[Scan]
initial_time=2016-01-28T16:20:46
final_time=2016-01-28T16:21:06
ip_count=19
run=1026
dataset=2
scan=87
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.18753E-1
ql1_imon=1.33554E-8
ql2_vset=
ql2_vmon=-7.99251E-1
ql2_imon=2.01474E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=1.62092E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-1.31583E-10
mult1=-9.37917E-9
mult2=-2.69665E-9
rf_tmon=-4.48238E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.67217E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65801E0
bslens_imon=2.56025E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98623E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04785E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.10182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04897E1
cs_ea1_imon=1.23442E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40695E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6431E1
os_ef1alow_imon=2.97259E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03742E1
cs_ea2_imon=1.42286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.0049E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25246E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=4.30259E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15332E1
os_ea1_imon=2.39464E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63525E1
os_ef1bup_imon=3.07457E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=9.63836E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93288E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.04857E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.23766E-8
tplens_vset=1.4E-1
tplens_vmon=1.58628E0
tplens_imon=-7.16571E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.48983E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.56419E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=4.05045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30206E0
ionrepsh_imon=9.26849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33697E1
lens5b_imon=2.1735E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74508E1
cs_ef2b_imon=3.11972E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27027E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00537E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7129E1
cs_ef2a_imon=3.17538E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07532E0
os_ef2alow_imon=-2.65785E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9591E-1
os_ef2bup_imon=-5.45251E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10987E1
os_restr2_imon=3.39063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01945E1
cs_anode2_imon=2.08788E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09504E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.07238E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.39085E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.80714E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10614E0
cs_ionaccel_imon=-1.0192E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.55939E-6
window_vset=0.0E0
window_vmon=1.68569E-1
window_imon=-1.171E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-6.72785E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.34128E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.84683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.32571E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21834E0
defgridb_imon=6.0448E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.43484E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62007E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.24944E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31727E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64363E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.13562E-2
os_fil2_imon=-2.78202E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19939E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34406E-1
cs_fil2_imon=-2.3344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20109E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22127E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22409E-1
res40_imon=-2.51383E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.18896E-1	-7.98941E-1	-9.13086E0	-9.14197E0	5.07832E-3	9.35555E-2	2.73405E1	-3.26422E1	-3.26218E1	2.67992E1	2.15459E-9	2.52029E-3	2.52029E-3	6.32518E-3	2.16584E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18944E-1	-7.99489E-1	-9.13103E0	-9.14199E0	5.17368E-3	9.34601E-2	2.73082E1	-3.26658E1	-3.25134E1	2.68057E1	2.15716E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.18663E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18801E-1	-7.99417E-1	-9.13098E0	-9.1418E0	5.34058E-3	9.31978E-2	2.72883E1	-3.26521E1	-3.26156E1	2.67987E1	2.1549E-9	2.52066E-3	2.52066E-3	6.3245E-3	2.16639E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18706E-1	-7.99322E-1	-9.13112E0	-9.1419E0	5.29289E-3	9.30071E-2	2.73009E1	-3.26669E1	-3.26278E1	2.68282E1	2.15647E-9	2.51783E-3	2.51783E-3	6.3074E-3	2.16313E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18801E-1	-7.99537E-1	-9.13095E0	-9.14199E0	5.03063E-3	9.32693E-2	2.72853E1	-3.26561E1	-3.2459E1	2.68316E1	2.15791E-9	2.52809E-3	2.52809E-3	6.30182E-3	2.17145E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.19039E-1	-7.99227E-1	-9.13105E0	-9.1418E0	5.57899E-3	9.31978E-2	2.72835E1	-3.26795E1	-3.25082E1	2.68052E1	2.15894E-9	2.53087E-3	2.53087E-3	6.29645E-3	2.1839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1892E-1	-7.99537E-1	-9.13076E0	-9.14199E0	5.53131E-3	9.31978E-2	2.72853E1	-3.26849E1	-3.248E1	2.6819E1	2.15613E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.18992E-1	-7.99251E-1	-9.13095E0	-9.1418E0	5.31673E-3	9.31263E-2	2.73123E1	-3.26837E1	-3.26416E1	2.67972E1	2.15519E-9	2.53087E-3	2.53087E-3	6.32936E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1892E-1	-7.99251E-1	-9.13105E0	-9.14192E0	4.8399E-3	9.31501E-2	2.73257E1	-3.26425E1	-3.25824E1	2.68124E1	2.15706E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16878E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.19135E-1	-7.99251E-1	-9.13098E0	-9.14202E0	4.95911E-3	9.31501E-2	2.73139E1	-3.26449E1	-3.25069E1	2.68105E1	2.15533E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.18663E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.19016E-1	-7.99203E-1	-9.13115E0	-9.14214E0	5.07832E-3	9.31263E-2	2.72883E1	-3.26819E1	-3.25479E1	2.68088E1	2.15808E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.16806E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18944E-1	-7.99108E-1	-9.13103E0	-9.14197E0	5.19753E-3	9.31263E-2	2.73339E1	-3.26861E1	-3.26771E1	2.68142E1	2.15624E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16067E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.18706E-1	-7.99012E-1	-9.13119E0	-9.14233E0	5.07832E-3	9.32217E-2	2.73452E1	-3.26791E1	-3.26933E1	2.67956E1	2.15409E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.16186E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.18682E-1	-7.99227E-1	-9.13124E0	-9.14173E0	5.05447E-3	9.30309E-2	2.72678E1	-3.26416E1	-3.25479E1	2.67908E1	2.14982E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.16806E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18777E-1	-7.99346E-1	-9.13115E0	-9.14195E0	4.95911E-3	9.30786E-2	2.73147E1	-3.26506E1	-3.27348E1	2.6798E1	2.16081E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.1877E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.19016E-1	-7.99561E-1	-9.13105E0	-9.14214E0	5.07832E-3	9.33647E-2	2.72604E1	-3.26523E1	-3.27295E1	2.68046E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.18011E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.18872E-1	-7.9937E-1	-9.13095E0	-9.14192E0	4.95911E-3	9.32693E-2	2.73487E1	-3.26971E1	-3.26282E1	2.68132E1	2.158E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.16313E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18706E-1	-7.99322E-1	-9.13091E0	-9.14209E0	4.60148E-3	9.33409E-2	2.72751E1	-3.26734E1	-3.26198E1	2.68032E1	2.1547E-9	2.52405E-3	2.52405E-3	6.3074E-3	2.17027E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.1892E-1	-7.99346E-1	-9.131E0	-9.14216E0	5.00679E-3	9.28164E-2	2.73027E1	-3.26655E1	-3.25369E1	2.68352E1	2.15791E-9	2.51804E-3	2.51804E-3	6.29067E-3	2.17529E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.18753E-1	-7.99251E-1	-9.13124E0	-9.14211E0	4.79221E-3	9.28164E-2	2.73057E1	-3.26651E1	-3.26302E1	2.67836E1	2.15894E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.16313E-2