E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.17547E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.21948E-1	-7.99322E-1	-9.13179E0	-9.14183E0	5.17368E-3	9.32932E-2	2.72806E1	-3.26805E1	-3.27025E1	2.67976E1	2.16177E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.16436E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.21853E-1	-7.99155E-1	-9.13191E0	-9.14199E0	5.14984E-3	9.33886E-2	2.72761E1	-3.26805E1	-3.26191E1	2.68001E1	2.15791E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.21519E-1	-7.99298E-1	-9.13148E0	-9.14195E0	4.93526E-3	9.33409E-2	2.73388E1	-3.26578E1	-3.25703E1	2.67839E1	2.15546E-9	2.52342E-3	2.52342E-3	6.30212E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.20923E-1	-7.99274E-1	-9.13181E0	-9.14197E0	5.45979E-3	9.3317E-2	2.73145E1	-3.26549E1	-3.25936E1	2.68099E1	2.15696E-9	2.51248E-3	2.51248E-3	6.33538E-3	2.16377E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.20971E-1	-7.99513E-1	-9.13177E0	-9.14199E0	5.29289E-3	9.33647E-2	2.72169E1	-3.26493E1	-3.26468E1	2.67962E1	2.16175E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.17444E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.21257E-1	-7.99322E-1	-9.13172E0	-9.14161E0	5.22137E-3	9.32217E-2	2.73488E1	-3.26785E1	-3.25942E1	2.68118E1	2.15804E-9	2.51972E-3	2.51972E-3	6.31283E-3	2.16841E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.21114E-1	-7.99131E-1	-9.13179E0	-9.1418E0	4.93526E-3	9.30309E-2	2.72665E1	-3.26903E1	-3.26223E1	2.68082E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.21066E-1	-7.99274E-1	-9.13153E0	-9.14159E0	5.05447E-3	9.30071E-2	2.73027E1	-3.26182E1	-3.26086E1	2.68039E1	2.15505E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.17337E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.21185E-1	-7.98941E-1	-9.13162E0	-9.14176E0	4.95911E-3	9.33409E-2	2.7278E1	-3.26844E1	-3.26537E1	2.67923E1	2.15894E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.21185E-1	-7.99155E-1	-9.13167E0	-9.14207E0	4.88758E-3	9.31263E-2	2.73148E1	-3.26573E1	-3.25463E1	2.68076E1	2.15441E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.21066E-1	-7.99561E-1	-9.13146E0	-9.14204E0	4.60148E-3	9.30548E-2	2.72843E1	-3.26542E1	-3.27472E1	2.67872E1	2.15292E-9	2.52717E-3	2.52717E-3	6.323E-3	2.16491E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.21185E-1	-7.99322E-1	-9.1315E0	-9.14197E0	4.79221E-3	9.3317E-2	2.73159E1	-3.2638E1	-3.26362E1	2.68016E1	2.15685E-9	2.52749E-3	2.52749E-3	6.33592E-3	2.17422E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.21018E-1	-7.99131E-1	-9.13115E0	-9.14199E0	4.88758E-3	9.30071E-2	2.72756E1	-3.26962E1	-3.26349E1	2.67812E1	2.15716E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.17918E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.20518E-1	-7.99298E-1	-9.13148E0	-9.14204E0	5.24521E-3	9.30071E-2	2.72811E1	-3.26651E1	-3.26152E1	2.67598E1	2.15987E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17822E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.20565E-1	-7.98988E-1	-9.13136E0	-9.14185E0	5.26905E-3	9.32455E-2	2.72883E1	-3.26518E1	-3.25858E1	2.67917E1	2.15716E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.17361E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.20684E-1	-7.98917E-1	-9.13122E0	-9.14178E0	5.07832E-3	9.3317E-2	2.73308E1	-3.26199E1	-3.27111E1	2.67998E1	2.15519E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.21209E-1	-7.99298E-1	-9.13124E0	-9.1419E0	5.10216E-3	9.30786E-2	2.73497E1	-3.26579E1	-3.26069E1	2.67862E1	2.156E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.17529E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.20923E-1	-7.99394E-1	-9.13115E0	-9.14192E0	4.86374E-3	9.29356E-2	2.72931E1	-3.26765E1	-3.2644E1	2.68508E1	2.15817E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.17464E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.20684E-1	-7.99298E-1	-9.13081E0	-9.14199E0	5.24521E-3	9.31978E-2	2.73246E1	-3.26738E1	-3.25989E1	2.67968E1	2.15613E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.18201E-2