[Scan]
initial_time=2016-01-28T16:18:33
final_time=2016-01-28T16:18:52
ip_count=19
run=1026
dataset=2
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.20231E-1
ql1_imon=1.42334E-8
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=1.99174E-9
ql3_vset=
ql3_vmon=-9.13048E0
ql3_imon=4.09708E-9
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-3.98111E-10
mult1=-9.55978E-9
mult2=-2.75254E-9
rf_tmon=-4.47037E-3
rf_agc=3.364E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.61778E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63725E0
bslens_imon=2.68094E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20051E1
lens5a_imon=1.98584E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=3.09966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.023E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04975E1
cs_ea1_imon=1.23559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42058E0
lens1_imon=2.55635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6419E1
os_ef1alow_imon=2.97242E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03664E1
cs_ea2_imon=1.39833E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.01471E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.24037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11267E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15397E1
os_ea1_imon=2.41294E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63542E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23198E0
cs_ionrep_imon=9.6695E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.04538E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.25195E-8
tplens_vset=1.4E-1
tplens_vmon=1.63754E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27858E1
iondef3_imon=1.49684E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57704E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02863E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.89948E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26443E0
ionrepsh_imon=9.27238E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33548E1
lens5b_imon=2.20387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75006E1
cs_ef2b_imon=3.12511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20797E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.18237E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06204E0
os_ef2alow_imon=-2.60426E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94513E-1
os_ef2bup_imon=-5.37002E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1098E1
os_restr2_imon=3.40693E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.31758E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10264E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.08959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.21384E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.72451E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11891E0
cs_ionaccel_imon=-1.01366E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47159E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.62422E-6
window_vset=0.0E0
window_vmon=1.82042E-1
window_imon=-1.07728E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86207E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92686E3
multa_neg_imon=8.00315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.47306E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=6.8624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39699E0
defgridb_imon=6.1616E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.45851E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06936E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61518E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=9.22391E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28264E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55349E-2
os_fil2_imon=-2.7124E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.57526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32341E-1
cs_fil2_imon=-2.24458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.17176E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93691E-1
res40_imon=-2.55934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.20303E-1	-7.99441E-1	-9.13069E0	-9.14176E0	5.17368E-3	9.30786E-2	2.72791E1	-3.26785E1	-3.26767E1	2.67974E1	2.15872E-9	2.51642E-3	2.51642E-3	6.31902E-3	2.16512E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.20398E-1	-7.99012E-1	-9.13067E0	-9.14187E0	5.48363E-3	9.34839E-2	2.72793E1	-3.26537E1	-3.25487E1	2.68254E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.20494E-1	-7.99108E-1	-9.13045E0	-9.14223E0	5.10216E-3	9.37223E-2	2.73134E1	-3.2639E1	-3.27222E1	2.67978E1	2.15599E-9	2.51932E-3	2.51932E-3	6.31611E-3	2.18614E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.20851E-1	-7.99131E-1	-9.13057E0	-9.14233E0	4.98295E-3	9.3317E-2	2.73222E1	-3.26868E1	-3.25257E1	2.67992E1	2.15533E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.17918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.20732E-1	-7.99561E-1	-9.13057E0	-9.14202E0	5.19753E-3	9.31025E-2	2.72973E1	-3.26591E1	-3.27732E1	2.68016E1	2.15894E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.20637E-1	-7.9937E-1	-9.1305E0	-9.14199E0	5.126E-3	9.3174E-2	2.73045E1	-3.26759E1	-3.26609E1	2.68118E1	2.15716E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16621E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.20851E-1	-7.99561E-1	-9.13041E0	-9.14214E0	5.19753E-3	9.31978E-2	2.72787E1	-3.26579E1	-3.26206E1	2.6804E1	2.15894E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.17633E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.20732E-1	-7.9906E-1	-9.1301E0	-9.14242E0	5.126E-3	9.32932E-2	2.7321E1	-3.26921E1	-3.26561E1	2.68376E1	2.15706E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.1877E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.20994E-1	-7.99274E-1	-9.13045E0	-9.14192E0	5.31673E-3	9.32693E-2	2.73069E1	-3.26487E1	-3.24675E1	2.68004E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.20923E-1	-7.99298E-1	-9.13067E0	-9.1419E0	5.34058E-3	9.3174E-2	2.73293E1	-3.26313E1	-3.24927E1	2.68256E1	2.15987E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17066E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.20994E-1	-7.99084E-1	-9.13053E0	-9.14216E0	5.36442E-3	9.31501E-2	2.73273E1	-3.26849E1	-3.25942E1	2.68088E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.17255E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.2078E-1	-7.9937E-1	-9.13076E0	-9.14209E0	4.93526E-3	9.30786E-2	2.72366E1	-3.26224E1	-3.28008E1	2.68052E1	2.15992E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.17547E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.20851E-1	-7.99417E-1	-9.13076E0	-9.14221E0	5.126E-3	9.3317E-2	2.72913E1	-3.26765E1	-3.262E1	2.67932E1	2.15409E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.17337E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.20732E-1	-7.99537E-1	-9.13064E0	-9.14216E0	5.36442E-3	9.30548E-2	2.72769E1	-3.26675E1	-3.26633E1	2.6785E1	2.15808E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.17918E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.20565E-1	-7.99537E-1	-9.13041E0	-9.14235E0	4.98295E-3	9.31263E-2	2.73364E1	-3.26992E1	-3.25688E1	2.6795E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.18011E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.20565E-1	-7.99417E-1	-9.13033E0	-9.14214E0	5.17368E-3	9.3174E-2	2.72817E1	-3.26446E1	-3.26981E1	2.67926E1	2.15716E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.16806E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.20518E-1	-7.99084E-1	-9.13079E0	-9.14214E0	4.95911E-3	9.30548E-2	2.73622E1	-3.26561E1	-3.26032E1	2.68136E1	2.15425E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.16689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.20398E-1	-7.98869E-1	-9.13062E0	-9.14197E0	5.19753E-3	9.31978E-2	2.72955E1	-3.26362E1	-3.25137E1	2.6813E1	2.15753E-9	2.5188E-3	2.5188E-3	6.31563E-3	2.17727E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.20351E-1	-7.99036E-1	-9.13076E0	-9.14178E0	5.00679E-3	9.32217E-2	2.72957E1	-3.26738E1	-3.25959E1	2.6846E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.20231E-1	-7.99203E-1	-9.13048E0	-9.14168E0	4.88758E-3	9.32932E-2	2.73213E1	-3.26747E1	-3.27858E1	2.67902E1	2.15533E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.17176E-2