[Scan]
initial_time=2016-01-28T16:21:40
final_time=2016-01-28T16:21:59
ip_count=19
run=1026
dataset=2
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.1861E-1
ql1_imon=1.34163E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.00531E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.26939E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.27852E-10
mult1=-9.58386E-9
mult2=-2.70464E-9
rf_tmon=-4.37423E-3
rf_agc=3.36881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.67805E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64121E0
bslens_imon=2.4274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19595E1
lens5a_imon=1.96932E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53457E1
cs_ef1b_imon=3.10882E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02129E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04942E1
cs_ea1_imon=1.22164E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40567E0
lens1_imon=2.57439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65212E1
os_ef1alow_imon=2.96053E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03617E1
cs_ea2_imon=1.41511E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=3.02592E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.2511E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11694E1
os_restr1_imon=4.29558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15055E1
os_ea1_imon=2.41388E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08664E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25673E0
cs_ionrep_imon=9.7453E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01776E1
cs_anode1_imon=2.03261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.23408E-8
tplens_vset=1.4E-1
tplens_vmon=1.61561E0
tplens_imon=-3.25758E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27095E1
iondef3_imon=1.50609E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26254E1
iondef2_imon=1.57204E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9837E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.94124E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.266E0
ionrepsh_imon=9.24473E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.18624E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74404E1
cs_ef2b_imon=3.11311E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31566E0
os_ea2_imon=-7.86603E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71212E1
cs_ef2a_imon=3.16176E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02666E0
os_ef2alow_imon=-2.69677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08885E-1
os_ef2bup_imon=-5.32406E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11091E1
os_restr2_imon=3.3988E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.2818E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0151E1
cs_anode2_imon=2.10306E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.10484E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.10196E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.38059E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.82288E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15609E0
cs_ionaccel_imon=-9.84168E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.52436E-6
window_vset=0.0E0
window_vmon=2.03599E-1
window_imon=-1.04255E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38886E-4
mask2_vset=0.0E0
mask2_vmon=-1.86039E1
mask2_imon=-6.37754E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.19874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.53528E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.36162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37916E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.43114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06564E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61239E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.23056E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.40485E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14557E-2
os_fil2_imon=-2.79499E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71357E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.67486E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35105E-1
cs_fil2_imon=-2.03599E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68114E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.1829E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35384E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18276E-1	-7.99441E-1	-9.13098E0	-9.14185E0	5.07832E-3	9.28879E-2	2.73216E1	-3.26644E1	-3.26891E1	2.68123E1	2.15762E-9	2.51911E-3	2.51911E-3	6.31925E-3	2.17195E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18253E-1	-7.99465E-1	-9.13072E0	-9.1418E0	4.8399E-3	9.28402E-2	2.72745E1	-3.26383E1	-3.25697E1	2.68026E1	2.15533E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17176E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18253E-1	-7.99513E-1	-9.13112E0	-9.14218E0	5.31673E-3	9.29594E-2	2.7308E1	-3.26706E1	-3.27303E1	2.67873E1	2.15791E-9	2.52809E-3	2.52809E-3	6.31858E-3	2.1676E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18563E-1	-7.99108E-1	-9.13079E0	-9.14192E0	5.07832E-3	9.27448E-2	2.72739E1	-3.26861E1	-3.25942E1	2.6801E1	2.15716E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18634E-1	-7.99251E-1	-9.13086E0	-9.14204E0	5.03063E-3	9.29594E-2	2.73003E1	-3.26783E1	-3.26657E1	2.68214E1	2.15425E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.17633E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.18872E-1	-7.98893E-1	-9.131E0	-9.14216E0	4.93526E-3	9.31501E-2	2.72516E1	-3.26597E1	-3.25167E1	2.67932E1	2.15613E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.18872E-1	-7.99227E-1	-9.13098E0	-9.14192E0	5.00679E-3	9.30548E-2	2.72835E1	-3.26422E1	-3.27306E1	2.6792E1	2.15425E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18849E-1	-7.99227E-1	-9.13086E0	-9.14228E0	5.126E-3	9.33647E-2	2.72803E1	-3.26431E1	-3.25458E1	2.6807E1	2.15987E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.15563E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18801E-1	-7.99251E-1	-9.13107E0	-9.14237E0	5.05447E-3	9.32455E-2	2.72871E1	-3.26909E1	-3.2728E1	2.68169E1	2.16088E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.17282E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18729E-1	-7.99203E-1	-9.13086E0	-9.14221E0	5.03063E-3	9.32693E-2	2.73637E1	-3.2641E1	-3.25511E1	2.67951E1	2.15455E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.18377E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.18515E-1	-7.99251E-1	-9.13103E0	-9.14233E0	5.03063E-3	9.33647E-2	2.72997E1	-3.26975E1	-3.26897E1	2.68106E1	2.15977E-9	2.51725E-3	2.51725E-3	6.30171E-3	2.17422E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.18729E-1	-7.99441E-1	-9.13105E0	-9.14242E0	5.126E-3	9.35316E-2	2.73062E1	-3.26641E1	-3.2585E1	2.68036E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1839E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.18634E-1	-7.98941E-1	-9.13084E0	-9.14226E0	5.07832E-3	9.34601E-2	2.7279E1	-3.26725E1	-3.25414E1	2.67706E1	2.15907E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.17282E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.18443E-1	-7.99108E-1	-9.13072E0	-9.14218E0	5.26905E-3	9.32932E-2	2.72739E1	-3.26801E1	-3.26554E1	2.67984E1	2.15872E-9	2.5199E-3	2.5199E-3	6.31902E-3	2.17711E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.18658E-1	-7.99227E-1	-9.13079E0	-9.14223E0	5.29289E-3	9.32932E-2	2.73314E1	-3.26793E1	-3.25268E1	2.67957E1	2.15808E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.17918E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09734E0	-8.18586E-1	-7.99036E-1	-9.13086E0	-9.14209E0	5.22137E-3	9.33647E-2	2.7288E1	-3.26962E1	-3.25983E1	2.68142E1	2.15505E-9	2.52585E-3	2.52585E-3	6.3074E-3	2.17529E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.18419E-1	-7.98798E-1	-9.13098E0	-9.14211E0	5.24521E-3	9.3174E-2	2.72889E1	-3.26843E1	-3.2626E1	2.67998E1	2.15613E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.18491E-1	-7.98821E-1	-9.13103E0	-9.1419E0	5.36442E-3	9.31025E-2	2.7312E1	-3.26411E1	-3.26295E1	2.68088E1	2.15706E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.18011E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.18515E-1	-7.98798E-1	-9.131E0	-9.14192E0	5.24521E-3	9.32932E-2	2.73057E1	-3.26549E1	-3.26018E1	2.67856E1	2.15817E-9	2.52131E-3	2.52131E-3	6.34982E-3	2.17282E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.1861E-1	-7.98702E-1	-9.13107E0	-9.1419E0	5.38826E-3	9.32932E-2	2.73225E1	-3.26254E1	-3.27095E1	2.68148E1	2.15808E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.1829E-2