[Scan]
initial_time=2016-01-28T16:18:59
final_time=2016-01-28T16:19:19
ip_count=19
run=1026
dataset=2
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.20279E-1
ql1_imon=1.37937E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=2.00608E-9
ql3_vset=
ql3_vmon=-9.13041E0
ql3_imon=3.04521E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-2.69115E-10
mult1=-9.60794E-9
mult2=-2.79446E-9
rf_tmon=-4.206E-3
rf_agc=3.37782E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.62747E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65672E0
bslens_imon=2.47849E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19798E1
lens5a_imon=1.98428E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04835E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53593E1
cs_ef1b_imon=3.10454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02113E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0478E1
cs_ea1_imon=1.24766E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39073E0
lens1_imon=2.66537E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64907E1
os_ef1alow_imon=2.96403E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03703E1
cs_ea2_imon=1.40495E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.00101E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.22905E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11325E1
os_restr1_imon=4.30181E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15514E1
os_ea1_imon=2.42501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63343E1
os_ef1bup_imon=3.07885E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2495E0
cs_ionrep_imon=9.76684E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02036E1
cs_anode1_imon=2.04701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.23194E-8
tplens_vset=1.4E-1
tplens_vmon=1.62651E0
tplens_imon=-2.42964E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49216E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57159E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.93838E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30531E0
ionrepsh_imon=9.40865E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33775E1
lens5b_imon=2.19997E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74404E1
cs_ef2b_imon=3.12284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29557E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18745E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06364E0
os_ef2alow_imon=-2.68899E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06938E-1
os_ef2bup_imon=-5.33574E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10974E1
os_restr2_imon=3.40191E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29967E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01718E1
cs_anode2_imon=2.08048E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.09816E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.06693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.27286E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.70215E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-9.29676E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.46965E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.91923E-1
window_imon=-1.26052E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39251E-4
mask2_vset=0.0E0
mask2_vmon=-1.86474E1
mask2_imon=-8.59614E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.44251E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.95973E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.15051E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31904E0
defgridb_imon=6.24336E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.4207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07511E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61742E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=9.23082E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3056E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62487E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3167E-2
os_fil2_imon=-2.71066E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88224E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.39568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.74309E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21871E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.16501E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55592E-1
res40_imon=-2.46713E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.2016E-1	-7.99036E-1	-9.13062E0	-9.1418E0	5.126E-3	9.32217E-2	2.73011E1	-3.26704E1	-3.25025E1	2.68082E1	2.15475E-9	2.52454E-3	2.52454E-3	6.31321E-3	2.15916E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.20017E-1	-7.99227E-1	-9.13053E0	-9.14209E0	5.17368E-3	9.31263E-2	2.73229E1	-3.26648E1	-3.25452E1	2.67563E1	2.15913E-9	2.52405E-3	2.52405E-3	6.323E-3	2.16313E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.19993E-1	-7.99417E-1	-9.13064E0	-9.14195E0	5.24521E-3	9.29594E-2	2.72923E1	-3.26599E1	-3.27047E1	2.68092E1	2.15872E-9	2.52106E-3	2.52106E-3	6.33648E-3	2.17111E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19993E-1	-7.99155E-1	-9.13067E0	-9.14202E0	5.26905E-3	9.32693E-2	2.7329E1	-3.2643E1	-3.26894E1	2.68314E1	2.15879E-9	2.52566E-3	2.52566E-3	6.31196E-3	2.17775E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.20088E-1	-7.99131E-1	-9.13088E0	-9.14195E0	5.126E-3	9.33886E-2	2.7285E1	-3.26938E1	-3.25523E1	2.67986E1	2.15915E-9	2.52219E-3	2.52219E-3	6.31429E-3	2.16707E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.20231E-1	-7.99441E-1	-9.1306E0	-9.14166E0	5.126E-3	9.32932E-2	2.7288E1	-3.26526E1	-3.25039E1	2.68134E1	2.15624E-9	2.53031E-3	2.53031E-3	6.32896E-3	2.16436E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.20351E-1	-7.99131E-1	-9.1305E0	-9.14171E0	5.19753E-3	9.32455E-2	2.73076E1	-3.26603E1	-3.25025E1	2.68232E1	2.15716E-9	2.52169E-3	2.52169E-3	6.2752E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.20017E-1	-7.98917E-1	-9.13069E0	-9.14166E0	5.14984E-3	9.34124E-2	2.73027E1	-3.26633E1	-3.24085E1	2.68094E1	2.15879E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.1703E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.19969E-1	-7.98798E-1	-9.13079E0	-9.14159E0	5.07832E-3	9.34362E-2	2.7298E1	-3.26408E1	-3.24673E1	2.68268E1	2.15894E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.19921E-1	-7.99108E-1	-9.13086E0	-9.14183E0	5.36442E-3	9.36031E-2	2.73145E1	-3.2652E1	-3.27346E1	2.67833E1	2.15706E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.15938E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.19993E-1	-7.99203E-1	-9.13093E0	-9.14164E0	5.4121E-3	9.34362E-2	2.72931E1	-3.26567E1	-3.25665E1	2.67746E1	2.15726E-9	2.51603E-3	2.51603E-3	6.32858E-3	2.16736E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.20017E-1	-7.98988E-1	-9.13079E0	-9.14159E0	5.31673E-3	9.33409E-2	2.72674E1	-3.26619E1	-3.26028E1	2.67688E1	2.15987E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.16125E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.20017E-1	-7.99155E-1	-9.1306E0	-9.14197E0	5.03063E-3	9.36508E-2	2.73175E1	-3.26508E1	-3.27493E1	2.68148E1	2.15726E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.17464E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.20136E-1	-7.98988E-1	-9.13081E0	-9.14204E0	5.26905E-3	9.33647E-2	2.73027E1	-3.26615E1	-3.25623E1	2.68082E1	2.15992E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.16806E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.20017E-1	-7.99274E-1	-9.13076E0	-9.14197E0	5.07832E-3	9.30548E-2	2.73086E1	-3.26773E1	-3.25706E1	2.68166E1	2.15982E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.16569E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.19731E-1	-7.99298E-1	-9.13072E0	-9.14204E0	5.38826E-3	9.3174E-2	2.72883E1	-3.26891E1	-3.27245E1	2.68046E1	2.15716E-9	2.52599E-3	2.52599E-3	6.30202E-3	2.16067E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.19921E-1	-7.99155E-1	-9.13043E0	-9.14204E0	5.26905E-3	9.32932E-2	2.73345E1	-3.26374E1	-3.26164E1	2.6822E1	2.15894E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.1985E-1	-7.99084E-1	-9.13048E0	-9.1418E0	5.19753E-3	9.3627E-2	2.72992E1	-3.26779E1	-3.24933E1	2.67839E1	2.15425E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.17066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.20041E-1	-7.98988E-1	-9.1305E0	-9.14204E0	5.34058E-3	9.32693E-2	2.73255E1	-3.26591E1	-3.27095E1	2.67866E1	2.15716E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.16436E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.20279E-1	-7.9906E-1	-9.13041E0	-9.14211E0	5.10216E-3	9.31025E-2	2.72991E1	-3.26669E1	-3.2641E1	2.68046E1	2.15894E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16501E-2